Graduate Students

Graduate Students

Name: Yeseul Son (Lab manager)

E-mail: sondotmf@unist.ac.kr

Research Interests:

Atomic layer deposition of precious metals for advanced BEOL (Back-End-of-Line) technologies.

Academic Credential

- B.S. : Materials Science and Engineering (2022)

- M.S./Ph.D. : Graduate school of Semiconductor Materials and Devices Engineering (2023.02 ~)

Achievements

- Poster Presentation award, 1st Asia-Pacific Atomic Layer Deposition (AP-ALD) Conference (2024)

- Poster Presentation, 1st Asia-Pacific Atomic Layer Deposition (AP-ALD) Conference (2024)

- Oral Presentation, AVS 24th International Conference on Atomic Layer Deposition (2024)

- Method for forming alloy thin film, Yeseul Son and Soo-Hyun Kim, Aug. 2, 2024 (JP Patent 2024-127602)

- Method for forming Ru thin film, Jeongha Kim, Yeseul Son and Soo-Hyun Kim, Aug. 2, 2024 (JP Patent 2024-127601)

- (first-author) Advanced Science, 2025, https://doi.org/10.1002/advs.202503561

- (co-author) Applied Surface Science, 2025, https://doi.org/10.1016/j.apsusc.2025.162750

- (co-author) Materials Today Nano, 2025, https://doi.org/10.1016/j.mtnano.2024.100557

- (co-author) Sensors and Actuators: B. Chemical, 2025, https://doi.org/10.1016/j.snb.2024.137073

- (co-author) Surfaces and Interfaces, 2024, https://doi.org/10.1016/j.surfin.2024.104014

- (co-author) Small, 2024, https://doi.org/10.1002/smll.202402003

- (co-author) ACS Appl. Nano Mater., 2023, https://doi.org/10.1021/acsanm.3c03956

Name: Minjeong Kweon

E-mail: minj815@unist.ac.kr

Research Interests:

Plasma-Enhanced Atomic layer deposition (PEALD) of transition metal-carbides thin films

Academic Credential

-B.S. : Materials Science and Engineering (2022)

-M.S./Ph.D. : Graduate school of Semiconductor Materials and Devices Engineering (2023.02~)

Achievements

- Best Student Poster Award, The 28th edition of the IEEE international Interconnect Technology Conference

- Poster Presentation, AVS 25th International Conference on Atomic Layer Deposition (ALD/ALE 2025)

- Poster Presentation, IEEE IITC 2025 Conference

- Method forming zirconium carbide thin films, Minjeong Kweon and Soo-Hyun Kim, Jun. 9, 2025

- Poster Presentation award, 1st Asia-Pacific Atomic Layer Deposition (AP-ALD) Conference

- Oral Presentation, AVS 24th International Conference on Atomic Layer Deposition (ALD/ALE 2024)

- (first-author) Applied Surface Science, 2025, https://doi.org/10.1016/j.apsusc.2025.163302

- (co-author) Chemistry of Materials, 2025, https://doi.org/10.1021/acs.chemmater.5c00557

Name: Chaehyun Park

E-mail: hunnp0908@unist.ac.kr

Research Interests:

Plasma-Enhanced Atomic Layer Deposition (PEALD) of Nb-based thin films for advanced applications in microelectronic devices.

Academic Credential

-B.S. : Materials Science and Engineering (2023)

-M.S./Ph.D. : Graduate school of Semiconductor Materials and Devices Engineering (2023.02~)

Achievements

- Best Student Paper Award, The 28th edition of the IEEE IITC Conference

- Oral Presentation, IEEE IITC 2025 Conference (2025)

- Poster Presentation, PSA-24 Conference (2024)

- Oral Presentation, 1st Asia-Pacific Atomic Layer Deposition (AP-ALD) Conference (2024)

- Poster Presentation, AVS 24th International Conference on Atomic Layer Deposition (2024)
- Oral Presentation, The Korea Institute of Electrical and Electronic Material Engineers (2024)

- Method for Forming Niobium Carbide Thin Films, Chaehyun Park and Soo-Hyun Kim, July. 16, 2025
(KR Patent 10-2025-0096350)

- (first-author) Chemistry of Materials, 2025, https://doi.org/10.1021/acs.chemmater.5c00557

- (co-author) Applied Surface Science, 2025, https://doi.org/10.1016/j.apsusc.2025.163302

- (co-author) Surfaces and Interfaces, 2024, https://doi.org/10.1016/j.surfin.2024.104014

Name: Jeongha Kim

E-mail: jeongha0508@unist.ac.kr

Research Interests:

Atomic Layer Deposition (ALD) of Ruthenium for Replacing Copper Interconnects

Academic Credential

-B.S. : Chemical Engineering (2023)

-M.S. : Graduate school of Semiconductor Materials and Devices Engineering (2025)

-Ph.D.: Graduate school of Semiconductor Materials and Devices Engineering (2025.09~)

Achievements

- Oral Presentation, IEEE IITC 2025 Conference (2025)

- Poster Presentation, PSA-24 Conference (2024)

- Oral Presentation, AVS 24th International Conference on Atomic Layer Deposition (ALD 2024)

- Oral Presentation, The Korea Institute of Electrical and Electronic Material Engineers (2024)

- Method for forming Ru thin film, Jeongha Kim, Yeseul Son and Soo-Hyun Kim, Aug. 2, 2024 (JP Patent 2024-127601)

Name: Minwoo Kim

E-mail: kminu0424@unist.ac.kr

Research Interests:

Area-selective atomic layer deposition for BEOL (Back-End-of-Line)

Academic Credential

-B.S. : Materials Science and Chemical Engineering (2024)

-M.S. : Graduate school of Semiconductor Materials and Devices Engineering (2024.02~)

Achievements

- Oral Presentation, AVS 25th International Conference on Atomic Layer Deposition (ALD/ALE 2025)

Name: Yejun Kim

E-mail: kimyj9668@unist.ac.kr

Research Interests: Plasma-Enhanced Atomic Layer Deposition (PEALD) of Indium-based thin films

Academic Credential

-B.S. : Electronic Materials Engineering (2024)

-M.S./Ph.D. : Graduate school of Semiconductor Materials and Devices Engineering (2024.02~)

Achievements

- Oral Presentation, AVS 25th International Conference on Atomic Layer Deposition (ALD/ALE 2025)

Name: Yewon Seo

E-mail: yee1435@unist.ac.kr

Research Interests: Plasma-Enhanced Atomic Layer Deposition (PEALD) of Cerium-based thin films

Academic Credential

-B.S. : Electronic Materials Engineering (2024)

-M.S./Ph.D. : Graduate school of Semiconductor Materials and Devices Engineering (2024.02~)

Achievements

- Oral Presentation, AVS 25th International Conference on Atomic Layer Deposition (ALD/ALE 2025)

Name: Dongbeom Seo

E-mail: tjehdqja113@unist.ac.kr

Research Interests: Plasma-Enhanced Atomic Layer Deposition (PEALD) of Tungsten-based thin films

Academic Credential

-B.S. : Materials Science and Engineering (2024)

-M.S. : Graduate school of Semiconductor Materials and Devices Engineering (2024.02~)

Achievements

- Poster Presentation, AVS 25th International Conference on Atomic Layer Deposition (ALD/ALE 2025)

Name: Younjae Shin

E-mail: shinyj0710@unist.ac.kr

Research Interests: Plasma-Enhanced Atomic Layer Deposition (PEALD) of Molybdenum-based thin films

Academic Credential

-Materials Science and Engineering (2025)

-M.S. : Graduate school of Semiconductor Materials and Devices Engineering (2025.03~)

Name: Dahyeon Park

E-mail: parkdahyeon@unist.ac.kr

Research Interests: Enhancing the Performance of Precious Metal Atomic Layer Deposition through Pretreatment

Academic Credential

-B.S. : Material Science and Engineering (2025)

-M.S. : Graduate school of Semiconductor Materials and Devices Engineering (2025.03~)

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