The Electroglas 2001 wafer probers are extremely accurate, modularly designed automatic wafer probers, configured to perform automatic system functions of:
Automatic wafer load
Automatic wafer alignment
Automatic wafer measurement
Automatic wafer test/sort.
The Electroglas 2000 series wafer prober station have been available in variety of ever-expanding configurations, depending on the needs of the user. The basic (minimum) configuration of the EG 2001X, EG 2001CX wafe prober consists of:
forcer (X/Y motor) & platen
ring carrier, microscope post, & microscope
power module (with logic & driver sections)
monitor
monitor console
operator’s console
custom table
The Electroglas 2001 prober ( EG 2001X, EG 2001CX ) wafer prober station may be seen in other configurations, including any of the following options:
Autoalign
Autoloader (material handling)
Disk Drives & Controller
Hot Chuck & Controller
Ink Dot Inspection (an Autoalign option)
OCR (optical character recognition)
Probe Mark Inspection (an Autoalign option)
Profiler (non-contact edge sensor)