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In this study, we propose high-speed measurement of surface texture using fluorescence. Surface irregularities can be measured at high speed by applying a fluorescent liquid to the object to be measured and measuring the thickness distribution of the liquid film. As fluorescent liquids, organic materials such as oil and liquids containing a small amount of fluorescent dye can be used. Since fluorescence intensity has a linear relationship with liquid film thickness, unevenness can be easily measured by observing fluorescence intensity with a conventional microscope, and high-speed phenomena can be captured by using a high-speed camera. For example, the properties of the interface between the tool and work material can be measured in-process.
S. Fujii, S. Masui, M. Michiahta, S. Takahashi, “Fluorescence based scanless areal surface texture measurement technique using lubricating oil with in-situ calibration,” Precision Engineering, vol. 97 (2026) pp. 109-117.
doi: https://doi.org/10.1016/j.precisioneng.2025.09.003
M. Michihata, et al, "In-situ measurement of thickness distribution of fluid at interface of tool-work using fluorescent signal", CIRP Annals - Manufacturing Technology, vol. 73, issue 1 (2024) pp. 405-408.
doi: https://doi.org/10.1016/j.cirp.2024.04.075
M. Yoshikawa, S. Fujii, S. Kadoya, T. Sugihara, M. Michihata, S. Takahashi, “Fluorescence-based calibration model for in-situ measurement of micro-scaled lubricant thickness distribution at indentation interface”, Nanomanufacturing and Metrology, vol. 7, article number 13 (2024).
doi: https://doi.org/10.1007/s41871-024-00232-x
本研究では、蛍光を用いた表面性状の高速測定を行っている。測定対象に蛍光を放つ液体を塗布し、液膜厚さ分布を測定することで表面の凹凸を高速に測定可能である。蛍光液として、油など有機物などを用いることができ、また蛍光色素を少量含ませた液体を用いることができる。蛍光強度が液膜厚と線形の関係があるため、蛍光強度を従来の顕微鏡で観察することで容易に凹凸が測定できるため、ハイスピードカメラなどを用いることで高速現象も捉えることができる。例えば、工具と被削材の界面の性状をインプロセスに計測することができる。
道畑正岐：蛍光を用いた機械加工のナノインプロセス計測，計測と制御，vol. 64, no. 6 (2025) pp. 367-373.
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