SEM

Available Processes:

• Microanalisi elementare mediante spettrometria a dispersione di energia (SEM-EDS)

• Microscopia elettronica a scansione in trasmissione (STEM)

Key Features and Accessories:

Detectors:

• Everhardt-Thornley SED

• IR-CCD Solid-State

• BSED

• 2-segment STEM

Chamber:

• Eucentric goniometer stage

X= 50 mm

Y= 50 mm

Z= 25 mm

• Maximumsample height = 50 mm

• T=-15° to +75°

• R=nx360°

• Minimumstep:300nm

• Repeatability @0° tilt 2 μm

• Repeatability @52° tilt 4 μm

Key Specifications:

• Electron Beam Resolution:

1.2nm at 30kV (high SE)

1.5nm at 30kV(low SE)

• Accelerating Voltage: 200V - 30kV

• Probe Current: up to 200 nA

• Magnification: 30 x - 1280 kx

• Allowed Materials:Flat samples, Si, SiO2, metals

• Forbidden Materials: Powders, volatile

• Substrate Size: 4 cm

Processes Procedures:

• User Manual - FEI

• Common Safety Manual - FEI

• Procedura di Lavoro Sicuro (PLS) - INRiM

• LogBook