Precision Polishing

Authors: Toshio Kawanishi, Nobuo Yasunaga

Publication Year: 2010, Nikkan Kogyo Shimbun

Table of Contents

Part I: Processing Equipment

Lapping and Polishing, Mechanochemical Polishing, Chemical and Mechanical Polishing, Film Polishing and Belt Polishing

Part II: Tools and Equipment

General Abrasives, Superabrasives, Polishing Fluids, Slurries, Polishing Pads, Pad Dressings, Grinding Wheels, Polishing Equipment, CMP Equipment

Part III: Case Studies