주1. Investigating the impact of oxygen surface plasma treatments on the structural and electrical properties of Graphene (Applied Science and Convergence Technology 2024)

주2. Machine Learning based on Digital Image Colorimetry driven In-situ, Non-contact Plasma Etch Depth Prediction (arXiv, Advanced Intelligent System 2025)

주3. Plasma-Machine Learning Review (Preparation, 2026)

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공1. Plasma and Gas based Semiconductor Technologies for 2D Materials with Computational Simulation & Electronic Applications (Advanced Electronic Materials 2024)

공2. Multi-Domain Data Integration for Plasma Diagnostics in Semiconductor Manufacturing using Tri-CycleGAN (Journal of Sensor and Actuator Network 2024)   

공3. Data-Driven  Approaches for Understanding and Optimizing High-Temperature Fluorocarbon Plasma Process (Sensor 2024)  

공4. Direct Monitoring of Generated Particles in Plasma Enhanced Chemical Vapor Deposition Process using Temperature Compensating Quartz Crystal Microbalance Measurement (Sensors and Actuator A: Physical 2025)

공5.  Strain-Assisted Large-Scale 1T-MoS2 Synthesis and its Optical Synaptic Flash Memory Applications (Small Method 2025)

공6.  Doping and Passivation Effects in Transition Metal Dichalcogenides via HfO2 Thin Film Deposition (Electronic Materials Letters 2025)

공7. Designable van der Waals Crystal for Artificial Neuronal Cell Mimicking (Submitted, 2026)

공8. Machine Learning-assisted Thickness Prediction of HfO2 Thin Film via PEALD (Preparation, 2026)

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특허1. 플라즈마 공정의 종료시점 감지 계측시스템 (출원KR 10-2024-0071155 2024)

특허2. DIC와 OES 복합 진단을 통한 머신러닝 기반 ONO공정 종료 시점 파악 장치 및 방법 (출원KR 10-2025-0081962 2025)

특허3. CycleGAN 모델 기반 플라즈마 광진단 정확도 개선 장치 및 방법 (출원KR 10-2025-0081963 2025)

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학회1. 2023.08.20-23 한국진공학회_포스터

학회2. 2024.05.22-24 KCSDT2024_포스터

학회3. 2024.07.24 KIMM학술제_포스터

학회4. 2024.08. 한국진공학회_구두

학회5. 2024.11 ISNTP_포스터 (국제)

학회6. 2024.11 대한기계학회_구두

학회7. 2025.02 한국진공학회_구두

학회8. 2025.04 대한기계학회 열공학춘계_구두

학회9. 2025.05 한국반도체디스플레이기술학회_포스터

학회10. 2025.11 한국표면분석학회_구두 '은상'

학회11. 2025.11 대한전자공학회_구두 (특별세션)

학회12. 2026.02.08 한국진공학회_구두

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수상1. 한국진공학회 학부생포스터 발표상 (2023)

수상2. 제10회 KSME-SEMES 오픈 이노베이션 챌린지-장려상 (2025)

수상3. 제4회 한국표면분석학회-우수구두 발표상 '은상' (2025)

주1. Multi-Domain Data Integration for Plasma Diagnostics in Semiconductor Manufacturing using Tri-CycleGAN (Journal of Sensor and Actuator Network 2024)  

주2. Machine Learning based on Digital Image Colorimetry driven In-situ, Non-contact Plasma Etch Depth Prediction (arXiv, Advanced Intelligent System 2025)

주3. Plasma-Machine Learning Review (Preparation, 2026)

-

공1. Plasma and Gas based Semiconductor Technologies for 2D Materials with Computational Simulation & Electronic Applications (Advanced Electronic Materials 2024)

공2. Data-Driven  Approaches for Understanding and Optimizing High-Temperature Fluorocarbon Plasma Process (Sensor 2024)  

공3. Direct Monitoring of Generated Particles in Plasma Enhanced Chemical Vapor Deposition Process using Temperature Compensating Quartz Crystal Microbalance Measurement (Sensors and Actuator A: Physical 2025)

공4. Uncertainty quantification and parameter optimization of plasma etching process using heteroscedastic Gaussian process (arXiv, Under Review, Journal of Mechanical Design 2026)

공5. Machine Learning-assisted Thickness Prediction of HfO2 Thin Film via PEALD (Modification, 2026)

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특허1. 플라즈마 공정의 종료시점 감지 계측시스템 (출원KR 10-2024-0071155 2024)

특허2. DIC와 OES 복합 진단을 통한 머신러닝 기반 ONO공정 종료 시점 파악 장치 및 방법 (출원KR 10-2025-0081962 2025)

특허3. CycleGAN 모델 기반 플라즈마 광진단 정확도 개선 장치 및 방법 (출원KR 10-2025-0081963 2025)

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학회1. 2024.01.15-18 ICMAP2024_포스터

학회2. 2024.02.14-16 한국진공학회 동계_포스터

학회3. 2024.05.22-24 KCSDT2024_포스터 '우수포스터상'

학회4. 2024.07.24 KIMM학술제_포스터

학회5. 2024.08 한국진공학회_구두

학회6. 2024.11 ISNTP_포스터 (국제)

학회7. 2024.11 대한기계학회_구두

학회8. 2025.02 한국진공학회_구두

학회9. 2025.04 대한기계학회 열공학춘계_구두

학회10. 2025.05 한국반도체디스플레이기술학회_구두

학회11. 2025.08 한국진공학회_구두

학회12. 2026.02.08-11 한국진공학회_구두

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수상1. KCSDT2024 우수포스터상 (2024)

수상2. 제10회 KSME-SEMES 오픈 이노베이션 챌린지-은상 (2025)

수상3. 제10회 KSME-SEMES 오픈 이노베이션 챌린지-장려상 (2025)

공1. Machine Learning based on Digital Image Colorimetry driven In-situ, Non-contact Plasma Etch Depth Prediction (arXiv, Advanced Intelligent System 2025)

공2. Explainable Integration of Process and Optical Parameters for Plasma Etch Depth Prediction (Under Review, Journal of Vacuum Science & Technology A 2026)

공3. Designable van der Waals Crystal for Artificial Neuronal Cell Mimicking (Submitted, 2026)

공4. Plasma-Machine Learning Review (Preparation, 2026)

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학회1. 2026.02.08-11 한국진공학회_구두

주1.  Investigation of Rotating Arc‑Catalytic Reactor for CF4 Removal with High Energy Efficiency (Plasma Chemistry and Plasma Processing 2022)

주2. CF4 제거를 위한 유동층 반응기를 이용한 열 플라즈마-촉매 스크러버의 특성 연구 (대한기계학회 논문집 B 2022)

주3.  First-Principles Calculation guided High-Purity Layer Control of 4-inch MoS2 by Plasma RIE (Chem. Mater. 2023) Cover

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공1. Effects of a baffle and H2 injection on methane combustion in a turbulent fluidized bed (Fuel 2022)

공2. Development of an induction heating reactor for rapid catalytic CF4 decomposition (Journal of Industrial and Engineering Chemistry 2024)

공3. Explainable Integration of Process and Optical Parameters for Plasma Etch Depth Prediction (Under Review, Journal of Vacuum Science & Technology A 2026)

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특허1. 유동층 연소장비 (등록 10-2371679 2022)

특허2. 유동층 촉매 스크러버 (등록 10-2485993 2023)

특허3. 흡탈착식 유동층 반응기를 포함한 스크러버 장비 (등록 10-2564047 2023)

특허4. 유동층 연소 반응기 (등록 10-2576188 2023)

특허5. Catalyst regenetator (등록 US 11279885 2022)

특허6. 부식 평가 시스템 (출원 10-2025-0201683 2025) 삼성EHS 공동출원

특허7. 배관 평가 장치 및 이를 포함하는 기판 처리 시스템 (출원 10-2025-0201707 2025) 삼성EHS 공동출원

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기술이전1. CPOx technology, Kellogg Brown & Root.

공1. Plasma-Machine Learning Review (Preparation, 2026)

주1. Sequential Infiltration Synthesis with Organic Co-reactants for Extensively Swollen Organic–Inorganic Hybrid Thin Films (ACS Applied Polymer Materials 2023)

주2. A new nanoparticle heterostructure strategy with highly tunable morphology via sequential infiltration synthesis (Applied Surface Science 2022)

주3. Boosting Electrochemical Activity of Porous Transparent Conductive Oxides Electrodes Prepared by Sequential Infiltration Synthesis (Small 2022) Cover

주4. Breaking the Dose Barrier in PMMA: Metal Oxide–Induced Hybrid Strategy for Negative-Tone Lithography (Under Review, 2026)

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공1. Transient, Reusable Top-Coats for the Vertical Orientation of High-χ Block Copolymers for Nano Patterning (ACS Applied Nano Materials 2023)

공2. Understanding Physicochemical Mechanisms of Sequential Infiltration Synthesis toward Rational Process Design for Uniform Incorporation of Metal Oxides (Sensors 2022) 

공3. Explainable Integration of Process and Optical Parameters for Plasma Etch Depth Prediction (Under Review, Journal of Vacuum Science & Technology A 2026)

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수상1. 대한금속, 재료학회 추계학술대회-포스터 발표 우수상 (2021)

수상2. 한국현미경학회 추계학술대회 우수포스터상 (2022)

수상3. CNU graduate fair 2022 포스터 최우수상 (2022)

주1. Strain‐Assisted Large‐Scale 1T‐MoS2 Synthesis and its Optical Synaptic Flash Memory Application (Small Method 2025)

주2. Over 1011-fold variability for a base-12 PUF using particle-damaged graphene (Device 2025)

주3. Development of Vertically Aligned TiS₂ Adhesion Layers via Plasma-Induced Metal Sulfidation and 2-Terminal Device Application (ACS Applied Materials & Interfaces 2025)

주4. Programmable Magneto-ionic effects in multi-ferroic van der Waals heterostructure (Under Review, Nano Letters 2026)

주5. Designable van der Waals Crystal for Artificial Neuronal Cell Mimicking (Submitted, 2026)

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공1. Free-standing two-dimensional ferro-ionic memristor (Nature Communications 2024)

공2. Ultrastable 3D Heterogeneous Integration via N-Heterocyclic Carbene Self-Assembled Nanolayers (ACS Applied Materials & Interfaces 2024)

공3.Stochastically Broken Inversion Symmetry of Van der Waals Topological Insulator for Nanoscale Physically Unclonable Functions (Advanced Materials 2025)

공4. Artificial Room‐Temperature Ferromagnetism of Bulk van der Waals VSe2 (Advanced Science 2025)

공5. Monolithically-integrated van der Waals Synaptic Memory via Bulk Nano-crystallization  (Advanced Science 2025)

공6. Multi-scale computational approach to understand plasma assisted sulfidation for growth mechanism of MoS2 (Chemical Engineering Journal 2025)

공1. Synthesis of Nitrogen Oxides in Atmospheric-pressure electrodeless microwave plasmas: Experiments and reactor network modelling (Journal of Environmental Chemical Engineering 2025)

공2. Atmospheric-pressure microwave plasma reforming of ethane-carbon dioxide mixtures (Journal of CO2 Utilization 2024)

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학회1. 2026.02.08-11 한국진공학회_구두