Semiconductor Planarization CMP Technology

Authors: Toshiro Doi, Toshio Kawanishi, Takeo Nakagawa

Publication Year: 1998, Kogyo Chosakai

Table of Contents

Chapter 1: General Overview - The Role of CMP in Next-Generation LSI Processes -

Chapter 2: Ultra-Precision Machining Technology and the Fundamentals of CMP - The Positioning of CMP and the Mechanism of CMP Machining -

Chapter 3: Elemental Technologies of CMP

Chapter 4: Application Examples to Devices

Chapter 5: The Future of CMP