Embedded Files
Analysis Equipments
FT-IR
FT-IR
Thermo, Nicolet 380 FT-IR
Thermo, Nicolet 380 FT-IR
Spectral range : 7,800-600 cm-1
Spectral range : 7,800-600 cm-1
Beam splitter : Ge-on-KBr
Beam splitter : Ge-on-KBr
Detector : MCT-A Detector (need liquid nitrogen)
Detector : MCT-A Detector (need liquid nitrogen)
Source : High Intensity air-cooled Ever-Glo
Source : High Intensity air-cooled Ever-Glo
Spectroscopic Ellipsometry
Spectroscopic Ellipsometry
Nano-view, SE MG-1000
UV option : 250 ~ 840 nm
Sample size : (5 mm x 5 mm) ~ (200 mm x 200 mm)
UV/Vis Spectroscopy
UV/Vis Spectroscopy
Optizen, 2120 UV
Optizen, 2120 UV
Range : 190-1100 nm
Range : 190-1100 nm
Source : Single beam type
Source : Single beam type
Zeta Potential Measurement
Zeta Potential Measurement
Otsuka, ELS-8000
Otsuka, ELS-8000
Optical system : Laser Doppler
Optical system : Laser Doppler
Light source : He-Ne Laser (10 mW)
Light source : He-Ne Laser (10 mW)
Detector : Photon count multiplier phototube
Detector : Photon count multiplier phototube
Contact Angle Measurement
Contact Angle Measurement
SEO, Phoenix 300
SEO, Phoenix 300
Contact angle : 0-180˚
Contact angle : 0-180˚
Surface and interfacial tension : 10-1~103 mN/m
Surface and interfacial tension : 10-1~103 mN/m
FE-SEM
FE-SEM
Hitachi, S-4200
Magnification: ~ 100,000x
X: 0-100mm
Y: 0-50mm
Z: 5-30mm
Theta: -5 to +60 degrees
Rotation: 360 degrees
Probe Station
Probe Station
MS-TECH, MST-4000A, HP 4145B
4 inch Vacuum Chuck
Microscope : 10~80x, Zoom Control
X/y Stage Micro Motion Control
Noise Level : ~3 pA
Probe Tip : 0.5 um , 0.3 um
Optical Fiber Type Hot Phosphoric Acid Concentration Monitor
Optical Fiber Type Hot Phosphoric Acid Concentration Monitor
HORIBA, CS-620F
H3PO4 measurable range : 85 ~ 92 wt%
Repeatability : +/- 0.1 %
Measurement interval : approx. 3 s (minimum)
Sample temperature : 140 ~ 170 °C
DO Concentration Monitor
DO Concentration Monitor
HORIBA, HD-960LR
Temperature : 20 ~ 60 ℃
Pressure : 0 ~ 0.2 MPa
Response speed : 30 sec (90%) @400 mL/min
Flow rate : 600 - 2000 mL/min
400 - 2000 mL/min
Hall Effect Measurement System
Hall Effect Measurement System
Ecopia, HMS-3000
Ecopia, HMS-3000
Resistivity : 10-4 ~ 107 Ω·cm
Concentration : 107~1021 /cm3
Mobility : 1~107 cm2/V·s
Sample size : 5 mm x 5 mm ~ 30 mm x 30 mm
Sample thickness : ~ 5.5 mm
Resistivity : 10-4 ~ 107 Ω·cm
Concentration : 107~1021 /cm3
Mobility : 1~107 cm2/V·s
Sample size : 5 mm x 5 mm ~ 30 mm x 30 mm
Sample thickness : ~ 5.5 mm
Process Equipments
Spin Coater
Spin Coater
JD TECH, JSP4A
JD TECH, JSP4A
Wafer size : 4 inch
Wafer size : 4 inch
Spincup size : 200 mm diameter
Spincup size : 200 mm diameter
Rotation speed : 0 ~ 5000 RPM
Rotation speed : 0 ~ 5000 RPM
Acceleration : 1000 RPM/sec
Acceleration : 1000 RPM/sec
Furnace
Furnace
Lenton, LHA 12/300
Max. Temp. : 1200 ℃
220 V, 1-phase, 2340 W
50-60 Hz, 11.5 A
Thermostat Bath
Thermostat Bath
Lab Tech, LWB-311D
Lab Tech, LWB-311D
Capacity : 11 L
Capacity : 11 L
Electrical Requirements
Electrical Requirements
: 110 V, 60 Hz or 220 V, 50/60 Hz
: 110 V, 60 Hz or 220 V, 50/60 Hz
Ozonated Water Cleaning System
Ozonated Water Cleaning System
Ozonated water system
Ozone generator : JL1P
Ozone generation : 35.4 g/m3
Single Wafer Etching System
Single Wafer Etching System
Zhengzhou CY, CY-SPC4-E
Zhengzhou CY, CY-SPC4-E
Wafer size : 4 inch
Wafer size : 4 inch
Rotation speed : 0 ~ 8000 RPM
Rotation speed : 0 ~ 8000 RPM
Acceleration : 100 ~ 5000 RPM/sec
Acceleration : 100 ~ 5000 RPM/sec
Single Wafer Etching System
Single Wafer Etching System
POLOS, SPIN 150i-NPP
Wafer size : 4 inch
Wafer size : 4 inch
Rotation speed : 0 ~ 12,0000 RPM
Rotation speed : 0 ~ 12,0000 RPM
Acceleration : ~ 2000 RPM/sec
Acceleration : ~ 2000 RPM/sec
Water Purifier
Water Purifier
Human, Human Power l+
Human, Human Power l+
Flow Rate : Max. 15 L/Hr
Flow Rate : Max. 15 L/Hr
Water Quality Display
Water Quality Display
- pure water : 0 to 250 us/cm
- pure water : 0 to 250 us/cm
- ultra pure up : up to 18.3 MΩ-cm
- ultra pure up : up to 18.3 MΩ-cm
Multi Purpose Reactor
Multi Purpose Reactor
Il Shin Autoclave, HR-S-500
Il Shin Autoclave, HR-S-500
Volume : 300 ml (Teflon liner)
Volume : 300 ml (Teflon liner)
Max. working pressure : 30 kg/cm2
Max. working pressure : 30 kg/cm2
Max. working temperature : 200 °C
Max. working temperature : 200 °C
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