Graduate Students

Name: Yeseul Son

E-mail: sondotmf@unist.ac.kr

Research Interests: 

Atomic layer deposition of precious metals for advanced BEOL (Back-End-of-Line)  technologies.

Academic Credential

- B.S. : Materials Science and Engineering (2022)

- MS/PhD : Graduate school of Semiconductor Materials and Devices Engineering (2023.02~)

Name: Minjeong Kweon

E-mail: minj815@unist.ac.kr

Research Interests:

Atomic layer deposition of transition metal-carbides thin films as diffusion barrier for Ru & Cu metallization.

Academic Credential

-B.S. : Materials Science and Engineering (2022)

-MS/PhD : Graduate school of Semiconductor Materials and Devices Engineering (2023.02~)

Name: Chaehyun Park

E-mail: hunnp0908@unist.ac.kr

Research Interests:

Plasma-Enhanced Atomic Layer Deposition (PEALD) of Nb-based thin films for advanced applications in microelectronic devices. 

Academic Credential

-B.S. : Materials Science and Engineering (2023)

-M.S/Ph.D : Graduate school of Semiconductor Materials and Devices Engineering (2023.02~)


Name: Jeongha Kim

E-mail:  jeongha0508@unist.ac.kr 

Research Interests:  

Atomic Layer Deposition (ALD) of Ruthenium for Replacing Copper Interconnects 

Academic Credential

-B.S. : Chemical Engineering (2023)

-M.S : Graduate school of Semiconductor Materials and Devices Engineering (2023.08~)


Achievements

- Oral Presentation, AVS 24th International Conference on Atomic Layer Deposition (ALD 2024)

- Patent, Method for forming Ru thin film, Japanese Patent application number: 2024-127601, Filing Date: 2nd August, 2024 

- Oral Presentation, The Korea Institute of Electrical and Electronic Material Engineers (2024)


Name: Minwoo Kim

E-mail:  kminu0424@unist.ac.kr  

Research Interests:

Area-selective atomic layer deposition for BEOL (Back-End-of-Line) 

Academic Credential

-B.S. : Materials Science and Chemical Engineering  (2024)

-MS/PhD : Graduate school of Semiconductor Materials and Devices Engineering (2024.02~)


Name: Yejun Kim

E-mail: kimyj9668@unist.ac.kr 

Research Interests: Atomic Layer Deposition (ALD) of Indium Nitride (InN) thin film as diffusion barrier for Cu or Ru metallization.

Academic Credential

-B.S. : Electronic Materials Engineering  (2024)

-MS/PhD : Graduate school of Semiconductor Materials and Devices Engineering (2024.02~)


Name: Yewon Seo

E-mail:  yee1435@unist.ac.kr  

Research Interests:


Academic Credential

-B.S. : Electronic Materials Engineering  (2024)

-MS/PhD : Graduate school of Semiconductor Materials and Devices Engineering (2024.02~)


Name: Dongbeom Seo 

E-mail:  tjehdqja113@unist.ac.kr 

Research Interests: Atomic Layer Deposition (ALD) of tungsten-based thin films for diffusion barriers


Academic Credential

-B.S. : Materials Science and Engineering (2024)

-M.S : Graduate school of Semiconductor Materials and Devices Engineering (2024.02~)