Extreme Lithography & Materials Innovation Center

The ANGEL project, led by Pacific Northwest National Laboratory, targets significantly improving conversion efficiencies of EUV sources with low-density Sn targets by carrying out fundamental experimental studies and modeling to understand and control the underlying plasma physics. Their studies will also include investigation of the degradation of multi-layer mirrors due to H exposures in the process and blistering kinetics.

FEATURES

ANGEL has several lasers with varying energy, wavelength, and pulse duration for the production and probing of laser plasmas. It is equipped with EUV, VUV, and UV-VIS spectrographs, and the LBNL synchrotron facility is available for testing and evaluating mirror reflectivity. Furthermore, the team has a unique array of thin film synthesis and surface characterization tools, including MBE, APT, in-situ TEM, and STEM.