State of the art Deposition Facilities

We have recently installed our new AJA Orion 8 sputter tool in the group, it is a very high end, state of the art, ultra high vacuum sputtering system with unmatchable qualities. At present, this system is able to reach its base vacuum of 1.0 x 10^-8 Torr and has six sputter sources powered with two power supplies (one RF and one DC). We can also provide bias to the substrate, which can be used for pre-cleaning of substrate as well as for better film quality. We also have facility for reactive sputtering. The load lock facility provides help in accessing the main chamber without breaking vacuum.