MEMS Fabrication and Design 

MEMS Fabrication and Design: Advanced Physical and Chemical Sensing Technologies 

This research area integrates microfabrication techniques with integrated circuit technologies to develop ultra-miniaturized, high-performance sensors, with an emphasis on reliability and accuracy in real-world applications.

Key Research Topics:

• Pressure Sensors
  We design diaphragm-based pressure sensors capable of accurately detecting mechanical deformation. These sensors are applicable in areas such as implantable biomedical devices and force-feedback systems in industrial robotics.

• Crack Sensors
  We develop high-sensitivity crack sensors that can detect micro-crack formation in real time. These are used for structural fatigue monitoring, wearable electronic skin (e-skin), and smart textiles.

• Gas Sensors
  By integrating sensitive materials (such as nanostructured metal oxides and graphene) into MEMS platforms, we are developing gas sensors capable of detecting hazardous gases and biomolecules (e.g., NH₃, H₂S, VOCs) at low concentrations with high precision.

Technical Highlights:

• Precision structure design through advanced MEMS microfabrication processes

• Multifunctional sensor platforms combining physical and chemical sensing capabilities

• Integration with wireless communication and data analytics to enable smart sensing systems

• Wide application range in biomedical monitoring, environmental sensing, healthcare, and industrial diagnostics

Our research in MEMS Fabrication and Design aims to lead the development of next-generation sensor platforms that combine practicality and innovation, contributing to the advancement of smart and adaptive sensing technologies.