Category: Etcher; Plasma Etch; Thin Film Equipment; PECVD/ALD
Original Equipment Manufacturer: PlasmaTherm
Condition: Used. We sell it at refurbished condition with OEM specifications.
Configuration: TBD. Photo here is only for your reference.
Valid Time: Subject to prior sale. This is only for end users.
Lead Time: TBD
Quantity: 1 set
Warranty: TBD
Installation and training: Available at extra charge
Service Contract: Available at extra charge
Plasma Therm 700 equipment description for your reference.
Model: Plasma Therm 700 Series Wafer Batch Plasma Etcher Deposition
Gases: 8 lines with 8 MFCs. 2 of NH3 (100 SCCM) and 6 of N2 (4 of 1 SLM and 1 of 200 SCCM and 1 of 2SLM)