Extreme Lithography & Materials Innovation Center

Farhat Beg

Farhat Beg leads Thrust 1 of the ANGEL project, focusing on understanding extreme ultraviolet (EUV) photon generation and mastering their radiation transport in laser-produced plasma sources. As a Professor and the Shao-Chi and Lily Lin Chancellor’s Endowed Chair in Engineering Science at UC San Diego’s Mechanical & Aerospace Engineering Department, his expertise in laser–plasma interactions, Fusion energy, pulsed power-driven X- and Z-pinches, and neutron sources is widely recognized. He has published over 300 articles and has won numerous prestigious awards—including the IEEE PSAC Award. He is the fellow of three professional societies –APS, IEEE and AAAS —Professor Beg’s groundbreaking research in high energy density science is pivotal in advancing next-generation EUV lithography and related technologies.

Email: fbeg@ucsd.edu

Projects: ANGEL