List -Journal papers-

2024

• Crystallographic Orientation Dependence in Creep Deformation of Micron-Thick Silicon Films for 3-D Microstructures
  Takahiro Horikawa, Kazuma Sawada, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Sensors and Actuators A: Physical, Vol. 379, 115861 (8p) (2024)  doi.org/10.1016/j.sna.2024.115861
  
  

• Short-wavelength infrared light sensing using an electrostatic MEMS resonator integrated with a plasmonic optical absorber
  Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Sensors and Actuators A: Physical, Vol. 379, 115391 (8p) (2024)  doi.org/10.1016/j.sna.2024.115391 

2023

• Analysis of vibration characteristics of clamped-clamped shallow arch beam subjected to heat for micromechanical resonant optical sensing
  Naoki Matsuzuka, Daisuke Yasugi, Naoki Kondo, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Journal of Microelectromechanical Systems, accepted (2024)
  
  

• モノリシック集積コアシェルSiナノワイヤ架橋構造の熱起電力評価
  上杉 晃生, 西依 脩祐, 菅野 公二, 磯野 吉正
  電気学会論文誌（センサ・マイクロマシン部門誌），Vol. 143，No. 7，pp. 185-191 (2023)  doi.org/10.1541/ieejsmas.143.185
  
  

• Fabrication of Tri-Axial MEMS Tactile Sensor for Minimally Invasive Medical Application using Wafer-Level Packaging
  Tomoya Imanishi, Keiju Miyamoto, Shuntaro Higashi, Shunsuke Oki, Akio Uesugi, Koji Sugano, Takanori Aono, Yoshitada Isono
  IEEJ Transactions on Sensors and Micromachines, Vol. 143, No. 1, pp. 13-18 (2023)  doi.org/10.1541/ieejsmas.143.13
  "Special Issue on World State-of-the-art Research on Sensors and Micromachines Best Paper Award"

2020-2022

• Surface-Potential-Modulated Piezoresistive Effect of Core–Shell 3C-SiC Nanowires via Passivation
  Akio Uesugi, Shinya Nakata, Kodai Inoyama, Koji Sugano, Yoshitada Isono
  Nanotechnology,  Vol. 33, No. 50, 505701 (11p) (2022)  doi.org/10.1088/1361-6528/ac8d11
  
  

• Effects of beam length and vibration amplitude on measurement resolution in microresonator-based optical sensing
  Naoki Kondo, Kohei Takegami, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Microsystem Technologies, Vol. 28, No. 5, pp. 1281-1290 (10p) (2022)  doi.org/10.1007/s00542-022-05299-4
  
  

• Integration of silicon nanowire bridges in microtrenches with perpendicular bottom-up growth promoted by surface nanoholes
  Akio Uesugi, Shusuke Nishiyori, Tatsuya Nakagami, Koji Sugano, Yoshitada Isono
  Japanese Journal of Applied Physics, Vol. 61, No. 7, 075502 (6p) (2022)  doi.org/10.35848/1347-4065/ac50bd
  
  

•   Dynamic surface-enhanced Raman spectroscopy of DNA oligomer with a single hotspot from a gold nanoparticle dimer
  Koji Sugano, Katsunari Maruoka, Kohei Ikegami, Akio Uesugi, Yoshitada Isono
  Optics Letters, Vol. 47, No. 2, pp. 373-376 (4p) (2022)  doi.org/10.1364/OL.441580
  Kobe University Repository Kernel: https://hdl.handle.net/20.500.14094/90008983
  
  

• Silicon-coated gold nanodiffraction grating structures as a plasmonic absorber for short wavelength infrared light
  Tatsuya Tsubota, Naoyuki Arai, Atsuya Harada, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Journal of the Optical Society of America B, Vol. 38, No. 10, pp. 2863-2872 (10p) (2021)  doi.org/10.1364/JOSAB.427768
  Kobe University Repository Kernel: https://da.lib.kobe-u.ac.jp/da/kernel/90008701/
  
  

•  Vapor-liquid-solid growth of silicon nanowires from surface nanoholes formed with metal-assisted chemical etching
  Akio Uesugi, Taiju Horita, Koji Sugano, Yoshitada Isono
  Japanese Journal of Applied Physics, Vol. 60, No. 5, 055502 (6p) (2021)  doi.org/10.35848/1347-4065/abf22d
  
  

•  Spectroscopic measurement of water using an electrostatic transducer with near-infrared absorber
  Takamasa Suzuki, Kota Nakafuji, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Electronics and Communications in Japan, Vol. 104, No. 4, e12340 (7p) (2021)  doi.org/10.1002/ecj.12340
  
  

•  近赤外光吸収体を有する静電型マイクロ振動デバイスを用いた水の分光測定
  鈴木隆正，中藤康太，上杉晃生，菅野公二，磯野吉正
  電気学会論文誌（センサ・マイクロマシン部門誌），Vol. 141，No. 9，pp. 321-326 (2021)  doi.org/10.1541/ieejsmas.141.321
  
  

•  Dynamic electrical measurement of biomolecule behavior via plasmonically-excited nanogap fabricated by electromigration
  Akihiro Morita, Takayuki Sumitomo, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Nano Express, Vol. 2, No. 1, 010032 (9p) (2021)  doi.org/10.1088/2632-959X/abe9c0
  
  

•  Three-axis force sensor miniaturized by 3D microstructuring using high-temperature punch creep-forming process
  Kyosuke Nimura, Kenji Osaka, Kazuma Sawada, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Journal of Micromechanics and Microengineering, Vol. 31, No. 2, 025009 (14p) (2021)  doi.org/10.1088/1361-6439/abd223
  
  

•  Wavelength-dependent near-infrared microbolometer for short-wavelength infrared light with gold nanowire grating optical absorber
  Tatsuya Tsubota, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Microsystem Technologies, Vol. 27, No. 3, pp. 997-1005 (9p) (2021)  doi.org/10.1007/s00542-020-05004-3
  
  

•  Detection of wavelength shift of near-infrared laser using mechanical microresonator-based sensor with Si-covered gold nanorods as an optical absorber
  Koji Sugano, Yuki Tanaka, Etsuo Maeda, Reo Kometani, Yoshitada Isono
  Sensors and Actuators A: Physical, Vol. 315, 112337 (7p) (2020)  doi.org/10.1016/j.sna.2020.112337
  Kobe University Repository Kernel: https://hdl.handle.net/20.500.14094/90007946
  
  

•  Effect of clamped beam pattern on resonant frequency shift of microresonator under near-infrared laser irradiation
  Kohei Takegami, Kota Nakafuji, Naoyuki Arai, Akio Uesugi, Koji Sugano, Yoshitada Isono
  Japanese Journal of Applied Physics, Vol. 59, No. SI, SIII04 (8p) (2020)  doi.org/10.35848/1347-4065/ab8412
  Kobe University Repository Kernel: http://www.lib.kobe-u.ac.jp/handle_kernel/90007353
  
  

•  Si薄膜被覆金ナノグレーティング構造の近赤外域光吸収スペクトル偏光依存性
  新居直之，上杉晃生，菅野公二，磯野吉正
  電気学会論文誌（センサ・マイクロマシン部門誌），Vol. 140，No. 4，pp. 72-78 (2020)  doi.org/10.1541/ieejsmas.140.72

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2015-2019

•  Strain engineering of core–shell silicon carbide nanowires for mechanical and piezoresistive characterizations
  Shinya Nakata, Akio Uesugi , Koji Sugano, Francesca Rossi, Giancarlo Salviati, Alois Lugstein, Yoshitada Isono
  Nanotechnology, Vol. 30, No. 26, 265702 (12p) (2019)  doi.org/10.1088/1361-6528/ab0d5d 

•  単層カーボンナノチューブのMEMS引張試験における顕微ラマン分光によるひずみ計測
  土屋智由, 鈴木淳也, 片岡達哉, 平井義和, 菅野公二, 田畑修
  実験力学, Vol. 19, No. 1, pp. 24-29 (2019)  doi.org/10.11395/jjsem.19.24

•  (Review) Nanotemplate-guided self-assembly of gold nanoparticles and its application to plasmonic bio/chemical sensing
  Koji Sugano
  International Journal of Automation Technology, Vol. 12, No. 1, pp. 79-86 (2018) doi.org/10.20965/ijat.2018.p0079

•  Characterization method of relative Raman enhancement for surface enhanced Raman spectroscopy using gold nanoparticle dimer array
  Koji Sugano, Kohei Ikegami, Yoshitada Isono
  Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 06GK03 (5p) (2017) doi.org/10.7567/JJAP.56.06GK03
  Kobe University Repository Kernel: https://da.lib.kobe-u.ac.jp/da/kernel/90004067/ 

•  Single-molecule surface-enhanced Raman spectroscopy of 4,4'-bipyridine on a prefabricated substrate with directionally arrayed gold nanoparticle dimers
  Koji Sugano, Kiyohito Aiba, Kohei Ikegami, Yoshitada Isono
  Japanese Journal of Applied Physics, Vol. 56, No. 6S1, 06GK01 (5p) (2017) doi.org/10.7567/JJAP.56.06GK01
  Kobe University Repository Kernel: https://da.lib.kobe-u.ac.jp/da/kernel/90004066/ 

•  Surface-Enhanced Raman Spectroscopy Analysis Device with Gold Nanoparticle Arranged Nanochannel
  Toshimitsu Takeshita, Keisuke Suekuni, Kiyohito Aiba, Koji Sugano, Yoshitada Isono
  Electronics and Communications in Japan, Vol. 100, No. 4, pp. 33-41 (2017) doi.org/10.1002/ecj.11945

•  Fabrication and Characterization of CNT Forest Integrated Micromechanical Resonator for Rarefied Gas Analyzer in Medium Vacuum Atmosphere
  Koji Sugano, Ryu Matsumoto, Ryota Tsutsui, Hiroyuki Kishihara, Naoki Matsuzuka, Ichiro Yamashita, Yukiharu Uraoka, Yoshitada Isono
  Journal of Micromechanics and Microengineering, Vol. 26, No. 7, 075010 (9p) (2016) 

•  金ナノ粒子二量体配列を用いたアデニン分子の高感度表面増強ラマン分光検出
  饗庭清仁, 池上晃平, 山崎真之亮, 菅野公二, 磯野吉正
  電気学会論文誌（センサ・マイクロマシン部門誌），Vol. 136，No. 6，pp. 256-260 (2016)

•  Fracture behavior of single crystal silicon with thermal oxide layer
  Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata
  Engineering Fracture Mechanics, Vol. 163, pp. 523-532 (2016) 

•  Electrical Resistance Characterization of Strain-Induced Multiwall Carbon Nanotubes Using MEMS-Based Strain Engineering Device
  Kenji Yamauchi, Keisuke Obata, Shinya Nakata, Koji Sugano, Kisaragi Yashiro, Yoshitada Isono
  Sensors and Materials, Vol. 28, No. 2, pp. 75-88 (2016) 

•  Time-Resolved Micro Raman Stress Spectroscopy for Single Crystal Silicon Resonator using MEMS Optical Chopper
  Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
  Journal of Microelectromechanical Systems, Vol. 25, No. 1, pp. 188-196 (2016) 

•  Effect of crystallographic orientation on tensile fractures of (100) and (110) silicon microstructures fabricated from SOI wafers
  Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
  Micro & Nano Letters, Vol. 10, No. 12, pp.678-682 (2015) 

•  高感度表面増強ラマン分光分析に向けたマイクロ流路内粒子凝集反応解析
  菅野公二, 片山拓, 土屋智由, 田畑修
  電気学会論文誌（センサ・マイクロマシン部門誌）, Vol. 135-E, No. 11, pp. 433-438 (2015) doi.org/10.1541/ieejsmas.135.433

•  ナノテンプレートを用いた金ナノ粒子直鎖配列の作製と光学特性評価
  菅野公二, 平岡亮二, 土屋智由, 田畑修
  電気学会論文誌（センサ・マイクロマシン部門誌），Vol. 135-E, No. 11, pp. 474-475 (2015) doi.org/10.1541/ieejsmas.135.474

•  High-speed Pulsed Mixing in a Short Distance with High-frequency Switching of Pumping from Three Inlets
  Koji Sugano, Akihiro Nakata, Toshiyuki Tsuchiya, Osamu Tabata
  Journal of Micromechanics and Microengineering, Vol. 25, No. 8, 084003 (9p) (2015) doi:10.1088/0960-1317/25/8/084003

•  Surface-Enhanced Raman Spectroscopy using Linearly Arranged Gold Nanoparticles Embedded in Nanochannels
  Koji Sugano, Keisuke Suekuni, Toshimitsu Takeshita, Kiyohito Aiba, Yoshitada Isono
  Japanese Journal of Applied Physics, Vol. 54, No. 6S1, 06FL03 (6p) (2015) dx.doi.org/10.7567/JJAP.54.06FL03

•  金粒子配列ナノチャネルを用いた表面増強ラマン分光分析デバイス
  竹下俊光, 末國啓輔, 饗庭清仁, 菅野公二, 磯野吉正
  電気学会論文誌（センサ・マイクロマシン部門誌）, Vol. 135-E, No. 6, pp. 214-220 (2015) doi.org/10.1541/ieejsmas.135.214

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2001-2014

•  Study on Vibration-coupling Control of Out-of-plane Coupled Resonator for Anti-shock Tuning Fork Gyroscopes

Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

IEEJ Transactions on Sensors and Micromachines, Vol. 134-E, No. 12, pp. 392-399 (2014)

•  Experimental verification of frequency decoupling effect on acceleration sensitivity in tuning fork gyroscopes using in-plane coupled resonators

Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Microsystem Technologies, Vol. 20, No. 3, pp. 403-411 (2014)

•  Analytical Investigation of the Feasibility of Sacrificial Microchannel Sealing for Chip-Scale Atomic Magnetometers

Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Microsystem Technologies，Vol. 20, No. 3, pp. 357-365 (2014)

•  On-chip Fabrication of Alkali-Metal Vapor Cells utilizing an Alkali-Metal Source Tablet

Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata

Journal of Micromechanics and Microengineering，Vol. 23, No. 11, 115003 (9p) (2013)

•  Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer

Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Electronics and Communications in Japan, Vol. 96, No. 5, pp. 58–66 (2013) (Translated from No.24)

•  (110)単結晶シリコン薄膜引張破壊特性に及ぼす表面形態及び結晶方位の影響

上杉晃生, 平井義和, 菅野公二, 土屋智由, 田畑修

日本機械学会論文誌A編, Vol. 79, No. 804, pp. 1191–1200 (2013)

•  MEMSネガレジストの粗視化分子動力学シミュレーション

平井義和，柳生裕聖，牧野圭秀，上杉晃生，菅野公二，土屋智由，田畑修

電気学会論文誌（センサ・マイクロマシン部門誌）, Vol. 133-E, No. 8, pp. 320–329 (2013)

•  Simulation of Mechanical Properties of Epoxy-Based Chemically Amplified Resist by Coarse-Grained Molecular Dynamics

Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Polymer, Vol. 53, No. 21, pp. 4834-4842 (2012)

• 加工条件の異なる(110)<110>単結晶シリコン薄膜の引張試験

上杉晃生，平井義和，菅野公二，土屋智由，田畑修

電気学会センサ・マイクロマシン部門誌，Vol. 132-E, No. 9, pp.320-321 (2012)

• Frequency response of in-plane coupled resonators for investigating theacceleration sensitivity of MEMS tuning fork gyroscopes

Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Microsystem Technologies, vol. 18, No. 6, pp.797-803 (2012)

• 誘電泳動によりアセンブルしたSWCNTの無電解Auめっきによる機械的・電気的クランピング

片岡達哉，平井義和，菅野公二，土屋智由，田畑修

電気学会センサ・マイクロマシン部門誌, vol. 132-E, No. 5, pp.108-113 (2012)

•  Electrostatic Tensile Testing Device with NanoNewton and Nanometer Resolution and its Application to C60 Nanowire Testing

Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata

Journal of Microelectromechanical Systems, vol. 21, no. 3, pp.523-529 (2012)

•  Micromachined Tactile Sensor for Soft Tissue Compliance Detection

Ahmed M. R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib and Mohamed M. Sallam

Journal of Microelectromechanical Systems, vol. 21, no. 3, pp.635-645 (2012)

• チップスケール原子磁気センサのためのガラスフリットリフローによる犠牲マイクロ流路気密封止技術

辻本和也，平井義和，菅野公二，土屋智由，田畑修

電気学会センサ・マイクロマシン部門誌, vol. 131-E, No. 7, pp. 251-257 (2011)

•  Fabrication of gold nanoparticle pattern using combination of self-assemblyand 2-step transfer

Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata

Sensors and Materials, vol. 23, no. 5, pp.263-275 (2011)

•  Embedded Microstructure Fabrication using Developer-Permeanbility of Semi-Cross-Linked Negative Resist

Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Journal of Microelectromechanical Systems, vol. 19, no. 5, pp. 1058-1069 (2010)

• 自己変位検出機能を有する面内2自由度静電櫛歯トランスデューサの等価回路

徳崎裕幸，平井義和，菅野公二，土屋智由，田畑修

電気学会センサ・マイクロマシン部門誌, vol. 130-E, No. 9, pp. 443-449 (2010)

• Mixing speed-controlled gold nanoparticle synthesis with pulsed mixing microfluidic system

Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata

Microfluidics and nanofluidics, vol. 9, No. 6, pp. 1165-1174 (2010)

• A Three-dimensional Microstructuring Technique Exploiting the Wavelength Dependency of the Positive Photoresist Property

Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Journal of Micromechanics and Microengineering, Vol. 20, 065005, 13p (2010)

• 混合速度・温度制御可能な金ナノ粒子生成用マイクロリアクタ

菅野公二，内田雄喜，土屋智由，田畑修

電気学会センサ・マイクロマシン部門誌, vol. 130-E, No. 7, pp. 292-299 (2010)

• Tensile Testing of Single-Crystal Silicon Thin Films at 600oC Using Infrared Radiation Heating

Toshiyuki Tsuchiya, Tetsuo Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata

Sensors and Materials, vol. 22, No. 1, pp.1-11 (2010)

•  Tensile and Tensile-Mode Fatigue Testing of Microscale Specimens in Constant Humidity Environment

Toshiyuki Tsuchiya, Yusuke Yamaji, Koji Sugano, Osamu Tabata

Experimental Mechanics, vol. 50, no. 4, pp. 509-516 (2010)

• Design and fabrication of a differential capacitive three-axis SOI accelerometer using vertical comb electrodes

Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata

IEEJ Transactions on Electrical and Electronic Engineering, Vol.4, No.3, pp. 345-351 (2009)

• Free-standing C60 nanowire fabricated using XeF2 sacrificial dry etching

Toshiyuki Tsuchiya, Tomoya Jomori, Yasutake Ura, Koji Sugano, Osamu Tabata

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, No. 1, 013020 (2009)

• Design and Simulation of a Tactile Sensor for Soft-Tissue ComplianceDetection

Ahmed M. R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib and Mohamed M. Sallam

電気学会センサ・マイクロマシン部門誌, Vol. 128-E, No. 5, pp. 186-192 (2008)

• Air Damping in a Fan-Shaped Rotational Resonator with Comb Electrodes

Yuki Uchida, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata and Tsuyoshi Ikehara

電気学会センサ・マイクロマシン部門誌, Vol. 128-E, No. 5, pp. 203-208 (2008)

• Design of Soft X-ray Source with Periodic Microstructure using Resonance Transition Radiation for Tabletop Synchrotron

Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata

IEEJ Transactions on Electrical and Electronic Engineering, Vol. 3, No. 3, pp.268-273 (2008)

• 超小型触覚ディスプレイ用垂直駆動SMA薄膜アクチュエータの設計

吉川弥，篠部晃生，菅野公二，土屋智由，石田章，田畑修

電気学会センサ・マイクロマシン部門誌, Vol. 128-E, No. 4, pp. 151-160 (2008)

• DNAを利用したAuナノ微粒子のシーケンシャルセルフアセンブル

日下部達哉，種村友貴，樋口雄一，菅野公二，土屋智由，田畑修

粉体工学会誌, 第45巻, 第3号, pp. 16-21 (2008)

• Mechanical calibration of MEMS springs with sub-micro-Newton forceresolution

Kenji Miyamoto, Tomoya Jomori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya

Sensors and Actuators A: Physical, Vol. A143 No. 1, pp.136-142 (2008)

• Versatile Method of Submicroparticle Pattern Formation Using Self-Assembly and Two-Step Transfer

Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata

Journal of Microelectromechanical Systems, Vol. 16, No. 3, pp. 746-752 (2007)

• 2種類の液滴の界面張力を用いた逐次積層セルフアセンブル

樋口雄一, 菅野公二, 土屋智由, 田畑修

電気学会センサ・マイクロマシン準部門論文誌，Vol.127-E，No.4，pp.  214-220 (2007)

doi.org/10.1541/ieejsmas.127.214

• Moving mask UV lithography for three-dimensional structuring

Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya and Osamu Tabata

Journal of Micromechanics and Microengineering, Vol. 17, No. 2, pp. 199-206 (2007)

doi.org/10.1088/0960-1317/17/2/003

• Micropowder Blasting with Nanoparticles Dispersed Polymer Mask for Rapid Prototyping of Glass Chip

Hiromasa Yagyu, Koji Sugano, Shigehiko Hayashi and Osamu Tabata

Journal of Micromechanics and Microengineering, Vol. 15, No. 6, pp. 1236-1241 (2005) doi.org/10.1088/0960-1317/15/6/014

• Reduction of Surface Roughness and Aperture Size Effect for Etching of Siwith XeF2

Koji Sugano and Osamu Tabata

Journal of Micromechanics and Microengineering, Vol.12, No.6, pp. 911-916 (2002) doi.org/10.1088/0960-1317/12/6/323

• Effects of Aperture Size and Pressure on XeF2 Etching of Silicon

Koji Sugano and Osamu Tabata

Microsystem Technologies, Vol.9, No.1-2, pp. 11-16 (2002) doi.org/10.1007/s00542-002-0195-5

• Selectivity Control of Mask Material for XeF2 Etching Using UV light Exposure

Koji Sugano and Osamu Tabata

電気学会センサ・マイクロマシン準部門論文誌, Vol.121-E, No.12, pp. 647-651 (2001)