In-process measurement of nano-thick film using evanescent light

Polymers and glasses are one of the most important materials. These surfaces are defined by the interface between the material and its surroundings. The way to measure the surface is to find physical material in the case of contact measurements. In this research, we propose a method to measure the shape of the material as a difference in refractive index and measure the change in refractive index in-process using highly sensing sensitive detection methods such as the total internal reflection and the surface plasmon polariton.

M. Michihata, et al “A simulation study of plasmonic substrate for in-process measurement of refractive index in nano-stereolithography”, International Journal of Automation Technology, vol.11, no.5 (2017) pp.772-780.

doi: https://doi.org/10.20965/ijat.2017.p0772

S. Takahashi, D. Kong, M. Michihata, K. Takamasu: “In-process measurement for cure depth control of nano stereolithography using evanescent light”, CIRP Annals - Manufacturing Technology, vol.68, issue 1 (2019) pp.527-530.

doi: https://doi.org/10.1016/j.cirp.2019.04.072

D. Kong, M. Michihata, et al, “In-process measurement of gradient boundary of resin in evanescent-wave-based nano-stereolithography using reflection interference near critical angle”, Journal of Photopolymer Science and Technology, vol.31, issue 3 (2018) pp.441-446.

doi: https://doi.org/10.2494/photopolymer.31.441

D. Kong, M. Michihata, et al, “In-process measurement of the thickness of cured resin in evanescent wave-based nano-stereolithography using critical angle reflection”, Nanomanufacturing and metrology, vol.1, issue 2 (2018) pp.112–124.

doi: https://doi.org/10.1007/s41871-018-0013-z

産業的に重要な材料の一つにポリマーやガラスなどがあります。これらの表面はもちろん物質と周辺の界面によって得られ、形状として認識されます。この物質の捉え方として、接触式の測定の場合は物理的な材料の存在です。この研究では、物質を屈折率の違いとして捉え、その屈折率の変化を全反射や表面プラズモンなど、非常にセンシング感度の高い手法を用いてインプロセス計測する手法を提案しています。