Facilities

PEALD (IOV dX1 PEALD, ISAC RESEARCH) 

Thermal ALD (LUCIDA D200HT-DC, NCD) 

Glove Box (KK-011AS, KIYON) 

Thermal ALD (LUCIDA D100, NCD)

Thermal ALD (LUCIDA D100, NCD)

Furnace ALD (IH-10, ITECHU)

Water Contact Angle (Phoenix 10, SEO)

Four point probe (CMT-100, AIT)

RTA (MILA-5050, Rich Stone)


Electrochemical Workstations