Category: Metrology
Original Equipment Manufacturer: CDE
Condition: Used. We sell it at complete, working with OEM specifications
Valid Time: Subject to prior sale. This is only for end users.
Lead Time: TBD
Quantity: 1 set
Warranty: N/A
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RTP Asher Etcher RIE ICP DRIE Sputter Evaporator PECVD ALD SEM Probe Metrology Tester Equipment, 200 300mm Wafers, Wafer Carriers, In U.S.A.
ResMap Four Point Probe
Model: CDE ResMap 178
Feature: Manual load “baby”
Wafer size: 2”-8” Manual load
Max round sample: 8.2” φ , Max square sample:5.8”x5.8”
Maximum throughput: 1min/wafer, (49pints)
MeasurementRange 1mΩ/☐ to 10MΩ/☐
Accuracy 0.5%
Repeatability 0.02% static, 0.1% dynamic
Repeatability Measurement unit size: 12”W x 10”H x 18”D
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