[6-in. ICP-PECVD]

• Model: AFS-IC6T

• Company: Allforsystem

• ICP-Plasma Enhanced Chemical Vapor Deposition (PECVD)

• Source: H2S, H2, CF4, SiH4

[Link]

[6-in. PECVD]

• Model: AMAT-P-5000 (PRECISION 5000) 

• Company: APPLIED MATERIALS

• CCP-PECVD

• Source: TEOS 

• Cluster-4 chamber (2-PECVD, 1-SPUTTER)

[LINK]

[6-in. RIE]

• Model: RAINBOW 4420

• Company: Lam Research

• Reactive Ion Etcher (RIE)

• Dual ICP type

• Gas: O2, CF4, Ar, NF3

[4-in. SPUTTER]

• Model: 24EIS06

• Company: 이아이 Technology

• RF & DC Magnetron Sputtering System (1 DC, 2 RF)

• 온도컨트롤러: NOVA500

• Gas: N2, O2, Ar

[6-in. TEST chamber]

• Lab manufacture-6"

• I-V probe

• Langmuir probe

• Cut-off probe

[공냉식 일체형 칠러] 2기

• Company: 이아이(EI)

• 30 L/min, 20 L

• PECVD용

• Sputter용 

[RPS]

• Lab manufacture-6 inch

• RPS: Remote plasma source

[QMS]

• Quadrupole mass spectrometer

• Model: QMS 250 Prisma Pro

• Company: Pfeiffer Vacuum

[LINK]

[TOF-MS]

• Time of flight mass spectrometer

• Model: itof

• Company: (주)이엘

[Link]

[Ellipsometer]

• Model: M-2000 (w/ auto-alignment)

• Company: J.A. Woollam

• Range: 1-3.5 eV

• Up to 12-inch auto-mapping

[LINK]

[AFM]

• Model: NX10

• Company: Park Systems

• 50 um X-Y Scanner

• CCD (1.2 M Pixel)

• Module option: 

1. KPFM

2. Variable Enhanced Conductive AFM (VECA)

3. Ultra low-noise conductive AFM (ULCA)

[USB디지털 현미경]

• Model: UM22 Ultra 4k

• Company: ViTiny

[LINK]

[OES]

• Model: Maya2000Pro

• Company: Ocean Insight

• 5 EA

[LINK]

[Oscilloscope]

• Model: MSO56

• Company: Tektronix

[LINK]

[Langmuir Probe]

• Model: Langmuir probe system (150 mA)

• Company: Impedans

[Network Analyzer]

• Model: E5071C (100 kHz-8.5 GHz)

• With Cut-off probe, QCM sensor

• Company: KEYSIGHT

[LINK]

[Contact Angle]

• Model: Phoenix 300 Touch

• Company: SEO

[LINK]

[H2, SiH4, H2 Gas Cabinet]

• Model: EGS-S-01

• Company: EG solution

• For PECVD

[Dry Gas Scrubber]

• Model: CD540S

• Company: EG solution

• For ICP-PECVD

[Dry Gas Scrubber]

• Model: STDS-200S

• Company: STC (에스티씨)

• For RIE, CCP-PECVD, RPS

[LINK]