The Theory and Calculation Methods in Polishing

Authors: Atsunobu Une, Toshio Kawanishi

Publication Year: 2010, Nikkan Kogyo Shimbun

Table of Contents

Chapter 1: Characteristics of Polishing Processes

Chapter 2: Basic Configuration of Polishing Equipment

Chapter 3: Fundamentals of Polishing Theory

Chapter 4: Analysis of Polishing Motion

Chapter 5: Analysis of Polishing Pressure

Chapter 6: Characteristic Measurement of Parameters Necessary for Simulation

Chapter 7: Verification of Simulations of Various Polishing Methods