[October 2024] The Electrochemical Society 2024 (PRiME 2024, Hawaii)
- Bumsik Kim gave an oral presentation on, "Selective Etching of SiO2 over Si3N4 through Varying the Concentration of Fluorine Species"
- Jongwon Han gave an aral presentation on, "Addition of Iodine Compounds in H3PO4 Solution for the Increase in Si3N4 Etching Rate"
[August 2024] Seunghyo Lee received his Ph.D. and joined Samsung Electronics. Congratulations!
[February 2024] Taegun Park received his Ph.D. and joined Samsung Electronics. Congratulations!
[September 2023] International symposium on Ultra Clean Processing of Semiconductor (UCPSS, Brugge, Belgium)
- Taegun Park gave an oral presentation on, "Selective Si3N4 Etching for 3D NAND Integration by Using Low Concentration of H3PO4" - Best Student Paper Award
- Seunghyo Lee gave an aral presentation on, "Highly Selective Etching of SiGe to Si for GAAFET"
[August 2023] Jinhoon Lee received his Ph.D. and joined Nano Device Lab as Post-Doctoral researcher. Congratulations!
[August 2023] Taehyeon Kim and Junwoo Lee received their Ph.D. and joined Samsung Electronics. Congratulations!
[August 2023] Kiwon Song, very kind and brilliant students, joined NDL. Welcome!
[February 2023] The 30th Korean Conference on Semiconductors in Pyeongchang
- Prof. Lim attended the conference as an invited speaker to give an oral presentation on "Control of Selective Si3N4 Etching for 3D NAND Manufacturing".
[February 2023] SEMICON KOREA 2023 in Seoul
Prof. Lim gave an oral presentation on "Fundamentals of Semiconductor Surface Cleaning Technology"
[September 2022] Decided to start the Development Project for Materials, Devices, and Technology
The research project, “Development of materials and technology required for ultra-high purity hydrofluoric acid-based wet etchant”, will start in the Development Project for Materials, Devices, and Technology, which is financially supported by Ministry of Trade, Industry and Energy (MOTIE).
[August 2022] Changjin Son received his Ph.D. and joined Samsung Electronics. Congratulations!
[August 2022] Jongwon Han and Wonje Lee, very brilliant students, joined NDL. Welcome!
[June 2022] Prof. Lim lectured for Incoming Employees of Samsung Electronics DS Department
Prof. Lim gave two full-day lectures on Semiconductor Cleaning and Wet Etching Process to incoming employees of Samsung Electronics DS Department on June 16-17.
[June 2022] "ChemArTech" Received an award and fund from "SKC Startup Plus" [See in detail]
The startup company "ChemArTech" received an award and fund from the "SKC Startup Plus" contest.
[June 2022] DO sensor was provided for research partnership.
HORIBA provided a DO sensor (DO 120) for a semiconductor process research partnership. Dr. Naito Kumi visited NDL and introduced the equipment to members.
[June 2022] Changjin Son decides to join Samsung Electronics. Congratulations!
[May 2022] 17th Semiconductor Cleaning Science and Technology (SCST 17) in Vancouver
- Prof. Lim attended SCST 17 as an organizer in Vancouver, Canada.
- Junwoo Lee gave an oral presentation on "Control Of Particle Adhesion On InGaAs Surface In Basic Solution By The Addition Of Cationic Surfactant"
- Changjin Son gave an oral presentation on "Si3N4 Etching with Carboxylic Acid-Containing Superheated Water"
- Taegun Park gave an oral presentation on "Understanding of Etching Mechanism of Si3N4 Film in H3PO4 Solution For The Fabrication of 3D NAND Devices"
[May 2022] Prof. Lim launched the startup company "ChemArTech".
[May 2022] Decided to start an Industry-Academia Associated Collaboration R&D project
The research project, "Development of Ru precursor and electroless plating process for the next generation semiconductor metallization", will start in the Industry-Academia Associated Collaboration R&D Program, which is financially supported by Ministry of SMEs and Startups (MSS).
[April 2022] Decided to start a Start-up Leading Lab Project
Will start a Lab-Specialized Start-up Leading University Project to launch a startup company, which is supported by Ministry of Education and Ministry of Science and ICT.
[April 2022] Patent (10-2389567) was Registered. [See in detail]
Sangwoo Lim and Taegun Park’s patent "Etching composition for silicon nitride layer and etching method using the same" was registered.
[April 2022] Decided to start the Next Generation System Semiconductor Design, Device, and Process Development Project
The research project, "Development of lateral recess wet-cleaning process for fabrication of Si-based 3D semiconductor structure", will start in the Next Generation System Semiconductor Design, Device, and Process Development Program, which is financially supported by Ministry of Trade, Industry and Energy (MOTIE) and Korea Semiconductor Research Consortium (KSRC).
[February 2022] Decided to continue the 2nd Tier of Strategic Core Material Independence Technology Development Project
The research project, "Development of Ceramic Material for 30 kW High Power Process", will be continued as part of the Strategic Core Material Independence Technology Development Project, which is financially supported by Ministry of Trade, Industry and Energy (MOTIE).
[January 2022] Yuseok Lee, a very brilliant student, joined NDL. Welcome!
[December 2022] Prof. Lim lectured for Incoming Employees of Samsung Electronics DS Department
Prof. Lim gave three full-day lectures on Semiconductor Cleaning and Wet Etching Process to incoming employees of Samsung Electronics DS Department on November 17-19 and December 1-3.
[November 2021] Patent (10-2325905) was Registered. [See in detail]
Sangwoo Lim and Taehyeon Kim’s patent "Etching composition for silicon nitride layer and etching method using the same" was registered.
[October 2021] Patent (10-2315919) was Registered. [See in detail]
Sangwoo Lim and Changjin Son’s patent "Non-phosphoric acid type etching composition for silicon nitride layer and etching method using the same" was registered.
[August 2021] Jihoon Na received his Ph.D. and joined Samsung Electronics. Congratulations!
[July 2021] Prof. Lim lectured for Incoming Employees of Samsung Electronics DS Department
Prof. Lim gave three full-day lectures on Semiconductor Cleaning and Wet Etching Process to incoming employees of Samsung Electronics DS Department on June 14-16, June 28-30, and July 12-14.
[May 2021] Professor Lim was invited as a panel at the "Economy Wide Issue” Program on SBS-Biz TV. [See video]
Professor Lim was invited as an expert to discuss “K-Semiconductor Strategy”, which was announced to foster domestic semiconductor industry in Korea. The national semiconductor-related policy, current situation of global semiconductor industry, and its prospect were discussed.
[April 2021] International Symposium on Ultra Clean Processing of Semiconductor (UCPSS)
- Jihoon Na gave an oral presentation on "Effect of Surface Oxidation on the Material Loss of InGaAs in Acidic Solutions" - Student Paper Award
- Changjin Son gave an oral presentation on "Kinetic Study on the Si3N4 Etching in Superheated Water" - Outstanding Student Paper Award
- Taegun Park gave an oral presentation on "Reaction Kinetics of Poly-Si Etching in TMAH Solution"