Embedded Files
Make a copy of the SOP to take your own notes!
Quick Reference Steps
Quick Reference Steps
Sample Preparation
Sample Preparation
Secure the sample to a stub.
Ensure that the sample fits entirely within a provided sample holder.
Samples taller than the provided holders may not fit through the gate valve.
Any user whose sample becomes stuck and requires shutting down the tool to retrieve it may lose access to the facility.
Startup
Startup
Log in to NEMO.
Load the sample into the exchange chamber.
Evacuate the exchange chamber.
Open the chamberscope viewer (Camera/IR Camera) on the computer.
Ensure the stage is at exchange position.
Insert the sample onto the stage.
Return the transfer rod to its resting position.
Vent the exchange chamber.
Wait for the vacuum to read below 2E-4Pa.
Turn on the beam.
Set User Preferences
Set User Preferences
Go to: Setup > Operation Settings.
Select your preferred scan speed presets.
Select your preferred photo presets.
Select the destination folder for your images.
Alignment and Imaging
Alignment and Imaging
Zoom out in low mag (LM) mode.
Navigate to a feature on the sample (quick speed recommended.)
Zoom, focus, and adjust contrast and brightness until at least 1000X.
Switch to SEM mode.
Zoom, focus, and adjust contrast and brightness as needed.
Adjust initial conditions as needed.
Repeat steps 5-8 as needed.
Save images and make annotations.
Shutdown
Shutdown
Return the stage to Exchange Position.
Turn off the beam.
Evacuate the exchange chamber.
Remove the sample from the stage.
Vent the exchange chamber.
Remove the sample from the exchange chamber.
Clean up after yourself.
Log out of NEMO.
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