Seunghyo Lee, Kiwon Song, and Sangwoo Lim*, "Control of selective SiGe etching by enhanced formation of hydroxyl radicals and by surface passivation in peracetic acid solution", Appl. Surf. Sci. 661 (2024) 160063.
Bumsik Kim, Wonje Lee, and Sangwoo Lim*, "Understanding the contributions of F–, HF, and HF2– to the etching of SiO2 and unveiling the reaction kinetics to represent etching behavior of SiO2 up to pH 5", Appl. Surf. Sci. 657 (2024) 159829.
Taehyeon Kim, Taegun Park,Yuseok Lee, Jongwon Han, and Sangwoo Lim*, "Behavior of oxide regrowth during the selective Si3N4 etching process on 3D NAND structures using finite element computational simulations", J. Ind. Eng. Chem.130 (2024) 592–599.
Seunghyo Lee, Wonje Lee, and Sangwoo Lim*, "Enhancement of selective SiGe dissolution through facilitated surface oxidation by formation of hydroxyl radicals in peracetic acid solution", Appl. Surf. Sci. 643 (2024) 158684.
Taegun Park, Taehyeon Kim, Jongwon Han, and Sangwoo Lim*, "Effect of addition of amino acids with hydrophilic side chains to low-concentration H3PO4 for improvement of Si3N4 etching kinetics and oxide regrowth phenomena on multi-layered Si3N4/SiO2 structures", Appl. Surf. Sci. 638 (2023) 158118.
Junwoo Lee and Sangwoo Lim*, "Adsorption of poly(oxyethylene) and hydroxyl group-containing nonionic surfactants on silica particles in NH4OH solution and its effect on the interaction force with Si surface", Colloids Surf. A: Physicochem. Eng. 674 (2023) 131991.
Jinhoon Lee, Junwoo Lee, Taehyeon Kim, Taegun Park, and Sangwoo Lim*, "Effect of dissolved oxygen on surface oxidation and dissolution of InGaAs and its impact on AsGa, AsIn, and VAs defect generation", Mater. Sci. Semicond. 165 (2023) 107677.
Taehyeon Kim, Taegun Park, and Sangwoo Lim*, "Improvement of Si3N4/SiO2 etching selectivity through the passivation of SiO2 surface in aromatic carboxlic acid-added H3PO4 solutions for the 3D NAND integration", Appl. Surf. Sci. 619 (2023) 156758.
Taegun Park, Taehyeon Kim, Changjin Son, and Sangwoo Lim*, "Passivation of poly-Si surface using vinyl and epoxy group additives for selective Si3N4 etching in H3PO4 solution", Appl. Surf. Sci. 608 (2023) 155143.
Taehyeon Kim, Taegun Park, Changjin Son, Sangwoo Lim*, "Improvement of SiO2 surface morphology during the selective Si3N4 etching in the multi-layered 3D NAND Si3N4/SiO2 stack structures by the generation of CO2 gas through the control of redox reaction", Surf. Interface, 35 (2022) 102484.
Changjin Son, Yuseok Lee, and Sangwoo Lim*, "Chemical modification of subcritical water for the dissolution of Si3N4 layer in the fabrication of microelectronic devices", J. Supercritical Fluids 189 (2022) 105699.
Shujie Li, Brayden Liebe, Changjin Son, Taehyeon Kim, Shelby Surprenant, Skip Rochefort, Sangwoo Lim, Rajiv Malhotra and Chih-Hung Chang*, "Inkjet-printed p-type CuBrxI1−x: wearable thin-film transistors", Adv. Mater (2022).
Junwoo Lee, Jihoon Na, and Sangwoo Lim*, "Control of adhesion and desorption behavior of silica particles on InGaAs surfaces by addition of hexadecyltrimethylammonium bromide in ammonium hydroxide–hydrogen peroxide mixture solution", Appl. Surf. Sci. 509 (2022) 152949.
Changjin Son, Taegun Park, and Sangwoo Lim*, "Addition of carboxylic acids to superheated water for the environmentally benign removal of silicon nitrides", ACS Sustainable Chem. Eng. 9 (2021) 15661-15672.
Jihoon Na and Sangwoo Lim*, "Phosphoric acid-peroxide mixture surface preparation for the improvement of InGaAs channel characteristics", J. Ind. Eng. Chem. 102 (2021) 35-43.
Taegun Park, Changjin Son, Taehyeon Kim, and Sangwoo Lim*, "Understanding of Si3N4-H3PO4 reaction chemistry for the control of Si3N4 dissolution kinetics", J. Ind. Eng. Chem. 102 (2021) 146-154.
Taehyeon Kim, Changjin Son, Junwoo Lee, Eunseok Oh, Shujie Li, Chih-Hung Chang, and Sangwoo Lim*, "Interfacial ZnS passivation for improvement of transparent ZnO/CuI diode characteristics", Appl. Surf. Sci. 536 (2021) 147645.
Jinhoon Lee, Jihoon Na, Changjin Son, and Sangwoo Lim*, "Hexene passivation on a p-type Zn-doped InGaAs surface", Mater. Chem. Phys. 251 (2020) 123197.
Taehyeon Kim, Changjin Son, Taegun Park, and Sangwoo Lim*, "Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures", Microelectron. Eng. 221 (2020) 111191.
Eunseok Oh and Sangwoo Lim*, "Addition of nitrate to superheated water and its reaction mechanism with CC cross-linked ion-implanted photoresists", Appl. Surf. Sci. 496 (2019) 143678.
Jihoon Na and Sangwoo Lim*, "Elemental behaviors of InGaAs surface after treatment in aqueous solutions", Microelectron. Eng. 212 (2019) 27-36.
Changjin Son and Sangwoo Lim*, “Control of Si3N4 etching kinetics and selectivity to SiO2 by the additives in superheated water”, ECS J. Solid State Sci. Technol. 8 (2019) N85-N91.
Eunseok Oh and Sangwoo Lim*, "Removal of high-dose P+ ion-implanted photoresist on GaAs in the mixture of dimethyl sulfoxide and acetonitrile", J. Ind. Eng. Chem. 77 (2019) 230-237.
Junwoo Lee and Sangwoo Lim*, "Polarization behavior of polyvinylidene fluoride films with the addition of reduced graphene oxide", J. Ind. Eng. Chem. 67 (2018) 478-485.
Md Ashraf Hossain, Changjin Son, and Sangwoo Lim*, "Improvement in the photovoltaic performance of a dye-sensitized solar cell by the addition of CeO2:Gd nanoparticles in the photoanode", J. Ind. Eng. Chem. 65 (2018) 418-422.
Md Ashraf Hossain, Sehyun Oh, and Sangwoo Lim*, "Fabrication of dye-sensitized solar cells using a both-ends-opened TiO2 nanotube/nanoparticle hetero-nanostructure", J. Ind. Eng. Chem. 51 (2017) 122-128.
Sehyun Oh, Seunghyo Lee, Eunseok Oh, and Sangwoo Lim*, "Reduction of Si≡Si3 defect density at the Si/SiO2 interface by sol-gel SiO2 thin film passivation", Thin Solid Films 632 (2017) 134-140.
Jihoon Na, Seunghyo Lee, and Sangwoo Lim*, “ Oxidation and etching behaviors of the InAs surface in various acidic and basic chemical solutions”, Surf. Sci. 658 (2017) 22-30.
Dongwan Seo, Jihoon Na, Seunghyo Lee, and Sangwoo Lim*, “Behavior of GaSb (100) and InSb (100) surfaces in the presence of H2O2 in acidic and basic cleaning solutions”, Appl. Surf. Sci. 399 (2017) 523-534.
Eunseok Oh, Jihoon Na, Seunghyo Lee, and Sangwoo Lim*, “Removal of ion-implanted photoresists on GaAs using two organic solvents in sequence”, Appl. Surf. Sci. 376 (2016) 34-42.
Seunghyo Lee, Hyeokseong Choo, Changheon Kim, Eunseok Oh, Dongwan Seo, and Sangwoo Lim*, “Metal-assisted chemical etching of Ge surface and its effect on photovoltaic devices”, Appl. Surf. Sci. 371 (2016) 129-138.
Eunseok Oh, Dongwan Seo, Solbaro Kim, Keun Young Lee, Sang-Woo Kim, and Sangwoo Lim*, “Energy harvesting δ-phase polyvinylidene-fluoride sponge”, Sci. Adv. Mater. 8 (2016) 817-824.
Changheon Kim, Sangwoo Lim, and Chaehwan Jeong, “Preparation of periodically arrayed silicon microwires using simple patterning process”, J. Nanosci. Nanotechnol. 15 (2015) 8527-8532.
Dongwan Seo, Jihoon Na, Seunghyo Lee, and Sangwoo Lim*, “Behavior of a GaSb (100) surface in the presence of H2O2 in wet-etching solutions”, J. Phys. Chem. C 119 (2015) 24774-24780.
Dongwan Seo, Jihoon Na, Changheon Kim, Chaehwan Jeong, and Sangwoo Lim*, “Improvement of Cu2ZnSnS4 thin film properties by a modified sulfurization process”, Thin Solid Films 591 (2015) 289-294.
Solbaro Kim, Changheon Kim, Jinhoon Lee, Jihoon Na, Chaehwan Jeong, and Sangwoo Lim*, “Electron beam treated ZnO thin film as an anti-reflection layer for crystalline Si solar cell”, Sci. Adv. Mater. 7 (2015) 1665-1671.
Solbaro Kim, Changheon Kim, Jihoon Na, Eunseok Oh, Chaehwan Jeong, and Sangwoo Lim*, “Improvement in electrical properties of sol-gel-derived In-doped ZnO thin film by electron beam treatment”, J. Sol-Gel Sci. Technol. 74 (2015) 790-799.
Changheon Kim, Jonghwan Lee, Sangwoo Lim, and Chaehwan Jeong, “Enhanced absorption and short circuit current density of selective emitter solar cell using double textured structure”, Sol. Energy 116 (2015) 265-271.
Hyeokseong Choo, Dongwan Seo, and Sangwoo Lim*, “Surface modification of a MoSiON phase shift mask to reduce critical dimension variation after exposure to a 193-nm ArF excimer laser”, Appl. Surf. Sci. 311 (2014) 831-836.
Dongwan Seo, Changheon Kim, Eunseok Oh, Chang Woo Hong, Jin Hyeok Kim, and Sangwoo Lim*, “Control of metal salt ratio and MoS2 layer thickness in a Cu2ZnSnS4 thin film solar cell”, J. Mater. Sci.: Mater. Electron. 25 (2014) 3420-3426.
Changheon Kim, Sangwoo Lim, and Chaehwan Jeong, “Ultrafast crystallization of amorphous silicon thin films by using an electron beam annealing method”, J. Korean Phys. Soc. 64 (2014) 1091-1095.
Solbaro Kim, Changheon Kim, Chaehwan Jeong, and Sangwoo Lim*, “Effect of energetic electron beam treatment on Ga-doped ZnO thin films”, Curr. Appl. Phys. 14 (2014) 862-867.
Dongwan Seo, Jin Sung Bae, Eunseok Oh, Solbaro Kim, and Sangwoo Lim*, “Selective wet etching of Si3N4/SiO2 in phosphoric acid with the addition of fluoride and silicic compounds”, Microelectron. Eng. 118 (2014) 66-71.
Chanhyoung Park, Solbaro Kim, Changheon Kim, Chaehwan Jeong, and Sangwoo Lim*, “Effect of energetic electron beam treatment on transparent conductive ZnO thin films”, Thin Solid Films 548 (2013) 263-269.
Hyeokseong Choo, Dongwan Seo, and Sangwoo Lim*, “Surface modification of the MoSiON phase shift mask to reduce critical dimension variation”, Appl. Surf. Sci. 282 (2013) 320-325.
Dongwan Seo and Sangwoo Lim*, “Effect of sulfur and copper amounts in sol-gel precursor solution on the growth, crystal properties, and optical properties of Cu2ZnSnS4 films”, J. Mater. Sci.: Mater. Electron. 24 (2013) 3756-3763.
Chanhyoung Park, Solbaro Kim, and Sangwoo Lim*, “Synthesis of arsenic-doped p-type ZnO films by addition of As2O3 to the ZnO spin coating solution”, Solid State Commun. 167 (2013) 18-22.
Jungmok Seo, Soonil Lee, Heetak Han, Youngwon Chung, Jaehong Lee, Sung-Dae Kim,Young-Woon Kim, Sangwoo Lim, and Taeyoon Lee, “Reversible wettability control of silicon nanowire surfaces: From superhydrophilicity to superhydrophobicity”, Thin Solid Films, 527 (2013) 179-185.
Junuei Jung and Sangwoo Lim*, “ZnO nanowire-based glucose biosensors with different coupling agents”, Appl. Surf. Sci. 265 (2013) 24-29.
Junuei Jung, Jihyun Myoung, and Sangwoo Lim*, “Effects of ZnO nanowire synthesis parameters on the photovoltaic performance of dye-sensitized solar cells”, Thin Solid Films, 520 (2012) 5779-5789.
Jooyoung Chung, Jihyun Myoung, Jisook Oh, and Sangwoo Lim*, “Successive ionic layer adsorption and reaction of ZnSe shells for ZnO nanowire-based dye sensitized solar cells”, J. Phys. Chem. Solids 73 (2012) 535-539.
Jisook Oh, Chanhyoung Park, Dongwan Seo, Juneui Jung, and Sangwoo Lim*, “Effect of post-etch cleaning on Ru-capped extreme ultraviolet lithography photomask”, Appl. Surf. Sci. 258 (2012) 4702-4706.
Sining Yun and Sangwoo Lim*, “Effect of Al-doping on the structure and optical properties of electrospun zinc oxide nanofiber films”, J. Colloid Interf. Sci. 360 (2011) 430-439.
Yongzhe Zhang, Jooyoung Chung, Juneyoung Lee, Jihyun Myoung, and Sangwoo Lim*, “Synthesis of novel ZnO nanospheres with uniform nanopores by hydrothermal process”, J. Phys. Chem. Solids 72 (2011) 1548-1553.
Jisook Oh, Jin Sung Bae, and Sangwoo Lim*, “Kinetic study on the wet etching of La2O3 in acidic solutions”, J. Electrochem. Soc. 158 (2011) H1183-H1187.
Dongwan Seo, Chanhyoung Park, Juneui Jung, Mihyun Yoon, Dongwook Lee, Chang Yeol Kim and and Sangwoo Lim*, “Behavior of Ru surfaces after ozonated water treatment”, Appl. Surf. Sci. 257 (2011) 10477-10482.
Jahyun Yang, Kyungtaek Im, and Sangwoo Lim*, “Addition of surfactants in ozonated cleaning water for the suppression of functional group formation and particle adhesion on the SiO2 surface”, Appl. Surf. Sci. 257 (2011) 5476-5479.
Jisook Oh, Jihyun Myoung, Jin Sung Bae, and Sangwoo Lim*, “Etch behavior of ALD Al2O3 on HfSiO and HfSiON stacks in acidic and basic etchants”, J. Electrochem. Soc. 158 (2011) D217-D222.
Sining Yun and Sangwoo Lim*, “Improved conversion efficiency in dye-sensitized solar cells based on electrospun Al-doped ZnO nanofiber electrodes prepared by seed layer treatment”, J. Solid State Chem. 184 (2011) 273-279.
Jooyoung Chung, Jihyun Myoung, Jisook Oh, and Sangwoo Lim*, “Synthesis of ZnS shell on the ZnO nanowire and its effect on the nanowire-based dye-sensitized solar cells”, J. Phys. Chem. C 114 (2010) 21360-21365.
Sining Yun, Juneyoung Lee, Jooyoung Chung, and Sangwoo Lim*, “Improvement of ZnO nanorod-based dye-sensitized solar cell efficiency by Al doping”, J. Phys. Chem. Solids 71 (2010) 1724-1731.
Juneyoung Lee, Jooyoung Chung, and Sangwoo Lim*, “Improvement of optical properties of post-annealed ZnO nanorods”, Physica E Low Dimens. Syst. Nanostruct. 42 (2010) 2143-2146.
Kibyung Park, Younghwan Lee, Kyung Taek Im, June Young Lee, and Sangwoo Lim*, “Atomic layer deposition of HfO2 on self-assembled monolayer-passivated Ge surfaces”, Thin Solid Films 518 (2010) 4126-4130.
Jooyoung Chung, June Young Lee, and Sangwoo Lim*, “Annealing effects of ZnO nanorods on dye-sensitized solar cell efficiency”, Physica B Condens. Matter 405 (2010) 2593-2598.
Mihyun Yoon, Kyungtaek Im, Jahyun Yang, and Sangwoo Lim*, “Improvement in the optical absorption of PECVD microcrystalline Si thin film through modification of the crystalline fraction through an annealing process”, Physica B Condens. Matter 405 (2010) 1526-1531.
Sining Yun, Juneyoung Lee, Jahyun Yang and Sangwoo Lim*, “Hydrothermal synthesis of Al-doped ZnO nanorod arrays on Si substrate”, Physica B Condens. Matter 405 (2010) 413-419.
Ki-Yeon Yang, Kyung-Min Yoon, Sangwoo Lim, and Heon Lee, “Direct indium tin oxide patterning using thermal nanoimprint lithography for highly efficient optoelectronic devices”, J. Vac. Sci. Technol. B 27(6) (2009) 2786-2789.
Jahyun Yang, Kyung Taek Im, June Young Lee, and Sangwoo Lim*, “Multiple internal reflection Fourier transform-infrared spectroscopy study on Si surface for measurement of PSL particles”, J. Ind. Eng. Chem. 15 (2009) 763-766.
Jahyun Yang, June Young Lee, Kyung Taek Im, and Sangwoo Lim*, “Influence of Sn-doping in hydrothermal methods on the optical property of the ZnO nanostructures”, Physica E Low Dimens. Syst. Nanostruct. 42 (2009) 51-56.
Younghwan Lee, June Young Lee, Kyung Taek Im, and Sangwoo Lim*, “Effect of isopropyl alcohol addition in ozonated water on the corrosion of tungsten film in photoresist removal process”, Jpn. J. Appl. Phys. 48 (2009) 056511.
Younghwan Lee, Kibyung Park, Kyung Taek Im, June Young Lee, Seongil Im, Jung Han Lee, Yeonjin Yi, and Sangwoo Lim*, “Effect of modification of S-terminated Ge(100) surface on ALD HfO2 gate stack”, Appl. Surf. Sci. 255 (2009) 7179-7182.
Jaejin Song, Seonghoon Baek, Heon Lee and Sangwoo Lim*, “Selective growth of vertical ZnO nanowires with the control of hydrothermal synthesis and nano-imprint technology”, J. Nanosci. Nanotechnol. 9(6) (2009) 3909-3913.
Seonghoon Baek and Sangwoo Lim*, “Effect of Si wafer resistivity on the growth of ZnO nanorods”, Thin Solid Films 517 (2009) 4560-4564.
Huihu Wang, Seonghoon Baek, Jonghyuck Lee, and Sangwoo Lim*, “High photocatalytic activity of silver-loaded ZnO-SnO2 coupled catalysts”, Chem. Eng. J. 146 (2009) 355-361.
Younghwan Lee, Kibyung Park, and Sangwoo Lim*, “Oxidation of hydrogen terminated Ge(100) surface in the presence of iodine in methanol”, Appl. Surf. Sci. 255 (2008) 3316-3319.
Jonghyuck Lee, Kibyung Park, and Sangwoo Lim*, “Effect of HAc and IPA addition in ozonated water cleaning system for ArF photoresist removal”, J. Electrochem. Soc. 155 (2008) D547-D550.
Won Bae Lim, Viswanathan S. Saji, Yong Soo Cho*, Yong Gun Shul, Sangwoo Lim, Jae Hyuk Jang and Hong Ryul Lee, “Crystallization and dielectric properties of low temperature dielectrics containing Li2O filler”, J. Non-Crystalline Solids 354 (2008) 3849-3853.
Jahyun Yang, Jaejin Song, Seonghoon Baek and Sangwoo Lim*, “Effect of surface preparation on the morphology of ZnO nanorods”, Physica B Condens. Matter 403 (2008) 3034-3039.
Younghwan Lee, Kibyung Park, Yong Soo Cho and Sangwoo Lim*, “Effect of Ge surface termination on oxidation behavior”, Appl. Surf. Sci. 254 (2008) 7544-7548.
Kibyung Park, Younghwan Lee, Jonghyuck Lee and Sangwoo Lim*, “Oxidation mechanism of hydrogen-terminated Ge(100) surface”, Appl. Surf. Sci. 254 (2008) 4828-4832.
Jaejin Song, Seonghoon Baek and Sangwoo Lim*, “Effect of hydrothermal reaction conditions on the optical properties of ZnO nanorods”, Physica B Condens. Matter 403 (2008) 1960-1963.
Jaejin Song, Seonghoon Baek, Jonghyuck Lee and Sangwoo Lim*, “Role of OH- in the low temperature hydrothermal synthesis of ZnO nanorods”, J. Chem. Technol. Biot. 83 (2008) 345-350.
Huihu Wang, Seonghoon Baek, Jaejin Song, Jonghyuck Lee and Sangwoo Lim*, “Microstructural and optical characteristics of solution-grown Ga-doped ZnO nanorod arrays”, Nanotechnology 19 (2008) 075607.
Yonughwan Lee, Jonghyuck Lee, Yonggun Shul and Sangwoo Lim*, “Effect of wafer resistivity and HF concentration on the formation of vertically aligned porous silicon”, J. Ind. Eng. Chem 14 (2008) 105-109.
Jonghyuck Lee, Kibyung Park and Sangwoo Lim*, “Improvement of photoresist removal efficiency in ozonated water cleaning system”, J. Ind. Eng. Chem, 14 (2008) 100-104.
Kibyung Park, Younghwan Lee and Sangwoo Lim*, “Modification of H-terminated Ge surface in hydrochloric acid”, Appl. Surf. Sci. 254 (2008) 1842-1846.
Seonghoon Baek, Jaejin Song and Sangwoo Lim*, “Improvement of the optical properties of ZnO nanorods by Fe doping”, Physica B Condens. Matter 399 (2007) 101-104.
Jaejin Song and Sangwoo Lim*, “Effect of seed layer on the growth of ZnO nanorods”, J. Phys. Chem. C 111 (2007) 596-600.
Sangwoo Lim*, Sandy Parsons and Tien-Ying Luo, “Effect of repetition of plasma nitride oxide integration”, Thin Solid Films 515 (2006) 2673-2677.
Sangwoo Lim, Seung Wan Kim, Hyun Jong Kim, Ji Eun Ahn, Hak Soo Han and Yong Gun Shul, “Effect of operation parameters on the performance of micro direct methanol fuel cell fabricated on printed circuit board”, J. Power Sources 161 (2006) 27-33.
Sangwoo Lim*, TienYing Luo and Jack Jiang, “Mechanism of silicon dioxide decoupled plasma nitridation”, Jpn. J. Appl. Phys. 45 (2006) L413-L415.
S. Rauf, Sangwoo Lim and P. L. G. Ventzek, “Model for nitridation of nanoscale SiO2 thin films in pulsed inductively coupled N2 plasma”, J. Appl. Phys. 98 (2005) 024305.
Sangwoo Lim and Brian Winstead, “Surface preparation for transistor performance improvement by triple gate oxide integration”, J. Electrochem. Soc. 152 (2005) G714-G719.
Sangwoo Lim, Daniel Tekleab, Tien-Ying Luo, and Paul Grudowski, “Optimization of annealing process of pulsed RF decoupled plasma nitridation oxynitrides”, Jpn. J. Appl. Phys. 44 (2005) L584-L586.
Sangwoo Lim and Tien Ying Luo, “Behavior of transconductance and drive current of decoupled plasma nitridation oxynitrides”, Jpn. J. Appl. Phys. 44 (2005) 3923-3925.
Sangwoo Lim and Christopher E. D. Chidsey, “Role of O3 and OH radicals in ozonated aqueous solution for the photoresist removal of semiconductor fabrication”, Ozone-Sci. Eng., 27 (2005) 139-146.