Facilities
PEALD (IOV dX1 PEALD, ISAC RESEARCH)
PEALD (IOV dX1 PEALD, ISAC RESEARCH)
Thermal ALD (LUCIDA D200HT-DC, NCD)
Thermal ALD (LUCIDA D200HT-DC, NCD)
Glove Box (KK-011AS, KIYON)
Glove Box (KK-011AS, KIYON)
Thermal ALD (LUCIDA D100, NCD)
Thermal ALD (LUCIDA D100, NCD)
Thermal ALD (LUCIDA D100, NCD)
Thermal ALD (LUCIDA D100, NCD)
Furnace ALD (IH-10, ITECHU)
Furnace ALD (IH-10, ITECHU)
Water Contact Angle (Phoenix 10, SEO)
Water Contact Angle (Phoenix 10, SEO)
Four point probe (CMT-100, AIT)
Four point probe (CMT-100, AIT)
RTA (MILA-5050, Rich Stone)
RTA (MILA-5050, Rich Stone)
Electrochemical Workstations
Electrochemical Workstations