Ellipsometer

Available Processes:

• Routine determination of thickness and refractive index of thin films

Key Specifications:

• Wavelength range 380 – 900 nm
• Four angles are possible: 90° (also called the “Straight-Through” configuration) and 65°, 70° and 75° (also called the “Off-Sample” configurations).

Allowed materials:

• Thin films of dielectrics, semiconductors, organics etc.

Maintenance procedures:

• The alpha-SE system can be left on continuously if desired. However, the Quartz-Tungesten-Halogen (QTH) lamp has a rated lifetime of 1500 hours. To maximize lamp life, turn off the system when not in use for extended periods of time.

Procedura Lavoro Sicuro