国際会議 EMC 2026で2件の発表を行います
2026年6月24-26日にUniversity of Michiganで行われる電子材料に関する国際会議 The 68th Electronic Materials Conference (EMC 2026)で下記2件の発表を行います.
[1] H. Sasaki*, A. Munakata*, T. Takeda*, M. Kobayashi*, A. Fujimori*, T. Okuda**, S. Kurogi**, A. Kobayashi**, M. Sugiyama*, T. Maeda*,
*The University of Tokyo, **Tokyo University of Science
"X-ray Spectroscopic Characterization of Surface Oxidation Properties of NbAlN Thin Films Epitaxially Grown by Sputtering on GaN",
The 68th Electronic Materials Conference (EMC 2026), Michigan (USA), June 2026, Oral.
[2] K. Joya*, S. Sato**, A. Kobayashi**, T. Maeda*,
*The University of Tokyo, **Tokyo University of Science
"Temperature dependence of leakage current in ScAlN thin films grown on GaN/sapphire substrates by a sputtering method",
The 68th Electronic Materials Conference (EMC 2026), Michigan (USA), June 2026, Oral.
EMC 2026 HP: https://2026.emc-conference.org/