Innovative Process/Material and Device Lab

Large-Area iCVD system (12 inch)

Chiller

Sonicator

Hot Plate

Furnace (Clean Room)

Rapid Thermal Annealing (Clean Room)

Sputtering System (Clean Room)

Evaporator System (Clean Room)

Aligner System (Clean Room)

Convection Oven (Clean Room)

Wet Station (Clean Room)

Mini SEM (Clean Room)

Vacuum Probe Station (M5VC)

Parameter Analyzer (B1500)

LCR meter (E4980)

Switching Matrix (E5250)

Mini RTA

Mini iCVD

Desicator