FACILITIES
Semiconductor Processings and Device Fabrication
Semiconductor Processings and Device Fabrication
Atomic layer deposition (NCD Lucid M-100)
Atomic layer deposition (NCD Lucid M-100)
E-beam/thermal evaporator, DC/RF sputter, PECVD, RTP, RIE, ICP-RIE (SNTech MEP-5000, RSP-5004, SCS-5000)
E-beam/thermal evaporator, DC/RF sputter, PECVD, RTP, RIE, ICP-RIE (SNTech MEP-5000, RSP-5004, SCS-5000)
Thermal Chemical Vapor Deposition (SciEnTech, TCVD system)
Thermal Chemical Vapor Deposition (SciEnTech, TCVD system)
Maskless Lithography System (NanoSystem DL-1000), Contact aligner (SUSS Micro Tec. MJB4)
Maskless Lithography System (NanoSystem DL-1000), Contact aligner (SUSS Micro Tec. MJB4)
Asher, Polisher, MOCVD
Asher, Polisher, MOCVD
Electrical Characterizations
Electrical Characterizations
Semiconductor parameter analyzer (Keithley 4200-SCS/F), Power device analyzer (Keysight B1505A)
Semiconductor parameter analyzer (Keithley 4200-SCS/F), Power device analyzer (Keysight B1505A)
High power probe station (MS-TECH MST-8000)
High power probe station (MS-TECH MST-8000)
Solar simulator (Yamasida denso x500sun, ~1400nn for MJ cells), Quantum efficiency (PV measurement, IQE & EQE)
Solar simulator (Yamasida denso x500sun, ~1400nn for MJ cells), Quantum efficiency (PV measurement, IQE & EQE)
Hall Effect Analyzer (Ecopia HMS-5000), 4 Point Probe (AIT CMT-SR2000N), Ellipsometer (Elipso Tech Eli-SE)
Hall Effect Analyzer (Ecopia HMS-5000), 4 Point Probe (AIT CMT-SR2000N), Ellipsometer (Elipso Tech Eli-SE)
Physical Characterizations
Physical Characterizations
Surface Analysis(STEM, FIB, SEM, TOF-SIMS, XPS, XRD)
Surface Analysis(STEM, FIB, SEM, TOF-SIMS, XPS, XRD)
Spectral Analysis(AFM, α-Step, Raman, FT-IR, Spectrophotometer, Ellipsometer)
Spectral Analysis(AFM, α-Step, Raman, FT-IR, Spectrophotometer, Ellipsometer)
Others(LIBS, Zeta Sizer, Tensiometer, PIPS)
Others(LIBS, Zeta Sizer, Tensiometer, PIPS)
