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IEN Process Library
IEN Process Library Content
Processing Basics
Equipment Information
Material Information
Technology Information
Dielectric Deposition
Quiz
Etching
Lithography
Metal Deposition
Metrology
Profilometry
Standard Operation Procedures
Characterization
Dielectrics Film Deposition
Etching
Inductively Couple Plasma Etching
Reactive Ion Etching
Furnace Process
Metal Film Deposition
E-beam Evaporation
Sputtering
Packaging
Photolithography
Alignment Exposure
Development
Preparing Photoresist
Spin Coating
Plating
Substrate Preparation
Chemical-Mechanical Polishing
CMOS Clean
Piranha Clean
Plasma Clean
Descum
Gasonic Asher
Ozone Stripper
Yes Plasma Cleaner
Plasma Polishing
Solvent Clean
Standard Recipe Collection
Atomic Layer Deposition
Chemical Vapor Deposition
LPCVD Poly-Silicon
LPCVD Silicon Nitride
PECVD Amorphous Silicon
PECVD Silicon Carbide
PECVD Silicon Dioxide
Oxford ICP-PECVD
Oxford PECVD
Plasma Therm PECVD
STS PECVD
STS PECVD 2
STS PECVD 3
Unaxis PECVD
PECVD Silicon Nitride
Oxford ICP-PECVD
Oxford PECVD
Plasma Therm PECVD
STS PECVD
STS PECVD 2
Unaxis PECVD
Furnace Process
Dry Oxidation
Mini Tystar - Normal
Tystar Nitride/Poly
TEOS Oxide
Wet Oxidation
Mini Tystar - Long
Mini Tystar - Normal
Tystar Nitride/Poly
Lithography
Mask Aligner
Photo-Resist Information
Futurrex NR71-3000p
Futurrex NR9-1500py
Microposit S1813
Microposit SC1827
Microposit SPR220-7.0
NR71 Spin Curve
NR9 Spin Curve
S1813 Spin Curve
SC1827 Spin Curve
SPR220 Spin Curve
Resist Coating
BLE Spin Coater
EVG 101 Spin Coater
Karl Suss RC8
SCS G3P8 Spin Coater
Suss AltaSpray
Metal Thin Film Deposition
DC Sputtering - Metals
E-beam Evaporation - Metals
E-beam Evaporation - SiO2
Filament Evaporation - Metals
RF Sputtering - Metals
Plasma Etch
Dielectrics Etch
Carbide Etch
Nitride Etch
Oxide Etch
Quartz Etch
Oxford Cryogenic ICP
Oxford EndPoint RIE
Oxford EndPoint RIE
Plasma Therm ICP
Plasma Therm RIE
Plasma Therm RIE
Vision RIE 1
Vision RIE 1
Vision RIE 2
Metal Etch
Al Plasma Etch
Cr Plasma Etch
Cu Plasma Etch
Ti Plasma Etch
Other Semiconductors
Polymer Etch
Silicon Etch
Oxford Cryogenic ICP
Plasma Therm ICP
STS HRM - Si Etch
STS ICP
STS Pegasus - Si Etch
Xactix Etcher
Wet Etch
Al Wet Etch
IEN Process Library
Dielectrics Etch
Silicon Dioxide (SiO
2
)
Silicon Nitride (Si
3
N
4
)
Silicon Carbide (SiC)
Quartz (SiO
2
)
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