Extreme Lithography & Materials Innovation Center

Hari Harilal 

Hari Harilal is the Principal Investigator and Director of the ANGEL project. He is currently serving as the Chief Scientist at the National Security Directorate of the Pacific Northwest National Laboratory (PNNL). With over 25 years of experience in laser-plasma interactions, plasma spectroscopy, and plasma sources for next-generation EUV lithography, Dr. Harilal has published more than 200 articles in these fields. Dr. Harilal has received numerous prestigious awards, including the Alexander von Humboldt Fellowship from Germany, the Paul C. Zmola Faculty Scholar of Nuclear Engineering Award from Purdue University, and excellence in research awards from both PNNL and Purdue University. He is a fellow of several esteemed organizations, including the Institute of Electrical and Electronics Engineers (IEEE), the International Society for Optics and Photonics (SPIE), and Optica (formerly the Optical Society of America).

Email: hari@pnnl.gov

Projects: ANGEL