Scanning Electron Microscope
(Thermo Fisher)
Scanning Electron Microscope
(Thermo Fisher)
A Scanning Electron Microscope (SEM) is a microscope that uses a focused electron beam (e-beam) to scan the surface of a sample. The SEM uses electromagnetic lenses to control the electrons trajectory like optical lenses in a conventional optical microscope. The focused e-beam interacts with the sample generating secondary electrons (SE) as result of the inelastic scattering with shallow electrons (few nm depth), providing highly detailed information about the topography and surface features. Unlike a light source in a conventional optical microscope, the electrons in a SEM have a shorter wavelength (of the order of pm) allowing for creating high-resolution images exceeding 50,000× magnification easily. A SEM generally operates at high vacuum (~10-6 Torr), contributing to even higher resolution by minimizing scattering during the free trajectory and increasing e-beam penetration. The electron energy in a SEM can be controlled in a range from a few hundred eV to 30 keV, so the importance of a SEM is due to the capability to perform a variety of methods for materials characterization with high spatial resolution.
Some of the analytical techniques that result from the electron-matter interactions are:
- Energy Dispersive X-ray spectroscopy (EDS) to analyze the chemical composition of a sample by measuring the energy of the emitted x-ray photons. Additionally, using the x-ray depth sensibility we can estimate thin film thickness.
- Backscattered Electrons (BSE) which are sensitive to atomic number and materials density.
- Cathodoluminescence (CL) is used to analyze the luminescence in the UV-NIR region (250-1000 nm) as result of radiative recombination of the generated electron-hole pairs in semiconductors.
During the operation, electron energy can be controlled from 100 eV to 30 keV.
The Thermofisher Prisma-E has the capability to operate with controlled environment whether to emulate specific gas or hydration conditions, or to avoid effects that can degrade some materials under high vacuum. It has also a heating stage for studying in situ the samples at high temperatures (up to 500 ºC).