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Suss AltaSpray Spray Coater can handle wafers up to 8" in diameter and squares up to 6 edge length. It contains one auto spray dispense system, can only process one materials at the same time. IEN cleanroom provides standard recipes for photo-resists listed below
Suss AltaSpray Spray Coater can handle wafers up to 8" in diameter and squares up to 6 edge length. It contains one auto spray dispense system, can only process one materials at the same time. IEN cleanroom provides standard recipes for photo-resists listed below
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