Embedded Files
Fabrication process (Deposition) 장비
Fabrication process (Deposition) 장비
Thermal Evaporator #1
● Ni, Ag, Al Evaporation source
● W-boat
● Year: 2020
● Thermal Atomic Layer Deposition (ALD) #1, #2
● Ozone generator & chiller(1HP)
● Insulator: HfOx, ZrOx, Al2O3, SiOx
● Year: 2021
Fabrication process (Photo) 장비
Fabrication process (Photo) 장비
Fabrication process (Etch) 장비
Fabrication process (Etch) 장비
Oxford Reactive Ion Etcher (RIE) #1
● Gas: CF4, CHF3, Ar, O2, N2
● Year: 2020
Gas scrubber (Wet-type)
● ~ Max. 750 oC
● Year: 2025
3-Bottle Gas Cabinet #1
● Gas: CF4, CHF3, Ar
● Year: 2020
Fabrication process (Thermal Annealing) 장비
Fabrication process (Thermal Annealing) 장비
Rapid Thermal Annealing (RTA) #1
● ~ Max. 850 oC, 10 min.
● Year: 2020
Utility 장비
Utility 장비
Characterization / Analysis 장비
Characterization / Analysis 장비
Probe-station #1 (MST-4000A)
● Dark Shield Box Size (W700 x D700 x H800 mm)
● 6" ambient coaxial chuck
● Total magnification: 90x ~300x (Max.)
● CCD Camera 4K@1080p@60FPS, 15" LCD monitor.
● Positioner: PB50, X/Y/Z travel: 6/6/9mm, Resolution: 1um
● Positioner holder: PH-C14 or PH-C15
● Year: 2025.10
Probe-station #2 (MST-8000C)
● Dark Shield Box (MSDS-01) Size (W900 x D780 x H1000 mm), Dual Shield, EMI, ESD Care.
● 8" ambient coaxial chuck
● Total magnification: 90x (Max.)
● CCD Camera Full HD 210M Pixel, 15" LCD monitor.
● Positioner: PB100, X/Y/Z travel: 13mm, Resolution: 1um
● Positioner holder:Triaxial C_15 or Coaxial C_14
● Vibration Table (MSVT0200): W900 x D900 x H800 mm)
● Hot Chuck: Temp. 200, 300 Degree c (8" or Spot Hot Chuck)
● Year: 2020.04
High voltage amplifier & Function generator
● Size (W310 x D350 x H710 mm)
● Supplying electrical input to ferroelectric material
● Year: 2025
기타 장비
기타 장비
Vacuum desiccator
● Size (W310 x D350 x H710 mm)
● Pressure gauge
● Vacuum pump
● Year: 2019
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