Embedded Files
Photolithography
Photolithography
HMDS Vapor Prime Oven - LP-III - Yield Engineering Systems (YES)
Automated Coater Track - SVG 88 - Rite Track (OEM: SVG)
Photoresist Bake Oven - Ultra Clean 100 - Lab-Line
Wet Clean and Surface Preparation
Wet Clean and Surface Preparation
Standard Prefurnace Clean - WPS1 and WPS2 - Santa Clara Plastics
Solvents and Developer Bench (AZ3312, PRS-3000) - WPS3 - Santa Clara Plastics
Additional Acid Cleans - WPS4 - Santa Clara Plastics
Metal etch and photoresist strip - WPS5 - Santa Clara Plastics
Spin Rinse Dryers - Sitek Corporation
Dry Etching
Dry Etching
Dual Frequency RIE Plasma Etcher - 4520XLe - Lam Research
Ash/Descum
Ash/Descum
Asher - AW-105 - Matrix Allwin21
Other Thermal Processing
Other Thermal Processing
Wet and Dry Oxidation and Diffusion Horizontal Furnaces - TMX - Expertech (OEM: Thermco)
Thin Film Deposition
Thin Film Deposition
PECVD Tool - Vision 300 - Plasma-Therm (OEM: Advanced Vacuum)
LPCVD Horizontal Furnace - TMX - Expertech (OEM: Thermco)
Dicing
Dicing
Dicing Saw - DAD-320 - Disco Corporation
Deionized Water System Components
Deionized Water System Components
Reverse Osmosis System
Exchangeable Resin Bed Service Deionization (SDI) System - Evoqua/Xylem
Filter Banks (0.1 μm and 0.3 μm) - Sigma-Aldrich
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