Ch 45. MEMS Inertial Sensors

Alissa M. Fitzgerald, Ph.D.

Chapter Overview: This chapter provides a primer on MEMS inertial sensor technology. It describes the different types of MEMS accelerometers, gyroscopes and IMUs available in the marketplace as of writing, their basic operating principles, pros and cons of different sensor architectures and key commercial suppliers. Navigation engineers may use this chapter to orient themselves on which MEMS inertial sensors might be best suited for their application and to better understand the economics of silicon-based sensors.

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