Authors: Toshiro Doi, Toshio Kawanishi, Takeo Nakagawa
Publication Year: 1998, Kogyo Chosakai
Table of Contents
Chapter 1: General Overview - The Role of CMP in Next-Generation LSI Processes -
Chapter 2: Ultra-Precision Machining Technology and the Fundamentals of CMP - The Positioning of CMP and the Mechanism of CMP Machining -
Chapter 3: Elemental Technologies of CMP
Chapter 4: Application Examples to Devices
Chapter 5: The Future of CMP