"H2O condensation in Cryogenic HF Plasma Etching"

๋ช…์ง€๋Œ€ ํ™์ƒ์ง„ ๊ต์ˆ˜ (๋ฐ•์•„ํ˜„ ๋ฐ•์‚ฌ๊ณผ์ •)

KIMM

(26/01/23)