Journal
BOOK Chapter / Review
Ryo Sato, Kuangyi Li, Masaki Michihata, Satoru Takahashi, Wei Gao: "Advanced sensing and machine learning technologies for intelligent measurement in smart and precision manufacturing", International Journal of Automation Technology, vol. 18, no. 4 (2024). (accepted)
高 偉，清水裕樹，水谷康弘，道畑正岐，河野大輔，吉田一朗，伊東 聡，清水浩貴：Bilingual edition 精密計測学，朝倉書店（2024）．ISBN: 978-4-254-20178-9 (URL)
道畑正岐：マイクロCMMおよびマイクロプローブの動向と展望，精密工学会誌，vol. 88, no. 9（2022）657-662.
doi: https://doi.org/10.2493/jjspe.88.657Masaki Michihata, "Surface-sensing principle of microprobe system for micro-scale coordinate metrology: A review", Metrology, vol. 2, issue 1 (2022) 46-72.
doi: https://doi.org/10.3390/metrology2010004Yasuhiro Takaya, Masaki Michihata, "Optical micro-CMM", Metrology (Precision Manufacturing series) (Edited by Wei Gao), Springer (2019) ISBN 978-981-10-4938-5
doi: https://doi.org/10.1007/978-981-10-4912-5_5-1
Journal Papers
Masaki Michihata, Saeko Fujii, Motoya Yoshikawa, Shotaro Kadoya, Tatsuya Sugihara, Satoru Takahashi, "In-situ measurement of thickness distribution of fluid at interface of tool-work using fluorescent signal", CIRP Annals - Manufacturing Technology, vol. 73, issue 1 (2024) (in press)[Open Access]
doi: https://doi.org/10.1016/j.cirp.2024.04.075Yizhao Guan, Shuzo Masui, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, "Super-resolution by localized plasmonic structured illumination microscopy using self-assembled nanoparticle substrates", Nanomanufacturing and Metrology (accepted)
Ryohei Omine, Shuzo Masui, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, "Manipulation of large, irregular-shape particles using contour-tracking optical tweezers", Optics Letters, vol. 49, issue 10 (2024) pp. 2773-2776. [Selected for Editor's Pick] [Featured in Optica News releases] [プレスリリース]
doi: https://doi.org/10.1364/OL.524424Yushen Liu, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, “Propagation constant-based diameter measurement technique for sub-micrometer scale optical fiber”, Optics Letters, vol. 49, issue 10 (2024) pp. 2649-2652.
doi: https://doi.org/10.1364/OL.521545Yizhao Guan, Shuzo Masui, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, "Super-resolution Imaging of Sub-diffraction-limited pattern with superlens based on deep learning", International Journal of Precision Engineering and Manufacturing (accepted)
Motoya Yoshikawa, Saeko Fujii, Shotaro Kadoya, Tatsuya Sugihara, Masaki Michihata, Satoru Takahashi, “Fluorescence-based calibration model for in-situ measurement of micro-scaled lubricant thickness distribution at indentation interface”, Nanomanufacturing and Metrology, vol. 7, article number 13 (2024).
doi: https://doi.org/10.1007/s41871-024-00232-xMasaki Michihata, Shotaro Kadoya, Satoru Takahashi, “Diameter measurement for micro-spheres via coherent scanning interferometry with reference to gauge block”, International Journal of Automation Technology, vol. 18, no. 1 (2024) pp. 11-17.
doi: https://doi.org/10.20965/ijat.2024.p0011Shusei Masuda, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, “Novel absolute length measurement method for etalon sensor using optical comb pulsed interference and harmonic etalon reflections”, Measurement Science and Technology, vol. 34, no. 5 (2023) 055205.
doi: https://doi.org/10.1088/1361-6501/acb072Hiromasa Kume, Masaki Michihata, Satoru Takahashi, "Theoretical analysis on coherent optical super-resolution method for inspection of functional micro-structured surfaces with complex-amplitude-response distribution", Precision Engineering, vol. 80 (2023) pp. 138-159.
doi: https://doi.org/10.1016/j.precisioneng.2022.11.011Yushen Liu, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, "Measurement properties of electric field intensity distribution of whispering gallery mode with near-field optical probe", Measurement Science and Technology, vol. 33, no. 9 (2022) 095501.
doi: https://doi.org/10.1088/1361-6501/ac74a2Masaki Michihata, Sojiro Murakami, Shotaro Kadoya, Satoru Takahashi, "Measurement of diameter of sub-micrometer fiber based on analysis of scattered light intensity distribution under standing wave illumination", CIRP Annals - Manufacturing Technology, vol. 71, issue 1 (2022) pp. 421-424.
doi: https://doi.org/10.1016/j.cirp.2022.03.008Yizhao Guan, Hiromasa Kume, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, "The FDTD analysis of near-field response for microgroove structure with standing wave illumination for the realization of coherent structured illumination microscopy", Journal of Manufacturing Science and Engineering, vol. 144, issue 3 (2022) 031004.
doi: https://doi.org/10.1115/1.4051827Yuki Torii, Shuzo Masui, Yuki Matsumoto, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi, "Flexible evanescent wave interference lithography system for sub‐half‐wavelength complex relief structures fabrication", Nanomanufacturing and Metrology, vol. 4, issue 4 (2021) pp. 256-270
doi: https://doi.org/10.1007/s41871-021-00104-8Tatsuya Kume, Hiromasa Yasuda, Tsutomu Mibe, Masaki Michihata, Satoru Takahashi, "Interferometer adopting a ball lens both as a beam collimator and a reflector", Measurement: Sensors, vol. 18 (2021) 100161
doi: https://doi.org/10.1016/j.measen.2021.100161Yizhao Guan, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, "The FDTD analysis for dark field in-process depth measurements of fine microgrooves", Measurement: Sensors, vol. 18 (2021) 100257
doi: https://doi.org/10.1016/j.measen.2021.100257Sojiro Murakami, Masaki Michihata, Shotaro Kadoya, Satoru Takahashi, "In-process diameter measurement technique for nano/micro-optical fiber with standing wave illumination -evaluation of measurement performance", Measurement: Sensors, vol. 18 (2021) 100185
doi: https://doi.org/10.1016/j.measen.2021.100185Shusei Masuda, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, "Absolute distance measurement in water by optical comb for in-process measurement of water-guided laser processing", Measurement: Sensors, vol. 18 (2021) 100221
doi: https://doi.org/10.1016/j.measen.2021.100221Shuzo Masui, Shuhei Goda, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, "Grating periods measurement of multi-pitched grating using Littrow configuration external cavity diode laser", Applied Physics Express, vol. 14, no. 7 (2021) 076501.
doi: https://doi.org/10.35848/1882-0786/ac04c1Masaki Michihata, Zhao Zheng, Daiki Funaiwa, Sojiro Murakami, Shotaro Kadoya, Satoru Takahashi, "In-process diameter measurement technique for micro-optical fiber with standing wave illumination", Nanomanufacturing and Metrology, vol. 4, issue 1 (2021) pp. 28-36.
doi: https://doi.org/10.1007/s41871-020-00081-4Hiromasa Kume, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi, "Numerical analysis on high resolution optical measurement method with long working distance objective for in-line inspection of micro-structured surface", Precision Engineering, vol. 67 (2021) pp. 232-247.
doi: https://doi.org/10.1016/j.precisioneng.2020.09.012Masaki Michihata, Makoto Yokei, Shotaro Kadoya, Satoru Takahashi, "Micro-scale additive manufacturing using the optical potential generated by a Bessel beam", Nanomanufacturing and Metrology, vol. 3, issue 4 (2020) pp. 292-298.
doi: https://doi.org/10.1007/s41871-020-00079-yShuzo Masui, Shotaro Kadoya, Masaki Michihata, Satoru Takahashi, “Theoretical model of subwavelength grating polarization beam splitter”, Applied Optics, vol. 59, no. 30 (2020) pp. 9469-9475. [Selected for Editor's Pick]
doi: https://doi.org/10.1364/AO.405660Satoru Takahashi, Shuzo Masui, Masaki Michihata, Kiyoshi Takamasu, “Advanced generation of functional dual-periodic microstructured surface based on optical in-process measurement”, CIRP Annals - Manufacturing Technology, vol. 69, issue 1 (2020) pp. 477-480.
doi: https://doi.org/10.1016/j.cirp.2020.04.076Kazuki Tachibana, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi, “Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: Verification of proposed concept”, Precision Engineering, vol. 61 (2020) pp.93-102.
doi: https://doi.org/10.1016/j.precisioneng.2019.09.019Shuzo Masui, Yuki Torii, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: “Fabrication of nano/micro dual-periodic structures by multi-beam evanescent wave interference lithography using spatial beats”, Optics Express, vol. 27, no. 22 (2019) 31523.
doi: https://doi.org/10.1364/OE.27.031522Shiwei Ye, Satoru Takahashi, Masaki Michihata, Kiyoshi Takamasu, Hans Nørgaard Hansen, Matteo Calaon: “Quantitative depth evaluation of microgrooves on polymer material beyond the diffraction limit”, Precision Engineering, vol. 59 (2019) pp.56-65.
doi: https://doi.org/10.1016/j.precisioneng.2019.05.016Yumeki Kobayashi, Masaki Michihata, Zhao Zheng, Bohuai Chu, Kiyoshi Takamasu, Satoru Takahashi: “Radial mode number identification on whispering gallery mode resonances for diameter measurement of microsphere”, Measurement Science and Technology, vol. 30, no. 6 (2019) 065201.
doi: https://doi.org/10.1088/1361-6501/ab1241Satoru Takahashi, Deqing Kong, Masaki Michihata, Kiyoshi Takamasu: “In-process measurement for cure depth control of nano stereolithography using evanescent light”, CIRP Annals - Manufacturing Technology, vol. 68, issue 1 (2019) pp.527-530.
doi: https://doi.org/10.1016/j.cirp.2019.04.072Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi, “One-shot stereolithography for biomimetic micro hemisphere covered with relief structure”, Precision Engineering, vol. 54 (2018) pp.353-360. [JSPE Best Paper Award 2018][Advances in Engineering]
doi: https://doi.org/10.1016/j.precisioneng.2018.07.004Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi, “In-process measurement of gradient boundary of resin in evanescent-wave-based nano-stereolithography using reflection interference near critical angle”, Journal of Photopolymer Science and Technology, vol. 31, issue 3 (2018) pp.441-446.
doi: https://doi.org/10.2494/photopolymer.31.441Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi, “In-process measurement of the thickness of cured resin in evanescent wave-based nano-stereolithography using critical angle reflection”, Nanomanufacturing and Metrology, vol. 1, issue 2 (2018) pp.112–124.
doi: https://doi.org/10.1007/s41871-018-0013-zShiwei Ye, Satoru Takahashi, Masaki Michihata, Kiyoshi Takamasu, “Modified Linnik microscopic interferometry for quantitative depth evaluation of diffraction-limited microgroove”, Measurement Science and Technology, vol. 29, no. 5 (2018) 054011.
doi: https://doi.org/10.1088/1361-6501/aab008Masaki Michihata, Jonggang Kim, Satoru Takahashi, Kiyoshi Takamasu, Yasuhiro Mizutani, Yasuhiro Takaya, “Surface imaging technique by an optically trapped microsphere in air condition”, Nanomanufacturing and Metrology, vol. 1, issue 1 (2018) pp.32-38. [Excellent Article Award]
doi: https://doi.org/10.1007/s41871-018-0004-0Masaki Michihata, Akifumi Kawasaki, Yasuhiro Takaya, “Precise diameter measurement of a microsphere based on polarization analysis of whispering gallery mode resonance”, Applied Mechanics and Materials, vol. 870 (2017) pp.108-113.
doi: https://doi.org/10.4028/www.scientific.net/AMM.870.108Masaki Michihata, Deqing Kong, Kiyoshi Takamasu, Satoru Takahashi, “A simulation study of plasmonic substrate for in-process measurement of refractive index in nano-stereolithography”, International Journal of Automation Technology, vol. 11, no. 5 (2017) pp.772-780.
doi: https://doi.org/10.20965/ijat.2017.p0772S. Takahashi, C. Jin, S. Ye, M. Michihata, K. Takamasu, "Theoretical analyses of in-process depth measurements of fine microgrooves based on near-field optical response", CIRP Annals - Manufacturing Technology, vol. 66, issue 1 (2017) pp.503-506.
doi: https://doi.org/10.1016/j.cirp.2017.04.064Masaki Michihata, Shin-ichi Ueda, Satoru Takahashi, Kiyoshi Takamasu, Yasuhiro Takaya, “Scanning dimensional measurement using laser-trapped microsphere with optical standing-wave scale”, Optical Engineering, vol. 56, no. 6 (2017) 064103. [Yoshizawa Paper Award]
doi: https://doi.org/10.1117/1.OE.56.6.064103Yasuhiro Takaya, Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, “Measurement of a tool wear profile using confocal fluorescence microscopy of the cutting fluid layer”, CIRP Annals - Manufacturing Technology, vol.65, issue 1 (2016) pp.467–470.
doi: https://doi.org/10.1016/j.cirp.2016.04.014Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya; “Fundamental study on novel on–machine measurement method of cutting tool edge profile based on fluorescent confocal microscope”, International Journal of Automation Technology, vol. 10, no. 1 (2016) pp.106-113. [Best Paper Award 2017] [Commendation for research paper, MASAK Foundation]
doi: https://doi.org/10.20965/ijat.2016.p0106Satoru Takahashi, Yousuke Horita, Fumiya Kaji, Yuki Yamaguchi, Masaki Michihata, Kiyoshi Takamasu: “Concept for laser-assisted nano removal beyond the diffraction limit using photocatalyst nanoparticles”, CIRP Annals - Manufacturing Technology, vol.64, issue 1 (2015) pp.201-204.
doi: https://doi.org/10.1016/j.cirp.2015.04.041Shin-ichi Ueda, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya: “Wide-range axial position measurement for jumping behavior of optically trapped microsphere near surface using chromatic confocal sensor” International Journal of Optomechatronics, vol.9 issue 2 (2015) pp.131-140.
doi: https://doi.org/10.1080/15599612.2015.1034901Ryota Murai, Yasuhiro Takaya, Terutake Hayashi, Masaki Michihata, Ken Kokubo: “Study on chemical interaction analysis of reactive fullerenol molecules in Cu-CMP using high-sensitive Raman spectrometry”, Key Engineering Materials, vol.625 (2015) pp.332-338.
doi: https://doi.org/10.4028/www.scientific.net/KEM.625.332Terutake Hayashi, Yuki Ishizaki, Masaki Michihata, Yasuhiro Takaya, Shin-ichi Tanaka: “Nanoparticle sizing method based on fluorescence anisotropy analysis”, Measurement, vol.59 (2015) pp.382-388.
doi: https://doi.org/10.1016/j.measurement.2014.08.048Terutake Hayashi, Yuki Ishizaki, Masaki Michihata, Yasuhiro Takaya, Shin-ichi Tanaka: “Study on nanoparticle sizing using fluorescent polarization method with DNA fluorescent probe”, International Journal of Automation Technology, vol.9, no.5 (2015) pp.534-540.
doi: https://doi.org/10.20965/ijat.2015.p0534Masaki Michihata, Phong Tran Dang, Terutake Hayashi, Yasuhiro Takaya: “Fundamental study for measuring micro-flow with Michelson interferometer enhanced by external random signal”, Journal of Advanced Mechanical Design, Systems, and Manufacturing, vol.8, no.4 (2014) 14-00116.
doi: http://doi.org/10.1299/jamdsm.2014jamdsm0049Masaki Michihata, Kosuke Takami, Terutake Hayashi, Yasuhiro Takaya: “Fundamental validation for surface texture imaging technique using a microsphere for laser trapping based microprobe”, Advanced Optical Technologies, vol. 3, no. 4 (2014) pp.417-423.
doi: https://doi.org/10.1515/aot-2014-0020Masaki Michihata, Ayano Fukui, Terutake Hayashi, Yasuhiro Takaya: “Sensing a vertical surface by measuring a fluorescence signal using a confocal optical system” Measurement Science and Technology, vol.25 issue 6 (2014) 064004.
doi: https://doi.org/10.1088/0957-0233/25/6/064004Masaki Michihata, Terutake Hayashi, Atsushi Adachi, Yasuhiro Takaya: “Measurement of stylus-probe sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery mode”, CIRP Annals - Manufacturing Technology, vol. 63, no. 1 (2014) pp.469-472. [Commendation for research paper, MASAK Foundation]
doi: https://doi.org/10.1016/j.cirp.2014.02.002Masaki Michihata, Tadaaki Yoshikane, Terutake Hayashi, Yasuhiro Takaya: “New technique for single-beam gradient-force optical trapping in air” International Journal of Optomechatronics, vol.7 issue 1 (2013) pp.46 - 59. [Koh Young Best Paper Award]
doi: https://doi.org/10.1080/15599612.2012.760122Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Ryota Murai, Kazumasa Kano: “Surface analysis of the chemical polishing process using a fullerenol slurry by Raman spectroscopy under surface plasmon excitation”, CIRP Annals -Manufacturing Technology-, vol. 62, issue 1 (2013) pp.571–574.
doi: https://doi.org/10.1016/j.cirp.2013.03.019Terutake Hayashi, Yasuhiro Takaya, Masaki Michihata: “Development of nanoparticle sizing system integrated with optical microscopy using fluorescence polarization”, International Journal of Nanomanufacturing, vol.8, nos.1/2 (2012) pp.54-66.
doi: https://doi.org/10.1504/IJNM.2012.044655Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi, Taisuke Washitani: “Dimensional measurement of microform with high aspect ratio using an optically controlled particle with sensing standing wave scale”, CIRP Annals -Manufacturing Technology-, vol. 61, issue 1 (2012) pp.479–482.
doi: https://doi.org/10.1016/j.cirp.2012.03.114Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi: “Improvement of laser trapping based microprobe for measuring vertical surface”, Journal of Advanced Mechanical Design, Systems, and Manufacturing, vol.6, no.6 (2012) pp.764-770.
doi: http://doi.org/10.1299/jamdsm.6.764Masafumi Yasuda, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya: “A novel batch fabrication of micro parts using DNA pattern recognition”, Key Engineering Materials, vol.523-524 (2012) pp.598-603.
doi: https://doi.org/10.4028/www.scientific.net/KEM.523-524.598Yusuke Fukuta, Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya: “Development of a novel surface processing system using femto pulse train”, Key Engineering Materials, vol.523-524 (2012) pp.220-225.
doi: https://doi.org/10.4028/www.scientific.net/KEM.523-524.220Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya: “Development of an optical heterogeneity evaluation system using phase-shift digital holography” Key Engineering Materials, vol.523-524 (2012) pp.865-870.
doi: https://doi.org/10.4028/www.scientific.net/KEM.523-524.865Terutake Hayashi, Masaki Michihata, Yasuhiro Takaya: “Evaluation of optical heterogeneity using phase-shift digital holography”, International Journal of Nanomanufacturing, vol.8, no.5/6 (2012) pp.508-521.
doi: https://doi.org/10.1504/IJNM.2012.051114Yasuhiro Takaya, Masaki Michihata and Terutake Hayashi: “Scanning type microprobe for displacement measurement based on standing wave detection using an optically trapped particle”, International Journal of Automation Technology, vol. 5, no. 3 (2011) pp.395-402.
doi: https://doi.org/10.20965/ijat.2011.p0395Yasuhiro Takaya, Hirotaka Kishida, Terutake Hayashi, Masaki Michihata, Ken Kokubo: “Chemical mechanical polishing of patterned copper wafer surface using water-soluble fullerenol slurry”, CIRP Annals -Manufacturing Technology-, vol. 60, issue 1 (2011) pp.567-570.
doi: https://doi.org/10.1016/j.cirp.2011.03.068Masaki Michihata, Terutake Hayashi, Daisuke Nakai, Yasuhiro Takaya, "Micro-displacement sensor using an optically trapped micro-sphere based on the interference scale", Review of scientific instruments, vol.81, no.1 (2010) 015107.
doi: https://doi.org/10.1063/1.3292684Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya, "Measurement of vertical and lateral trapping stiffness of optical tweezers in air using radially polarized beam", Applied Optics, vol.48, no.32, (2009) pp.6143-6151. [Selected as Virtual Journal for Biomedical Optics]
doi: https://doi.org/10.1364/AO.48.006143Masaki Michihata, Yuto Nagasaka, Yasuhiro Takaya, Terutake Hayashi, Probing technique using circular motion of a microsphere controlled by optical pressure for a nano-coordinate measuring machine, Applied Optics, vol.48, no.2, (2009) pp.198-205. [Laser focus world]
doi: https://doi.org/10.1364/AO.48.000198Masaki Michihata, Yasuhiro Takaya, and Terutake Hayashi, Development of the nano-probe system based on the laser trapping technique, CIRP Annals -Manufacturing Technology-, vol.57, issue1 (2008), pp. 493-496.
doi: https://doi.org/10.1016/j.cirp.2008.03.016Masaki Michihata, Yasuhiro Takaya, Terutake Hayashi, Nano position sensing based on laser trapping technique for flat surfaces, Measurement Science and Technology, vol.19, no.8, (2008), 084013. [Highlight of 2008]
doi: https://doi.org/10.1088/0957-0233/19/8/084013
Domestic Journal Papers (in Japanese)
道畑正岐，小林夢輝，儲 博懐，高増 潔，高橋 哲：マイクロスケール標準球計測に向けたWhispering gallery mode共振の安定的励起計測システムの開発，日本機械学会論文集, vol.85, no.880（2019）19-00226
doi: https://doi.org/10.1299/transjsme.19-00226道畑正岐，林 政洋，代慶 真，高増 潔，高橋 哲：ベッセルビームの光放射圧ポテンシャルを用いたマイクロスケールAdditive Manufacturingの加工原理検証，日本機械学会論文集, vol.85, no.880（2019）19-0044
doi: https://doi.org/10.1299/transjsme.19-00244道畑正岐，儲 博懐，趙 正，林 晃平，高増 潔，高橋 哲, “Whispering Gallery Mode共振を用いたマイクロ球の直径計測”，精密工学会誌, vol.84, no.1 (2018) pp.77-84.
doi: https://doi.org/10.2493/jjspe.84.77堀田陽亮，吉越久倫，松田恵介，道畑正岐，高増 潔，高橋 哲：”レーザー集光点近傍における光触媒反応を利用した三次元微細構造創製に関する研究”，日本機械学会論文集，vol.81, no.832 (2015) 15-00309.
doi: http://doi.org/10.1299/transjsme.15-00309林 照剛，石崎佑樹，道畑正岐，高谷裕浩，田中慎一：”蛍光偏光法を用いたナノ粒子粒径計測に関する研究（第2報）−DNAプローブの回転拡散係数評価に基づく粒径計測手法の提案−”，精密工学会誌，Vol.80，No.10 (2014) pp.956-960.
doi: http://doi.org/10.2493/jjspe.80.956林 照剛，福田悠介，道畑正岐，高谷裕浩：”パルストレインビームを用いたコヒーレントフォノン励起加工に関する研究(第1報) –コヒーレントフォノン励起加工システムの構築と加工基礎実験–”，精密工学会誌，Vol.80，No.9 (2014) pp.214-219
doi: http://doi.org/10.2493/jjspe.80.867道畑正岐，林 照剛，高谷裕浩：”表面微細構造基板を用いた大気中レーザトラッピング技術”，精密工学会誌，Vol.80，No.4 (2014) pp.382-387.
doi: http://doi.org/10.2493/jjspe.80.382石崎佑樹，林 照剛，道畑正岐，高谷裕浩：”蛍光偏光法を用いたナノ粒子粒径計測に関する研究（第1報）−蛍光DNAプローブを用いた回転拡散係数測定システムの開発−”，精密工学会誌，Vol.80，No.2 (2014) pp.214-219.[精密工学会 沼田記念論文賞]
doi: http://doi.org/10.2493/jjspe.80.214村井亮太，高谷裕浩，林 照剛，道畑正岐，小松直樹：： “ポリグリセロール修飾ナノダイヤモンドを用いた平坦化加工に関する研究"，砥粒加工学会誌，Vol.58，No.2 (2014) pp. 97-102.[砥粒加工学会賞論文賞]
doi: http://doi.org/10.11420/jsat.58.97