Laser writer

Available Processes:

• Optical lithography

Key Features and Accessories:

• Two writeheads available.

Allowed materials:

• Si, SiO2, Nb, others to be defined

Substrate size:

• min 10x10 mm up to 5(?)'' wafer size

Processes Procedures:

• Heidelberg uPG101 User Manual
• Heidelberg uPG101 Quick Start Guide
• Heidelberg uPG101 Design Guide

Safety Procedures:

• PLS