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In Multiple E-Beam Direct-Write (MEBDW) systems, one of the technical challenges is to transfer very large amounts of electron-beam layout (EBL) data that controls electron-beam emitters from the data centers to MEBDW systems. To meet the bandwidth constraint, EBL data must be compressed at the data center before sending the compressed data streams to the hardware decoders inside MEBDW systems. The hardware decoders decompress and generate EBL data for the electron-beam emitters. Since the number of the parallel decoders is large, the design of the high speed decoders has to be very compact to fit the dimension of the vacuum chamber.
Lossless Compression Scheme and High Speed Decoder Design
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