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PEALD (IOV dX1 PEALD, ISAC RESEARCH)
PEALD (IOV dX1 PEALD, ISAC RESEARCH)
Thermal ALD (LUCIDA D200HT-DC, NCD)
Thermal ALD (LUCIDA D200HT-DC, NCD)
Glove Box (KK-011AS, KIYON)
Glove Box (KK-011AS, KIYON)
4-point probe (CMT-100, AIT)
4-point probe (CMT-100, AIT)
RTA (MILA-5050, Rich Stone)
RTA (MILA-5050, Rich Stone)
Water Contact Angle (Phoenix 10, SEO)
Water Contact Angle (Phoenix 10, SEO)
Electrochemical Workstations
Electrochemical Workstations
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