We are developing deformation mapping techniques based on optical and SEM-based microscopy, aiming to quantify deformation at the relevant microstructural length scale (10-4~10-8 m). We have setup an optical extensometer and DIC system (X-Sight) on our Shimadzu EZ-LX, allowing realtime, non-contact, and full-field deformation measurement from small-scale speimen. We recently established a unique sample patterning technique allowing SEM-based micro-strain mapping without sacrificing the ability to do phase/orientation mapping (EBSD). We also have the CrossCourt4 software which allows us to do high-resolution EBSD for mapping geometrically necessary dislocations (GNDs) in deformed crystalline materials. Combining nanomechanical tests with deformation mapping is one of the key research direction in our group.