Reference Books

Authors: Atsunobu Une, Toshio Kawanishi

Publication Year: 2010, Nikkan Kogyo Shimbun

Table of Contents

Chapter 1: Characteristics of Polishing Processes

Chapter 2: Basic Configuration of Polishing Equipment

Chapter 3: Fundamentals of Polishing Theory

Chapter 4: Analysis of Polishing Motion

Chapter 5: Analysis of Polishing Pressure

Chapter 6: Characteristic Measurement of Parameters Necessary for Simulation

Chapter 7: Verification of Simulations of Various Polishing Methods

Authors: Toshio Kawanishi, Nobuo Yasunaga

Publication Year: 2010, Nikkan Kogyo Shimbun

Table of Contents

Part I: Processing Equipment

Lapping and Polishing, Mechanochemical Polishing, Chemical and Mechanical Polishing, Film Polishing and Belt Polishing

Part II: Tools and Equipment

General Abrasives, Superabrasives, Polishing Fluids, Slurries, Polishing Pads, Pad Dressings, Grinding Wheels, Polishing Equipment, CMP Equipment

Part III: Case Studies

Authors: Toshiro Doi, Toshio Kawanishi, Takeo Nakagawa

Publication Year: 1998, Kogyo Chosakai

Table of Contents

Chapter 1: General Overview - The Role of CMP in Next-Generation LSI Processes -

Chapter 2: Ultra-Precision Machining Technology and the Fundamentals of CMP - The Positioning of CMP and the Mechanism of CMP Machining -

Chapter 3: Elemental Technologies of CMP

Chapter 4: Application Examples to Devices

Chapter 5: The Future of CMP

Authors: Shigeki Okuyama, Atsunobu Une, Akinori Yui, Hirofumi Suzuki

Publication Year: 2013, Corona Publishing Co.

Table of Contents:

Chapter 1: Overview

Chapter 2: Mechanical and Thermal Properties of Metallic Materials

Chapter 3: Cutting Processes

Chapter 4: Grinding Processes

Chapter 5: Polishing Processes