FACILITIES

Electrical & Optoelectronic Characterizations

소자 전기특성, 전력소자 평가, 광전변환 특성

Device characterization - Semiconductor parameter analyzer (Keithley 4200-SCS/F), Power device analyzer (Keysight B1505A), High power probe station (MS-TECH MST-8000)

Carrier transport & resistivity - Hall Effect Analyzer (Ecopia HMS-5000), 4 Point Probe (AIT CMT-SR2000N), Ellipsometer (Elipso Tech Eli-SE)

Photovoltaic characterization - Solar simulator (Yamasida denso x500sun, ~1400nn for MJ cells), Quantum efficiency (PV measurement, IQE & EQE)

Structural, Surface & Optical Characterization

미세구조, 표면, 계면, 조성, 광학특성 분석

Microscopy & sample preparation -  STEM, FIB, SEM, PIPS

Composition & crystal structure -  TOF-SIMS, XPS, XRD, LIBS

Surface Analysis - AFM, α-Step

Optical spectroscopy & thin-film metrology - Raman, FT-IR, Spectrophotometer, Ellipsometer (Elipso Tech Eli-SE)

Additional anaylsis -  Zeta Sizer, Tensiometer

Semiconductor Processings and Device Fabrication 

Atomic layer deposition - NCD Lucid M-100 PL (Plasma enhaced ALD, Thermal ALD)

Thin-film deposition - E-beam/thermal evaporator, DC/RF sputter, PECVD, Thermal Chemical Vapor Deposition (SciEnTech, TCVD system) 

Lithography - Maskless Lithography System (NanoSystem  DL-1000), Contact aligner (SUSS Micro Tec. MJB4)

Etching & processing - RIE, ICP-RIE, Asher, RTP, Polisher, SNTech MEP-5000, RSP-5004, SCS-5000