High-tech like semiconductors and displays are structured into Front-end, Back-end, and Package. The development and application of various nano-polymer materials synthesized via CVD are crucial in these fields. Different layers require polymers with specific chemical, mechanical, and electrical properties. Hence, a range of functional polymers is employed, necessitating versatility and compatibility with CVD equipment. We propose a novel one-step synthesis method, termed the initiated chemical vapor deposition (iCVD) process, to create uniform organic-inorganic hybrid films by vapor phase mixing of monomer and precursor. This facilitates homogeneous integration and dispersion of inorganic-oxygen bonding components within the polymer matrix. The iCVD process holds promise as a cutting-edge solution in the semiconductor industry. 

Our objective is to enhance the capabilities of the iCVD process to synthesize and deposit high-purity organic-inorganic hybrid materials as thin films in specific areas, incorporating the advantageous properties of both organic and inorganic materials. We aim to establish a precise synthesis mechanism for organic-inorganic hybrid materials and create a comprehensive library of such materials with desired functionalities by implementing various synthesis routes. The resulting organic-inorganic hybrid materials possess remarkable characteristics, including minimal stress and excellent thermal, mechanical, and electrical stability due to the inclusion of inorganic components. Consequently, these materials can fulfill diverse requirements in back-end-of-line (BEOL) and packaging applications, such as surface coating, encapsulation, and membrane functionalities.

Poly-vinylidene fluoride (PVDF)-based polymer has excellent chemical/mechanical properties, and using the CVD process, PVDF of uniform quality that can be mass-produced can be produced, and heat and mass transfer are efficient, allowing for reaction. Required energy consumption can be minimized and there is no problem with solvent disposal after the process. In addition, it is polymerized with various fluorine-based polymers and is given various functionalities, so it is used in various industries such as semiconductor/display/secondary battery/next-generation communication/hydrogen/aerospace.