Standard Procedure for Preparing Photoresist
Purpose: to prepare photoresist for spin coating
Location: Pettit or Marcus Cleanrooms
Chemicals: acetone, methanol, isopropanol, photoresist
Supplies Needed: glass or Pyrex container, texwipes, tweezers, nitrogen gun, fumehood, photoresist labels, chemical warning label, bottle carrier
Process Procedures:
1. Get an amber bottle from the staff office, if needed.
2. Take a stock bottle or your amber bottle out of the refrigerator, and allow it to warm up to room temperature (approximately 1 hour) by bringing it in a bottle carrier to a photoresist cabinet.
3. If you have a new amber bottle, clean it with an AMI rinse (see cleaning section) and print off chemical labels for it.
4. If you already have an amber bottle or your own stock bottle, they should be stored in one of the following locations:
a. Labeled photoresist cabinets.
b. Refrigerators in the chemical chase.
Time: approximately 5 minutes + time to warm up to room temperature
Comments:
a. Photoresist must be at room temperature before use because it is very sensitive to temperature shock.