Extreme Lithography & Materials Innovation Center

Tiffany Kaspar

Tiffany Kaspar has over 20 years of experience with epitaxial thin film deposition by molecular beam epitaxy and pulsed laser deposition at PNNL. Her expertise centers on systematic structural characterization of epitaxial films with scattering, spectroscopic, and imaging techniques to establish structure-property relationships that provide insight into the physics underlying observed phenomena.  In ANGEL project, Dr. Kaspar will synthesize well-defined model thin films and surfaces to investigate the fundamental material degradation mechanisms that affect the mirrors utilized in EUV lithography tools.

Email: tiffany.kaspar@pnnl.gov

Projects: ANGEL