Our group uses the Supra 55 extensively, for high-resolution imaging as well as phase, orientation, and chemical analysis. This field-emission SEM provides ~1 nm reresolution using working voltage of 15 kV, and is equipped with an Oxford Instrument Symmetry I EBSD detector and Ultim Max 100 EDS detector. We usually have 2~3 students fully trained on this microscope
Crossbeam 550 is a state-of-the-art dual-beam microscope (gallium and electron). In addition, it is equipped with a femtosecond laser, allowing for large volume removal (up to mm^3). It is also equipped with a cryogenic stage for milling low mp materials, and an Oxford Instrument Ultim Max 100 EDS detector and a micro-manipulator for in-situ sample lift-out. We have the DragonFly 3D software for 3D image reconstruction and NanoPatterning Engine for milling complicated geometries
NX2000 is a dual-beam FIB-SEM for milling large wafer-like samples efficiently. Unique to other FIB-SEMs, the FIB gun is located perpendicular to the sample surface, providing a geometry for samples with large surface area and better milling efficiency. We usually have two students trained on this FIB-SEM for milling micro-specimen and TEM samples