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3-D metrology using optical microscopies such as confocal, focus variation is highly demanded. However, they cannot measure smooth steep surfaces, vertical surfaces, so geometrical dimensions are only measured using contact-type instruments like CMM. This study proposes an optical 3-dimensional measurement technique using fluorescent signal, which is emitted over all-direction. Detecting the fluorescent light from the surface, it is possible to measure steep surface even vertical. It is possible to detect the fluorescent light from the overhung surface.
M. Michihata, et al: “Three-dimensional measurement of structures with smooth-steep-surfaces using autofluorescence confocal signal”, CIRP Annals - Manufacturing Technology, vol. 74, issue 1 (2025) pp. 697-701.
doi: https://doi.org/10.1016/j.cirp.2025.03.010
M. Michihata, et al: “Sensing a vertical surface by measuring a fluorescence signal using a confocal optical system” Measurement science and technology, Vol.25 Issue 6 (2014) 064004.
doi: https://doi.org/10.1088/0957-0233/25/6/064004
Y. Takaya, K. Maruno, M. Michihata, et al, “Measurement of a tool wear profile using confocal fluorescence microscopy of the cutting fluid layer”, CIRP Annals - Manufacturing Technology, vol.65, issue 1 (2016) pp.467–470.
doi: https://doi.org/10.1016/j.cirp.2016.04.014
K. Maruno, M. Michihata, et al; “Fundamental study on novel on–machine measurement method of cutting tool edge profile based on fluorescent confocal microscope”, International Journal of Automation Technology, vol.10, no.1 (2016) pp.106-113.
doi: https://doi.org/10.20965/ijat.2016.p0106
測定面から発せられる蛍光という信号を取得することで、光学的な手法を用いて3次元の形状を計測する手法を研究しています。通常、幅はどの幾何学的情報は、CMMなどの接触式の測定器でのみ測定可能でしたが、蛍光を共焦点検出することで、光を用いた幾何形状の寸法計測が可能となります。円筒を測定すると下図のように、90度までは正確に測定でき、90度以上のオーバーハングでも光が検出でき、今後の研究で正確な計測も可能性があります。
道畑正岐，河見建佑，吉川元弥，増井周造，高橋 哲：Fluorescence response-based optical probing (FROP)法による難計測構造の3次元表面センシング，日本機械学会論文集，vol.91, no.952（2025）(accepted).
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