Publications
Publication Highlights
Author Profile (Click)
Total number of journal publications: 164
Total number of citations: 4989 (Scopus)
h-index: 37 (Scopus)
Book Chapter “Back End of the Line,” in Atomic Layer Deposition for Semiconductors, Springer, ISBN: 978-1-4614-8054-9.
Full Publications List
(2024)
Mohd Zahid Ansari, Petr Janicek, Sook NamGung, Hyangil Kim, Dip K. Nandi, Taehoon Cheon, Masoom Raza Siddiqui, Muhammad Imran, Yujin Jang, Jong- Seong Bae, Tae Eun Hong, Chaehyun Park, Yeseul Son, Sang Bok Kim, Soo-Hyun Kim
(2024) Surfaces and Interfaces 46 104014
2. Mo-based MXenes: Synthesis, properties, and applications.
Iftikhar Hussain, Umay Amara, Faiza Bibi, Abdul Hanan, Muhammad Nazim Lakhan, Irfan Ali Soomro, Amjad Khan, Irum Shaheen, Uzair Sajjad, Gokana Mohana Rani, Muhammad Sufyan Javed, Karim Khan, Muhammad Bilal Hanif, Mohammed A Assiri, Sumanta Sahoo, Wail Al Zoubi, Debananda Mohapatra, Kaili Zhang
(2024) Advances in Colloid and Interface Science, 103077
Mohd Zahid Ansari, Iftikhar Hussain, Debananda Mohapatra, Sajid Ali Ansari, Reza Rahighi, Dip K Nandi, Wooseok Song, and Soo-Hyun Kim
(2024) Advanced Science. 2303055
(2023)
Kang-Min Seo, Debananda Mohapatra, Gun-Woo Bae, Mohd Zahid Ansari, Yeseul Son, Yujin Jang, Jong-Seong Bae, Tae Eun Hong, and Soo-Hyun Kim
(2023) ACS Applied Nano Materials.
2. Quantitative Two-Stage Classification of Gas Mixtures Using 2-D TMDC and PGM Chalcogenides.
Inkyu Sohn , Joungbin An , Dain Shin , Jaehyeok Kim, Tatsuya Nakazawa, Yohei Kotsugi, Soo-Hyun Kim, Hwi Yoon, Won-Yong Shin , Senior Member, IEEE,
Seung Min Chung, and Hyungjun Kim
(2023) IEEE Xplore.
Debananda Mohapatra, Jeong Eun Byun, Mohd Zahid Ansari, Haekyoung Kim, Taehoon Cheon, Jongmoon Jang, Young-Rae Cho,
Jung Woo Lee, and Soo-Hyun Kim
(2023) Advanced Materials Technologies. 2301175
Yuki Mori, Taehoon Cheon, Yohei Kotsugi, Youn-Hye Kim, Yejin Park, Mohd Zahid Ansari, Debananda Mohapatra, Yujin Jang, Jong-Seong Bae, Woobin
Kwon, Gahui Kim, Young-Bae Park, Han-Bo-Ram Lee, Wooseok Song, and Soo-Hyun Kim
(2023) Small. 19(34)
Byoungyong Im, Sunjung Kim , Soo-Hyun Kim
(2023) Electrochimica Acta. 270
Byoungyong Im, Kiyeung Mun, Sunjung Kim , Soo-Hyun Kim
(2023) Electrochimica Acta. 443
ligand-containing hafnium precursor.
Mohd Zahid Ansari, Petr Janicek, Ye Jin Park, Sook NamGung, Bo Yeon Cho, Dip K. Nandi, Yujin Jang, Jong-Seong Bae, Tae Eun Hong, Taehoon Cheon,
Wooseok Song, Ki-Seok An, Soo-Hyun Kim
(2023) Applied Surface Science. 620
Debananda Mohapatra, Yujin Shin, Mohd Zahid Ansari, Youn-Hye Kim, Ye Jin Park, Taehoon Cheon, Haekyoung Kim, Jung Woo Lee, Soo-Hyun Kim
(2023) Advanced Science. 10(12)
Sang Eon Jun, Youn-Hye Kim, Jaehyun Kim, Woo Seok Cheon, Sungkyun Choi, Jinwook Yang, Hoonkee Park, Hyungsoo Lee, Sun Hwa
Park, Ki Chang Kwon, Jooho Moon, Soo-Hyun Kim, Ho Won Jang
(2023) Nature Communications. 14, 609
(2022)
with Solar-to-Hydrogen Conversion Efficiency Exceeding 10%.
Yungi Nam, Daehan Kim, Jinwoo Chu, Na-Yeon Park, Tae Gun Kim, Kyung Joong Kim, Soo-Hyun Kim, Byungha Shin
(2022) Advanced Science. 9(9)
2. Atomic Layer Deposited RuO2 Diffusion Barrier for Next Generation Ru-Interconnects
Youn-Hye Kim, Minsu Kim, Yohei Kotsugi, Taehoon Cheon, Debananda Mohapatra, Yujin Jang, Jong-Seong Bae, Tae Eun Hong, Rahul Ramesh, Ki-Seok An,
(2022) Advanced Functional Materials. 32(44)
Mohd Zahid Ansari , Sajid Ali Ansari , Soo-Hyun Kim
(2022) Journal of Energy Storage. 53
Mohd Zahid Ansari, Kang-Min Seo, Soo-Hyun Kim, Sajid Ali Ansari
(2022) Nanomaterials. 12(11)
5. In-Zn-Sn-O thin film based transistor with high-k HfO2 dielectric
Yang Gyu Bak, Ji Woon Park, Ye Jin Park, Mohd Zahid Ansari, Sook NamGung, Bo Yeon Cho, Soo-Hyun Kim, Hee Young Lee
(2022) Thin Solid Films. 753
Ramu Banavath, Siva Sankar Nemala, Soo-Hyun Kim, Sivasambu Bohm, Mohd Zahid Ansari, Debananda Mohapatra, Parag Bhargava
(2022) FlatChem. 33
Tatsuya Nakazawa, Donghyun Kim, Jaehyeok Kim, Yohei Kotsugi, Taehoon Cheon, Seung-Min Chung, Soo-Hyun Kim, Hyungjun Kim
(2022) Rare Metals. 41
8. Quantitative Two-Stage Classification of Gas Mixtures Using 2D TMDC and PGM Chalcogenides
Inkyu Sohn, Joungbin An, Dain Shin, Jaehyeok Kim, Tatsuya Nakazawa, Yohei Kotsugi, Soo-Hyun Kim, Hwi Yoon, Won-Yong Shin, Seung Min Chung,
(2022) IEEE Sensors Journal. 1
9. Atomic Layer Deposition of Iridium Using a Tricarbonyl Cyclopropenyl Precursor and Oxygen
Na-Yeon Park, Minsu Kim, Youn-Hye Kim, Rahul Ramesh, Dip K. Nandi, Tomohiro Tsugawa, Toshiyuki Shigetomi, Kazuharu Suzuki, Ryosuke Harada, Miso
Kim, Ki-Seok An, Bonggeun Shong, and Soo-Hyun Kim
(2022) Chemistry of Materials. 34(4)
10. Cobalt-based metal oxide coated with ultrathin ALD-MoS2 as an electrode material for supercapacitors
Sachin A. Pawar, Dipali S. Patil, Dip K. Nandi, Muhammad Monirul Islam, Takeaki Sakurai, Soo-Hyun Kim, Jae Cheol Shin
(2022) Chemical Engineering Journal. 435
(2021)
1. Group IV Transition Metal (M = Zr, Hf) Precursors for High-κ Metal Oxide Thin Films
Ga Yeon Lee, Seungmin Yeo, Seong Ho Han, Bo Keun Park, Taeyong Eom, Jeong Hwan Kim, Soo-Hyun Kim, Hyungjun Kim, Seung Uk Son, Taek-Mo Chung
(2021) Inorganic Chemistry. 60
Subbukalai Vijayakumar,Ganesh Dhakal,Soo-Hyun Kim,Jintae Lee,Yong Rok Lee, Jae-Jin Shim
(2021) Nanomaterials. 11(12)
Atul Thakre, Ajeet Kumar, Min-Young Lee, Deepak Rajaram Patil, Soo-Hyun Kim, Jungho Ryu
(2021) Journal of Materials Chemistry C. 9
Jin-Hyeok Lee, Romel Hidayat, Rahul Ramesh, Hyeonsu Roh, Dip K. Nandi, Won-Jun Lee, Soo-Hyun Kim
(2021) Applied Surface Science. 578
Y. Kotsugi, S.-M. Han, Y.-H. Kim, T. Cheon, D. K. Nandi, R. Ramesh, N. K. Yu, K. Son, T. Tsugawa, S. Ohtakea, R. Harada, Y.-B. Park, B. Shong, and S.-H. Kim
(2021) Chemistry of Materials. 33(14)
H.-M. Yoon, S. Kim, and S.-H. Kim
(2021) Microelectronic Engineering. 248
K.-R. Son, Y.-H. Kim, S.-H. Kim, Y.-B. Park
(2021) Journal of Materials Science: Materials in Electronics. 32
Chi Thang Nguyen, Bonwook Gu, Taehoon Cheon,Jeongwoo Park, Mohammad Rizwan Khan, Soo-Hyun Kim, Bonggeun Shong, Han-Bo-Ram Lee
(2021) Chemistry of Materials. 33(12)
Mohd Zahid Ansari, Petr Janicek, Dip K. Nandi, Stanislav Slang, Marek Bouska, Hongjun Oh, Bonggeun Shong, Soo-Hyun Kim
(2021) Applied Surface Science 565
M. Lee, R. Hidayat, D. K. Nandi, T. H. Kim, Y. Kim, S. Kim, W.-J. Lee, and S.-H. Kim
(2021) Applied Surface Science 563
R. Ramesh, S. Han, D. K. Nandi, S. Y. Sawant, D. H. Kim, T. Cheon, M. H. Cho, R. Harada, T. Shigetomi, K. Suzuki, S.-H. Kim
(2021) Advanced Materials Interfaces. 8(3)
Deok-Hyun Kim, Rahul Ramesh, Dip K Nandi, Jong-Seong Bae, Soo-Hyun Kim
(2021) Nanotechnology. 32(7)
Mohd Zahid Ansari, Petr Janicek, Dip K. Nandi, Karel Palka, Stanislav Slang, Deok Hyun Kim, Taehoon Cheon, Soo-Hyun Kim
(2021) Applied Surface Science. 538
R. Hidayat, T. Chowdhury, Y. Kim , S. Kim , T. R. Mayangsari, S.-H. Kim, W.-J. Lee
(2021) Applied Surface Science. 538
(2020)
1. Atomic layer deposited Mo2N thin films using Mo(CO)6 and NH3 plasma as a Cu diffusion barrier
Yong-Hwan Joo, Dip K. Nandi Rahul Ramesh, Yujin Jang, Jong-Seong Bae, Taehoon Cheon, Soo-Hyun Kim
(2020) Journal of Alloys and Compounds. 858
Soumyadeep Sinha, Dip K. Nandi, Pravin S. Pawar, Soo-Hyun Kim, Jaeyeong Heo
(2020) Solar Energy. 209
Dr. Rahul Ramesh, Dr. Sandesh Y. Sawant, Dr. Dip K. Nandi, Tae Hyun Kim, Deok Hyun Kim, Seung-Min Han, Yujin Jang, Dr. Myoung Gyu Ha, Prof. Moo
Hwan Cho, Prof. Taeho Yoon, Prof. Soo-Hyun Kim
(2020) ChemSusChem. 13, 4159
M. Kim, S. Nabeya, S.-M. Han, M.-S. Kim, S. Lee, H.-M. Kim, S.-Y. Cho, D.-J. Lee, S.-H. Kim, and K.-B. Kim
(2020) ACS Applied Materials and Interfaces. 12(12)
5. Atomic layer deposition of high-quality Pt thin film as an alternative interconnect replacing Cu
Seung-Min Han, Dip K. Nandi, Yong-Hwan Joo, Toshiyuki Shigetomi, Kazuharu Suzuki, Shunichi Nabeya, Ryosuke Harada, and Soo-Hyun Kim
(2020) Journal of Vacuum Science & Technology A. 38(3)
Sungmin Park, Bo-Eun Park, Hwi Yoon, Sanghun Lee, Taewook Nam, Taehoon Cheon, Soo-Hyun Kim, Hwansung Cheon, Sangkyun Im, Taegeun Seong,
(2020) Journal of Materials Chemistry C. 4
Taejin Choi, Seong Dae Kim, Seungmin Yeo, Taehoon Cheon, Soo-Hyun Kim, Jong-Hyun Ahn, Hyungjun Kim
(2020) Electrochimica Acta. 334
(2019)
Tae Hyun Kim, Dip K. Nandi, Rahul Ramesh, Seung-Min Han, Bonggeun Shong, and Soo-Hyun Kim
(2019) Chem. Mater. 2019, 31, 8338-8350.
Mohd Zahid Ansari, Dip K. Nandi, Petr Janicek, Sajid Ali Ansari, Rahul Ramesh, Taehoon Cheon, Bonggeun Shong, Soo-Hyun Kim
(2019) ACS Appl. Mater. Interfaces. 2019, 11, 43608−43621
Jun Beom Kim, Dip K. Nandi, Tae Hyun Kim, Yujin Jang, Jong-Seong Bae, Tae Eun Hong and Soo-Hyun Kim
(2019) Thin Solid Films. 685(1)
Minsu Kim, Shunichi Nabeya, Dip K. Nandi, Kazuharu Suzuki, Hyun-Mi Kim, Seong-Yong Cho, Ki-Bum Kim, and Soo-Hyun Kim
(2019) ACS Omega, 2019 Jun 30; 4(6): 11126–11134.
Dip K. Nandi, Seungmin Yeo, Mohd Zahid Ansari, Soumyadeep Sinha, Taehoon Cheon, Jiseok Kwon, Hyungjun Kim, Jaeyeong Heo, Taeseup Song,
Soo-Hyun Kim
(2019) Electrochimica Acta. 322
Hee Chan Song, Seungtaeg Oh, Sang Hoon Kim, Si Woo Lee, Song Yi Moon, Hanseul Choi, Soo-Hyun Kim, Yongman Kim, Jihun Oh, Jeong Young Park
(2019) Chem. Commun. 64
Soumyadeep Sinha, Pravin N. Didwal, Dip K. Nandi, Rakesh Verma, Jae Yu Cho, Soo-Hyun Kim, Chan-Jin Park, Jaeyeong Heo
(2019) Small. 15(37)
performance supercapacitor electrode
Mohd Zahid Ansari, Nazish Parveen, Dip K. Nandi, Rahul Ramesh, Sajid Ali Ansari, Taehoon Cheon, Soo-Hyun Kim
(2019) Scientific Reports. 9:0225
Tae-Eun Song ; Seho Lee; Hee Han; Soonyoung Jung; Soo-Hyun Kim; Min Jun Kim; Seung Wook Lee; Chi Won Ahn
(2019) Journal of Vacuum Science & Technology A 37
Rahul Ramesh, Dip K Nandi, Tae Hyun Kim, Taehoon Cheon, Jihun Oh, Soo-Hyun Kim
(2019) ACS Appl. Mater. and Interfaces. 11(19)
Soumyadeep Sinha, Pravin N. Didwal, Dip K. Nandi, Jae Yu Cho, Soo-Hyun Kim, Chan-Jin Park, Jaeyeong Heo
(2019) Ceramics International.45(1)
(2018)
1. Cobalt titanium nitride amorphous metal alloys by atomic layer deposition
Taewook Nam, Chang Wan Lee, Taehoon Cheon, Woo Jae Lee, Soo-Hyun Kim, Se-Hun Kwon, Han-Bo-Ram Lee, Hyungjun Kim
(2018) Journal of Alloys and Compounds. 737(15)
2. Hole-Selective CoOx/SiOx/Si Heterojunctions for Photoelectrochemical Water Splitting
Seungtaeg Oh, Soonyoung Jung, Yong Hwan Lee, Jun Tae Song, Tae Hyun Kim, Dip K. Nandi, Soo-Hyun Kim, Jihun Oh
(2018) ACS Catalysis. 8, 9755−9764
Soumyadeep Sinha, Hari Vignesh Ramasamy, Dip K. Nandi, Pravin N. Didwal, Jae Yu Cho, Chan-Jin Park, Yun-Sung Lee, Soo-Hyun Kim, Jaeyeong Heo
(2018) Jounal of Materials Chemistry A. 6
Seungmin Yeo, Dip K. Nandi, R. Rahul, Tae Hyun Kim, Bonggeun Shong, Yujin Jang, Jong-Seong Bae, Jeong Woo Han, Soo-Hyun Kim, Hyungjun Kim
(2018) Applied Surface Science. 459
Dip K. Nandi, Sumanta Sahoo, Tae Hyun Kim, Taehoon Cheon, Soumyadeep Sinha, Ramesh Rahul, Yujin Jang, Jong-Seong Bae, Jaeyeong Heo, Jae-Jin Shim,
Soo-Hyun Kim
(2018) Electrochemistry Communications 93
6. Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films
Taejin Choi, Seungmin Yeo, Jeong-Gyu Song, Seunggi Seo, Byeonghyeon Jang, Soo-Hyun Kim, Hyungjun Kim
(2018) Surface & Coatings Technology. 344
Jaseok Koo, Sammi Kim, Taehoon Cheon, Soo-Hyun Kim, Woo Kyoung Kim
(2018) Scientific REPORTS. 8
8. Phase-controlled growth of cobalt oxide thin films by atomic layer deposition
Soonyoung Jung, Dip K. Nandi, Seungmin Yeo, Hyungjun Kim, Yujin Jang, Jong-Seong Bae, Tae Eun Hong, Soo-Hyun Kim
(2018) Surface & Coatings Technology. 337(15)
Soumyadeep Sinha, Dip K. Nandi, Soo-Hyun Kim, Jaeyeong Heo
(2018) Solar Energy Materials and Solar Cells. 179
(2017)
1. Highly Stable and Effective Doping of Graphene by Selective Atomic Layer Deposition of Ruthenium
Minsu Kim, Ki-Ju Kim, Seung-Joon Lee, Hyun-Mi Kim, Seong-Yong Cho, Min-Sik Kim, Soo-Hyun Kim, and Ki-Bum Kim
(2017) ACS Applied Materials and Interfaces. 9
Byoungyong Im, Sunjung Kim, Soo-Hyun Kim
(2017) Thin Solid Films. 636
Soo-Hyun Kim
(2017) Metals and Materials International. 23
Dip K. Nandi, Sumanta Sahoo, Soumyadeep Sinha, Seungmin Yeo, Hyungjun Kim, Ravindra N. Bulakhe, Jaeyeong Heo, Jae-Jin Shim, Soo-Hyun Kim (2017) ACS Applied Materials & Interfaces. 9
Giuk Jeong, Jekyung Kim, Oki Gunawan, Seong Ryul Pae, Soo Hyun Kim, Jae Yong Song, Yun Seog Lee, Byungha Shin
(2017) Journal of Alloys and Compounds. 722
plasma-enhanced atomic layer deposition for oxide thin film transistors
Hanearl Jung; Il-Kwon Oh; Seungmin Yeo; Hyungjun Kim; Su Jeong Lee; Yun Cheol Kim; Jae-Min Myoung; Soo-Hyun Kim; Jun Hyung Lim; Sunhee Lee
(2017) Journal of Vacuum Science & Technology A. 35(3)
Byeonghyeon Jang; Seungmin Yeo; Hyungjun Kim; Byungha Shin; Soo-Hyun Kim
(2017) Journal of Vacuum Science & Technology A. 35(3)
Seungtaeg Oh, Jun Beom Kim, Jun Tae Song, Jihun Oh, Soo-Hyun Kim
(2017) Jounal of Materials Chemistry A. 7
(2016)
1. Atomic layer deposited self-forming Ru-Mn diffusion barrier for seedless Cu interconnects
H.-J. Lee, T. Hong, and Soo-Hyun Kim
(2016) JOURNAL OF ALLOYS AND COMPOUNDS, 686, 1025 – 1031
2. Plasma-free atomic layer deposition of Ru thin films using H2 molecules as a nonoxidizing reactant
Seung-Joon Lee, Soo-Hyun Kim, Masayuki Saito, Kazuharu Suzuki, Shunichi Nabeya, Jeongyeop Lee, Sangdeok Kim, Seungjin Yeom, and Do-Joong Lee
(2016) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34 (4), 03150
3. Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallization
Jun Beom Kim, Soo-Hyun Kim, Won Seok Han, and Do-Joong Lee
(2016) JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 34(4), 041504
4. A controlled growth of WNx and WCx thin films prepared by atomic layer deposition
Jun Beom Kim, Byeonghyeon Jang, Hyun-Jung Lee, Won Seok Han, Do-Joong Lee, Han-Bo-Ram Lee, Tae Eun Hong, Soo-Hyun Kim
(2016) Materials Letters, 168, 218-222
5. Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu
Yujin Jang, Jun Beom Kim, Tae Eun Hong, So Jeong Yeo, Sunju Lee, Eun Ae Jung, Bo Keun Park, Taek-Mo Chung, Chang Gyoun Kim, Do-Joong Lee, Han-Bo-Ram Lee, Soo-Hyun Kim,
(2016) Journal of Alloys and Compounds, 663, 651-658
6. Formation of Ni silicide from atomic layer deposited Ni
Jaehong Yoon, Soo Hyeon Kim, Hangil Kim, Soo-Hyun Kim, Hyungjun Kim, Han-Bo-Ram Lee
(2016) Current Applied Physics, 720-725
7. Effects of annealing on the properties of atomic layer deposited Ru thin films deposited by NH3 and H2 as reactants
Seung-Joon Lee and Soo-Hyun Kim
(2016) Thin Solid Films, 612, 122–127
8. Highly conductive and flexible fiber for textile electronics obtained by extremely low-temperature atomic layer deposition of Pt
Jaehong Lee, Jaehong Yoon, Hyun Gu Kim, Subin Kang, Woo-Suk Oh, Hassan Algadi, Saleh Al-Sayari, Bonggeun Shong, Soo-Hyun Kim, Hyungjun Kim,
Taeyoon Lee and Han-Bo-Ram Lee
(2016) NPG Asia Materials, 8, e33
9. Sci. Adv. Mater., 8, 2128–2132, (2016), doi:10.1166/sam.2016.2839
10. Korean J. Mater. Res. Vol. 26, No. 9, 486-492 (2016), http://dx.doi.org/10.3740/MRSK.2016.26.9.486
11. Korean J. Mater. Res. Vol. 26, No. 8, 430-437, (2016), http://dx.doi.org/10.3740/MRSK.2016.26.8.430
12. J. Microelectron. Packag. Soc., 23(2), 49-55 (2016), http://dx.doi.org/10.6117/kmeps.2016.23.2.049
13. Physica B 500 (2016) 4–8, http://dx.doi.org/10.1016/j.physb.2016.07.025
14. Current Applied Physics 16 (2016) 691-695, http://dx.doi.org/10.1016/j.cap.2016.03.022
15. Electron. Mater. Lett., Vol. 12, No. 3 (2016), pp. 404-410, DOI: 10.1007/s13391-016-5356-2
16. Sci. Adv. Mater., 8, 866–871, (2016), doi:10.1166/sam.2016.2546
17. Sci. Adv. Mater., 8, 854–860, (2016), doi:10.1166/sam.2016.2544
18. Applied Surface Science 365 (2016) 160–165, http://dx.doi.org/10.1016/j.apsusc.2016.01.038
(2015)
1. Journal of Nanoscience and Nanotechnology, Jae-Hun Jung, Seung-Joon Lee, Hyun-Jung Lee, Min Young Lee, Taehoon Cheon, So Ik Bae, Masayuki Saito, Kazuharu Suzuki, Shunichi Nabeya, Jeongyeop Lee, Sangdeok Kim, Seungjin Yeom, Jong Hyun Seo, and Soo-Hyun Kim, “Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant”, 15 (11), 8472 – 8477 (2015)
2. JOURNAL OF PHYSICAL CHEMISTRY C, Tae Eun Hong, Jae-Hun Jung, Seungmin Yeo, Taehoon Cheon, So Ik Bae, and Soo-Hyun Kim, So Jeong Yeo, Hyo-Suk Kim, Taek-Mo Chung, Bo Keun Park, and Chang Gyoun Kim, Do-Joong Lee “Highly Conformal Amorphous W−Si−N Thin Films by Plasma-Enhanced Atomic Layer Deposition as a Diffusion Barrier for Cu Metallization, 119, 1548-1559 (2015).
3. Seungmin Yeo, Ji-Yoon Park, Seung-Joon Lee, Do-Joong Lee, Jong Hyun Seo, Soo-Hyun Kim, “Ruthenium and ruthenium dioxide thin films deposited by atomic layer deposition using a novel zero-valent metalorganic precursor, (ethylbenzene)(1,3-butadiene)Ru(0), and molecular oxygen”, Microelectronic Engineering 137 (2015) 16–22.
4. Sang-Kyung Choi, Hangil Kim, Junbeam Kim, Taehoon Cheon, Jong Hyun Seo, Soo-Hyun Kim, “Properties of plasma-enhanced atomic layer deposited TiCx films as a diffusion barrier for Cu metallization”, Thin Solid Films 590 (2015) 311–317.
5. ACS Appl. Mater. Interfaces (2015), 7, 15351−15358, DOI: 10.1021/acsami.5b03224
6. Materials Science in Semiconductor Processing 33 (2015) 154–160, http://dx.doi.org/10.1016/j.mssp.2015.02.004
7.Applied Surface Science 343 (2015) 128–132, http://dx.doi.org/10.1016/j.apsusc.2015.03.093
8. Applied Surface Science 349 (2015) 673–682, http://dx.doi.org/10.1016/j.apsusc.2015.05.062
9. Journal of Alloys and Compounds 644 (2015) 317–323, http://dx.doi.org/10.1016/j.jallcom.2015.04.120
10. Materials Science in Semiconductor Processing 29 (2015) 139–142, http://dx.doi.org/10.1016/j.mssp.2014.01.016
11. Biosensors and Bioelectronics 63 (2015) 325–330, http://dx.doi.org/10.1016/j.bios.2014.07.059
12. Nanoscale, (2015),7, 1308-1313, DOI: 10.1039/c4nr04292a
(2014)
1. Myung Jun Kim, Seunghoe Choe, Hoe Chul Kim, Seung-Joon Lee, Soo-Hyun Kim, Oh Joong Kwon, Jae Jeong Kim, Cu direct electrodeposition using step current for superfilling onRu-Al2O3 layer, Electrochimica Acta 147 (2014) 371–379.
2. Ji-Yoon Park , Seungmin Yeo, Taehoon Cheon, Soo-Hyun Kim, Min-Kyu Kim, Hyungjun Kim,Tae Eun Hong, Do-Joong Lee, Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition, Journal of Alloys and Compounds 610 (2014) 529–539
3. Ki-Yeung Mun, Tae Eun Hong, Taehoon Cheon, Yujin Jang, Byoung-Yong Lim, Sunjung Kim, Soo-Hyun Kim, The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect, Thin Solid Films 562 (2014) 118–125.
4. Tae Eun Hong, Tae-Ho Kim, Jae-Hun Jung, Soo-Hyun Kim, and Hoon Kim, TaCx Thin Films Prepared by Atomic Layer Deposition as Diffusion Barriers for Cu Metallization, J. Am. Ceram. Soc., 97 [1] 127–134 (2014).
5. IEEE Electron Device Letters Volume: 35, Issue: 10, 1028 – 1030 (2014), 10.1109/LED.2014.2345740
6. Materials Science in Semiconductor Processing 27 (2014) 297–302, http://dx.doi.org/10.1016/j.mssp.2014.07.012
7. J. Am. Ceram. Soc., 97 [4] 1164–1169 (2014), DOI: 10.1111/jace.12762
8. ACS Appl. Mater. Interfaces (2014), 6, 8281−8287, dx.doi.org/10.1021/am501107c
9. Sensors and Actuators A 210 (2014) 197–204, http://dx.doi.org/10.1016/j.sna.2014.02.005
10. ACS Appl. Mater. Interfaces 2014, 6, 2764−2769, dx.doi.org/10.1021/am4052987
11. J. Phys. Chem. C (2014), 118, 408−415, dx.doi.org/10.1021/jp409738f
(2013)
1. Myung Jun Kim, Hoe Chul Kim, Soo-Hyun Kim, Seungmin Yeo,Oh Joong Kwon, and Jae Jeong Kim, Direct Electrodeposition of Cu on Ru-Al2O3 Layer, Journal of The Electrochemical Society, 160 (12) D3057-D3062 (2013).
2. Taeeun Hong, Taehoon Cheon, Soo-Hyun Kim, J.-G. Kim, Y.-B. Park, and O.-J. Kwon, “Effects of AlOx incorporation into atomic layer deposited Ru thin films: Applications to the Cu direct plating technology”, Journal of Alloys and Compounds 580 (2013) 72–81.
3. Atomic layer deposition of ruthenium (Ru) thin films using ethylbenzen-cyclohexadienyl Ru(0) as a seed layer for copper metallizations”, Seungmin Yeo, Sang-Hyeok Choi, Ji-Yoon Park, Soo-Hyun Kim, Taehoon Cheon, Byoung-Yong Lim and Sunjung Kim, Thin Solid Films 546 (2013) 2–8.
4. “Atomic Layer Deposition of Ru Thin Films with Enhanced Nucleation Using a Ru(0) Metallorganic Precursor and O2”, Tae Eun Hong, Sang-Hyeok Choi, Seungmin Yeo, Ji-Yoon Park, Soo-Hyun Kim, Taehoon Cheon, Hoon Kim, Min-Kyu Kim and Hyungjun Kim, ECS Journal of Solid State Science and Technology, 2 (3) P47-P53 (2013).
5. ACS Nano (2013), 7, 12, 11333–11340, https://doi.org/10.1021/nn405194e
6. J. Mater. Chem. C, 2013, 1, 4761–4769, DOI: 10.1039/c3tc30469h
(2012)
1.“A bilayer diffusion barrier of Ru/WSixNy for advanced Cu interconnects”, Tae-Kwang Eom, Windu Sari, Taehoon Cheon, Woo Kyoung Kim and Soo-Hyun Kim, Thin Solid Films, 521, 73-77 (2012).
2.“Characterization of a Ru-based Ternary-oxide Thin Film for a Diffusion Barrier”, Tae Eun Hong, E. D. Jeong, M. R. Byeon, Y. B. Kang, Ho-Soon Yang, and Soo-Hyun Kim, Journal of the Korean Physical Society, 61 (6), 984-987 (2012).
3.“Atomic layer deposition of Ru thin film using N2/H2 plasma as a reactant”, Tae Eun Hong, Ki-Yeung Mun, Sang-Kyung Choi, Ji-Yoon Park, Taehoon Cheon, Woo Kyoung Kim, Byoung-Yong Lim, Sunjung Kim, and Soo-Hyun Kim, Thin Solid Films, 520 (19) 6100-6105 (2012).
4.“Interfacial adhesion energy of Ru-AlO thin film deposited by atomic layer deposition between Cu and SiO2: Effect of the composition of Ru-AlO thin film”, Jeong-Kyu Kim, Tae-Hoon Cheon, Soo-Hyun Kim, and Young-Bae Park, Japanese Journal of Applied Physics, 05EB04 (2012).
5. Journal of the Korean Physical Society, Vol. 61, No. 6, September (2012), pp. 984∼987, DOI: 10.3938/jkps.61.984
(2011)
ALD-grown Al2O3 as a diffusion barrier for stainless steel substrates for flexible Cu(InGa)Se2 solar cells
Hyeonwook Park, Sung Cheol Kim, Hae Chul Bae, Taehoon Cheon, Soo-Hyun Kim and Woo Kyoung Kim
(2011) Molecular Crystals and Liquid Crystals, 551 (1) 147-153
Characteristics of plasma-enhanced atomic layer deposited RuSiN as a diffusion barrier against Cu
Tae-Kwang Eom, Soo-Hyun Kim, Dae-Hwan Kang, and Hoon Kim
(2011) Journal of The Electrochemical Society, 158 (11) D657-D663
Atomic layer deposition of Co using N2/H2 plasma as a reactant
Jaehong Yoon, Han-Bo-Ram Lee, Doyoung Kim, Taehoon Cheon, Soo-Hyun Kim, and Hyungjun Kim
(2011) Journal of The Electrochemical Society, 158 (11) H1179-H1182
Electrochemical formation of Cu nanowires on W surface patterned by atomic force microscope tip
Sunjung Kim, Kye-Sun Park, and Soo-Hyun Kim
(2011) Electrochemical and Solid-State Letters, 14 (11) D103-D106
Plasma-enhanced atomic layer deposition of TaCx films using tris(neopentyl) tantalum dichloride and H2 plasma
Tae-Ho Kim, Tae-Kwang Eom, Soo-Hyun Kim, Dae-Hwan Kang, Hoon Kim,, Sangho Yu, and Jin Mook Lim
(2011) Electrochemical and Solid-State Letters, 14 (8) D89-D93
Ru/WNx bilayers as diffusion barriers for Cu interconnects
Windu Sari, Tae-Kwang Eom, Sang-Hyeok Choi, and Soo-Hyun Kim
(2011) Japanese Journal of Applied Physics 50 05EA08
Thermal atomic layer deposition (ALD) of Ru films for Cu direct plating
Sang-Hyeok Choi, Taehoon Cheon, Soo-Hyun Kim, Dae-Hwan Kang, Gye-Soon Park and Sun-Jung Kim
(2011) Journal of The Electrochemical Society, 158 (6) D351-D356
Atomic layer deposition of RuAlO thin films as a diffusion barrier for seedless Cu interconnects
Taehoon Cheon, Sang-Hyeok Choi, and Soo-Hyun Kim, Dae-Hwan Kang
(2011) Electrochemical and Solid-State Letters, 14 (5) D57-D61
Plasma enhanced atomic layer deposition of ruthenium thin films using isopropylmethylbenzene-cyclohexadiene-ruthenium and NH3 plasma
Windu Sari, Tae-Kwang Eom, Soo-Hyun Kim, and Hoon Kim
(2011) Journal of The Electrochemical Society, 158 (1) D42-D47
Formation of nano-crystalline Ru-based ternary thin films by plasma-enhanced atomic layer deposition
Tae-Kwang Eom, Soo-Hyun Kim, Kye-Sun Park, Sunjung Kim,and Hoon Kim
(2011) Electrochemical and Solid-State Letters, 14 (1) D10-¬D12
Electrochemical Formation of Cu Nanowires on W Surface Patterned by Atomic Force Microscope Tip
Sunjung Kim, Kye-Sun Park, Soo-Hyun Kim
(2011) Electrochemical and Solid-State Letters 14 (11) D103-D106
Synthesis of Si Nanowires by Using Atmospheric Pressure Chemical Vapor Deposition with SiCl4
Taejin Choi, Hyungjun Kim, Doyoung Kim, Taehoon Cheon, Soohyun Kim
(2011) Journal of the Korean Physical Society, 59(2(1)), 485 - 488
Nanotechnology 22 (2011) 095305, doi:10.1088/0957-4484/22/9/095305
Adv. Funct. Mater. (2011), 21, 448–455, DOI: 10.1002/adfm.201001342
Journal of The Electrochemical Society, 158 (5) D277-D281 (2011), DOI: 10.1149/1.3568881
(2010)
Do-Joong Lee, Sung-Soo Yim, Ki-Su Kim, Soo-Hyun Kim, Ki-Bum Kim
(2010) JOURNAL OF APPLIED PHYSICS 107, 013707
Quanli Hu, Tae-Kwang Eom, Soo-Hyun Kim, Hyung-Jun Kim, Hyun Ho Lee, Yong-Sang Kim, Du Yeol Ryu, Ki-Bum Kim and Tae-Sik Yoon
(2010) Electrochemical and Solid-State Letters, 13, 11 H366-H369
3. Controlling dislocation positions in silicon germanium (SiGe) buffer layers by local oxidation
Quanli Hu, Il Seo, Zhenning Zhang, Seung-Hyun Lee, Hyun-Mi Kim, Soo-Hyun Kim, Yong-Sang Kim, Hyun Ho Lee, Ya-Hong Xie, Ki-Bum Kim, Tae-Sik Yoon
(2010) Thin Solid Films 518, S217–S221
4. Current Applied Physics 10 (2010) S286–S289, doi:10.1016/j.cap.2009.04.021
(2009)
Tae-Kwang Eom, Windu Sari, Kyu-Jeong Choi, Woong-Chul Shin, Jae Hyun Kim, Do-Joong Lee, Ki-Bum Kim, Hyunchul Sohn, and Soo-Hyun Kim
(2009) Electrochemical and Solid-State Letters, 12 (11) D85-D88
Choon-Hwan Kim, Il-Cheol Rho, Soo-Hyun Kim, Il-Keoun Han, Hyo-Sang Kang, Seung-Wook Ryu, and Hyeong-Joon Kim
(2009) Journal of The Electrochemical Society, 156 (9) H685-H689
Windu Sari, Tae-Kwang Eom, Chan-Wook Jeon, Hyunchul Sohn, and Soo-Hyun Kim
(2009) Electrochemical and Solid-State Letters, 12 (7) H248-H251
Choon-Hwan Kim, Il-Cheol Rho, Soo-Hyun Kim, Yong-Sun Sohn, Hyo-Sang Kang, and Hyeong-Joon Kim
(2009) Electrochemical and Solid-State Letters, 12 (3) H80-H83
(2008)
Soo-Hyun Kim, Hyun-Tae Kim, Sung-Soo Yim, Do-Joong Lee, Ki-Su Kim, Hyun-Mi Kim Ki-Bum Kim Hyuncul Sohn
(2008) Journal of The Electrochemical Society, 155 (8) H589-H594
Sung-Soo Yim, Do-Joong Lee, Ki-Su Kim, Soo-Hyun Kim, Tae-Sik Yoon, Ki-Bum Kim
(2008) Journal of Applied Physics, 103, 113509
Soo-Hyun Kim, Sung-Soo Yim, Do-Joong Lee, Ki-Su Kim, Hyun-Mi Kim, Ki-Bum Kim, Hyunchul Sohn
(2008) Electrochemical and Solid-State Letters, 11 (5) H127-H130
Soo-Hyun Kim, Seung-Jin Yeom, Nohjung Kwak, Hyunchul Sohn
(2008) Journal of The Electrochemical Society, 155 (2) D148-D154
(2007)
Soo-Hyun Kim, Jeong-Tae Kim, Nohjung Kwak, Jinwoong Kim, Tae-Sik Yoon, Hyunchul Sohn
(2007) J. Vac. Sci. Technol., B 25 1574- 1580
Soo-Hyun Kim, Jun-ki Kim, Ju Hee Lee, Nohjung Kwak, Jinwoong Kim, Sung-Hoon Jung, Mi-Ran Hong, Sang Hyeob Lee, Josh Collins, Hyunchul Sohn
(2007) Journal of The Electrochemical Society, 154 (8) D435-D441
(2006)
Soo-Hyun Kim, Nohjung Kwak, Jinwoong Kim, and Hyunchul Sohn
(2006) Journal of The Electrochemical Society, 153, G887
Joo Wan Lee, Soo-Hyun Kim, No Jung Kwak, Young Jin Lee, Hyun Chul Sohn and Jin Woong Kim Ho-Jung Sun
(2006) J. Vac. Sci. Technol., B 24, 1460
Soo-Hyun Kim, Jun-Ki Kim, and Nohjung Kwak, Hyunchul Sohn, and Jinwoong Kim, Sung-Hoon Jung and Mi-Ran Hong, Sang-Hyeob Lee and Josh Collins, (2006) Electrochemical and Solid-State Letters, 9, C54
(2005)
Soo-Hyun Kim, Eui-Seong Hwang, Baek-Mann Kim, Joo Wan Lee, Ho-Jung Sun, Tae Eun Hong, Jun-Ki Kim, Hyunchul Sohn, Jinwoong Kim, and Tae-Sik Yoon
(2005) Electrochemical and Solid-State Letters, 8, C155
Ho-Jung Sun, Young-Jin Lee, Soo-Hyun Kim, Joo-Wan Lee, Ja-Chun Ku, Uisik Kim, and Nak-Kyun Sung
(2005) Applied physics Letters, 86, 221919
Soo-Hyun Kim, Eui-Sung Hwang, Seung-Ho Pyi, Ho-Jung Sun, Joo-Wan Lee, Jun-Ki Kim, Nohjung Kawk, Hyunchul Sohn, and Jinwoong Kim
(2005) Journal of The Electrochemical Society, 152, C408
(2004)
Joo-Wan Lee, Jun Ki Kim, Soo-Hyun Kim, Ho-Jung Sun, Hong-Sun Yang, Hyun Chul Sohn, and Jin Woong Kim
(2004) Japanese Journal of Applied Physics, 43, 8008
Soo-Hyun Kim, Eui-Sung Hwang, Sang-Yup Han, In-Haeng Lee, Seung-Ho Pyi, Nohjung Kawk, Hyunchul Sohn, Jinwoong Kim, and Gi Bo Choi
(2004) Electrochemical and Solid-State Letters, 7, G195
Soo-Hyun Kim, Su Suk Oh, Hyun-Mi Kim, Dae-Hwan Kang, Ki-Bum Kim, Wei-Min Li, Suvi Haukka, and M. Tuominen
(2004) Journal of The Electrochemical Society, 151, C272
(2003)
Soo-Hyun Kim, Su Suk Oh, Dae-Hwan Kang, Ki-Bum Kim, Wei-Min Li, Suvi Haukka, and M. Tuominen
(2003) Applied physics Letters, 82, 4486
Soo-Hyun Kim, Ki Tae Nam, Arindom Datta, Hyun-Mi Kim, Dae-Hwan Kang, and Ki-Bum Kim
(2003) J. Vac. Sci. Technol, B21, 804
(2002)
Soo-Hyun Kim, Ki Tae Nam, Arindom Datta, and Ki-Bum Kim
(2002) Journal of Applied Physics, 92, 5512
Arindom Datta, Ki Tae Nam, Soo-Hyun Kim, and Ki-Bum Kim
(2002) Journal of Applied Physics, 92, 1099
Soo-Hyun Kim, Se-Joon Im, and Ki-Bum Kim
(2002) Thin Solid Films, 415, 177
(2001)
Ki Tae Nam, Arindom Datta, Soo-Hyun Kim, and Ki-Bum Kim
(2001) Applied physics Letters, 79, 2549
(2000)
Ki-Chul Park, Soo-Hyun Kim, and Ki-Bum Kim
(2000) Journal of The Electrochemical Society, 147, 2711
(1999)
Soo-Hyun Kim, Deuk-Seok Chung, Ki-Chul Park, Ki-Bum Kim, and Seok-Hong Min
(1999) Journal of The Electrochemical Society, 146, 1455
Patents
Patent Highlights
· Total number of patents (granted): 23
· Total number of patents (Pending): 7
· US Patent (granted):2, Japan PCT (pending): 1, Taiwan PCT (pending):1
Patents (Granted/Selected)
1. 확산 방지막의 형성 방법, 상기 확산 방지막을 포함하는 반도체 소자의 금속 배선 및 이의 제조 방법, 김수현, 이현정, 이정엽, 김상덕, 염승진, 2021.07.14 (KR 10-2279757)
2. 루테늄 박막 형성 방법, 김수현, 이현정, 나베야 슌이치, 2019.04.23 (KR 10-1973549)
3. 사산화삼코발트 박막 형성 방법, 김수현, 정순영, 김태현, 2018.07.23 (KR 10-1882733)
4. 텅스텐 함유 박막 형성 방법, 김수현, 김준범, 정순영 2016. 05. 10, (KR 10-1621473)
5. 원자층 증착법에 의한 루테늄 박막 형성 방법 및 그를 이용한 루테늄 박막, 여승민, 김수현, 2013. 09. 10, (KR 10-1309043)
6. “원자층 증착법에 의한 박막 형성 방법, 이를 포함하는 반도체 소자의 배선 및 그 제조 방법”, 천태훈, 김수현, 2012. 10. 26, (KR 10-1196746).
7. Method for forming metal wiring in semiconductor devices, Soo-Hyun Kim and Jun Ki Kim, Oct 2, 2007 (US Patent 7276443).
*Full patent list can be provided upon the request.
Teaching Activities
Semiconductor Device Processing: For senior
Thin Films Deposition: For junior
Electronic Properties of Materials: For Junior
VLSI Fabrication Technology: For graduate
Thin Film Technology: For graduate