RESEARCH

Atomic layer deposition (ALD) is a highly precise technique used in the manufacture of advanced semiconductor devices and artificial intelligent (AI) semiconductors. It allows for the deposition of ultra-thin and highly uniform layers of materials on a substrate with precise control over the thickness, composition, and properties of each layer.  By depositing thin films in a controlled manner, it is possible to create complex three-dimensional structures that are critical for the performance of high-performance semiconductor devices, such as microprocessors, memory chips, and power semiconductors. 

ALD BeO on GaN, Ga2O3, SiC Power Devices 전력반도체

Beryllium oxide (BeO) exhibits high thermal conductivity, which makes it an ideal choice for power semiconductors. When compared to other materials commonly used in the manufacture of power semiconductors, BeO has the highest thermal conductivity. The high thermal conductivity of BeO allows it to efficiently transfer heat away from the semiconductor device, which is critical for the performance and reliability of high-power electronic systems. In addition, BeO also has excellent electrical insulation properties, which further enhances its suitability for use in power semiconductors.

The chemical imprinting is a new technology that integrates lithography and etching. This technology can fabricate three-dimensional nanopatterns directly on a semiconductor through a chemical reaction after physical contact between the stamp and the semiconductor.  Unlike nanoimprint and soft lithography, chemical imprinting does not require polymer resist and deep dry etching, Instead, the metal catalyst on the stamp is in physical contact with the semiconductor and the chemical etching occurs directly on the semiconductor substrate. Our group filed two US Patents and  a number of high-impact journal papers.

As a kind of renewable energy, solar cells has infinite possibilities. But the solar cells were not used on earth due to the high cost of making them and solar industry was very depressed. However, the power cost of solar energy would be decreased and that of fossil fuel would be increased with solar energy industrial development. It generate Grid-parity that means the power cost of solar energy is less than or equal to that of fossil fuel. The energy industry would be rapidly changed from oil-based to solar-based after Grid-parity. Therefore, photovoltaics that means solar cells should be researched for post Grid-partiy.