The Federal Institute of Metrology (METAS) serves as the federal centre of competence for all issues related to measurement and for measuring equipment and measuring procedures. METAS operates the full range of quantum electrical primary standards and develops scanning microwave. METAS participated in several European research projects (projects like EMRP JRPs SIB51 GraphOhm , EMPIR JRPs 18SIB07 GIQS ,H2020-NMBP-2016-2017 MMAMA , and H2020- NMBP-TO-IND-2018-2020,2020-2023 NanoBat). METAS has long-standing experience and expertise in all relevant fields of electrical precision measurement in DC, LF and HF, particularly in the field of QHR metrology and in scanning microwave microscope measurements of devices and materials. In this project, METAS will bring in their instrumentations and expertise in SPM (WP2) and QHR measurements (WP3).