RTP Asher Etcher RIE ICP DRIE Sputter Evaporator PECVD ALD SEM Probe Metrology Tester Equipment, 200 300mm Wafers, Wafer Carriers, In U.S.A.
Original Equipment Manufacturer: Oxford
Condition: Used. We sell it at refurbished condition with OEM specifications.
Configuration: TBD. Photo here is only for your reference.
Valid Time: Subject to prior sale. This is only for end users.
Lead Time: TBD
Quantity: 1 set
Warranty: TBD
Installation and training: Available at extra charge
Service Contract: Available at extra charge
Equipment description below for your reference.
Location: Nanjing, Jiangsu, China
OXFORD Plasmalab 100 RIE (FL) For Sale
Model Year : 2006
Quantity : 1
SN: 94-417795
Condition : Refurbished with OEM specifications ,crating, warranty, installation if necessary. Customer is responsible for chiller, pump and facility.
Lead time: 12-16 weeks after payment.
Availability : Subject to prior sale without notice.
Configuration:
Supports wafer sizes up to 300mm (330mm Platen)
RIE set up for SiO2 Etch
RF Generator : Advanced Energy RFX 600A ; 600W, 13.56MHz,
Chamber Turbo Pump : Alcatel ATH 400M w/ ACT 600M controller
Blue color PLC type
Water cooled electrode 10C-80C
Gas pod with 6 lines including following MFCs: Ar – 100sccm N2 – 200sccm CHF3 – 200sccm NF3 – 200sccm N2O – 200sccm
Windows PC , user friendly interface
Lauda WK 1200 Chiller was utilized by previous user. Not included.
This tool was removed from production October 2014.