Extreme Lithography & Materials Innovation Center

Arun Devaraj

Arun Devaraj is chief material scientist at Pacific Northwest National Laboratory and serves as a Co-PI and Co-Director of the ANGEL project, where he also leads the Thrust 2 focused on elucidating degradation mechanisms in multi-layer mirrors used in EUV lithography systems. In his research career Dr. Devaraj has published over 150 peer-reviewed publications, and he won the DOE Basic Energy Sciences Early Career Research Award. Dr. Devaraj’s research focuses on deciphering the processing–microstructure–property relationships in advanced materials as well as understanding the atomic-scale material degradation mechanisms—including oxidation, hydrogen embrittlement, and stress corrosion cracking in extreme environments by employing state-of-the-art techniques such as atom probe tomography, electron microscopy, and high-energy synchrotron x-ray diffraction.

Email: arun.devaraj@pnnl.gov

Projects: ANGEL