Advanced Process and Memory Device Lab
Large-Area iCVD system (12 inch)
Chiller
Sonicator
Hot Plate
Furnace (Clean Room)
Rapid Thermal Annealing (Clean Room)
Sputtering System (Clean Room)
Evaporator System (Clean Room)
Aligner System (Clean Room)
Convection Oven (Clean Room)
Wet Station (Clean Room)
Mini SEM (Clean Room)
Vacuum Probe Station
Parameter Analyzer (b1500)