RTP Asher Etcher RIE ICP DRIE Sputter Evaporator PECVD ALD SEM Probe Metrology Tester Equipment, 200 300mm Wafers, Wafer Carriers, In U.S.A.
Category: Etcher; Plasma Etch
Original Equipment Manufacturer: Lam Research
Condition: Used. We sell it at refurbished condition with OEM specifications.
Configuration: TBD. Photo here is only for your reference.
Valid Time: Subject to prior sale. This is only for end users.
Lead Time: TBD
Quantity: 1 set
Warranty: TBD
Installation and training: Available at extra charge
Service Contract: Available at extra charge
Lam Rainbow 4420 equipment description for your reference.
Currently configured for 200mm wafer sizes MFG Date: 1993
Last PM: 11/11/2016
Install Type: Thru-the-wall (TTW)
Status Lamp
System software (App): Envision ver1.5.1
SECS I Interface
Cassette Interface: (2) Hine 38F indexers Electrostatic Chuck (ESC)
Endpoint Detection: Monochromator 405nm / 520nm Turbo: Seiko Seiki STP H200C
RF Match Type: LAM
On-board RF Generators: No
RF Generator: ENI OEM-650A
RF Hours: 402056
Remote RF Cart: No
ATM Passivation Module: No
Plasma LLK (PLL): No
High Conductance Manifold: No
Gas Box:
Remote gas Box: No
Orbitally welded GB: Yes
Backside cooling MFC: Unit 1250A
Gases:
#1: N2, 200 sccm, Unit 1200A
#2: CHF3, 50 sccm, Unit 1200A
#3: N2, 300 sccm, Aera
#4: N2, 500 sccm, Unit UFC 1660
#5: CF4, 150 sccm, Unit 1200A
#6: SF6, 150 sccm, Unit 1200A
#7: He, 1 slm, Unit UFC 1660
#8: O2, 200 sccm, Unit UFC 1660
Pumps:
Heated pumping manifolds: No
Pump controller: iQ Series Entrance /: No
Exit: Edwards iQDP-40: No
Main: Edwards iQDP-80: No
Chiller(s): (2) SMC HRS018-WN-20-M: No
On-board AC Distribution type: Fused
Power requirements: 208VAC, 3-Phase, 5-Wire